Process for preparing organotin compounds

Patent metadata

Field	Value
Publication number	US-2022153763-A1
Application number	US-202217591007-A
Country	US
Kind code	A1
Filing date	Feb 2, 2022
Priority date	Jul 3, 2020
Publication date	May 19, 2022
Grant date	—

Abstract

Provided is an efficient and effective process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides the organotin compounds in a highly pure crystalline form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.

First claim

What is claimed is:

1 - 18 . (canceled)

19 . A compound of Formula (I):

wherein each R is the same or different and is a C 1 -C 4 alkyl group and R 1 is a substituted or unsubstituted saturated or unsaturated linear or branched C 1 -C 5 group.

20 . The compound of claim 19 , wherein each R is independently a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, or sec-butyl group.

21 . The compound of claim 19 , wherein each R is a methyl group.

22 . The compound of claim 19 , wherein R 1 is a methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, sec-butyl, n-pentyl, iso-pentyl, or neopentyl group.

23 . The compound of claim 19 , wherein R 1 is a vinyl group or an acetylenyl group.

24 . The compound of claim 19 , wherein R 1 is substituted with one or more halogen groups.

25 . The compound of claim 19 , wherein R 1 is an alkylether group.

26 . The compound of claim 19 , wherein each R is a methyl group and R 1 is an isopropyl group.

27 . The compound of claim 19 , wherein the compound is dissolved in a non-polar solvent.

28 . A compound of Formula (I):

wherein each R is the same or different and is a C 2 -C 4 alkyl group and R 1 is a substituted or unsubstituted saturated or unsaturated linear, branched, or cyclic C 1 -C 5 group.

29 . The compound of claim 28 , wherein R 1 is a cyclic C 1 -C 5 group.

30 . The compound of claim 28 , wherein R 1 is a cyclic C 5 group.

31 . The compound of claim 28 , wherein each R is the same.

32 . The compound of claim 28 , wherein at least one R is an ethyl group.

33 . A compound of the Formula (II):

wherein each R is the same or different and is a C 1 -C 4 alkyl group and X is iodo, bromo, and chloro, provided that wherein X is chloro, at least one R is other than a methyl group.

34 . The compound of claim 33 , wherein X is selected from the group consisting of iodo and bromo.

35 . The compound of claim 33 , wherein X is iodo.

36 . The compound of claim 33 , wherein each R is a methyl group and X is iodo.

37 . The compound of claim 33 , wherein each R is the same.

38 . The compound of claim 33 , wherein at least one R is a methyl group and X is chloro.

Assignees

• Entegris Inc

Inventors

• Ermert David M
• Cameron Thomas M
• Kuiper David
• Baum Thomas H

Classifications

• C07B2200/13

  Crystalline forms, e.g. polymorphs · CPC title

• C07F7/2284 Primary

  Compounds with one or more Sn-N linkages · CPC title