Laser system for source material conditioning in an EUV light source

Patent metadata

Field	Value
Publication number	US-12369244-B2
Application number	US-202017433007-A
Country	US
Kind code	B2
Filing date	Mar 2, 2020
Priority date	Mar 7, 2019
Publication date	Jul 22, 2025
Grant date	Jul 22, 2025

Abstract

Disclosed is an apparatus and a method in which multiple, e.g., two or more pulses from a single laser source are applied to source material prior to application of a main ionizing pulse in which the multiple pulses are generated by a common laser source. The first pulse is directed towards the source material when the source material is at a first position and the second pulse is directed towards the source material when the source material is at a second position.

First claim

The invention claimed is:

1. Apparatus comprising:
a radiation source configured to generate a first pulse and a second pulse along a single axis; and
an optical element arranged to receive the first pulse and the second pulse and configured to:
deliver the first pulse along a first optical path to a droplet of source material at a first time and a first location to create a conditioned target of source material from the droplet of source material, and
deliver the second pulse along a second optical path spatially different from the first optical path to the conditioned target of source material at a second time and a second location distinct from the first location,

wherein the optical element comprises an optical deflector arranged to receive the first pulse and the second pulse and configured to have a first deflection state in which the optical deflector deflects the first pulse along the first optical path to the droplet of source material at the first time and a second deflection state in which the optical deflector deflects the second pulse along the second optical path to the droplet of source material at the second time.

2. Apparatus as in claim 1 wherein the radiation source is configured to generate the first pulse at the first time and the second pulse at the second time.

3. Apparatus as in claim 1 wherein the optical element comprises a beam splitter.

4. Apparatus as in claim 3 wherein the beam splitter is a 50/50 beam splitter or an A/B beam splitter where A does not equal B.

5. Apparatus as in claim 1 wherein the source material travels along a trajectory and wherein the optical element is arranged so that the first and second optical paths intersect different positions along the trajectory.

6. Apparatus as in claim 1 wherein the optical deflector comprises an acousto-optic deflector.

7. Apparatus as in claim 1 wherein the optical deflector is additionally configured to change a parameter of at least one of the first pulse and the second pulse.

8. Apparatus as in claim 7 wherein the optical deflector is additionally configured to change a parameter of the first pulse to a first value and to change the parameter of the second pulse to a second value different from the first value.

9. Apparatus as in claim 7 wherein the parameter is integrated pulse energy.

10. Apparatus as in claim 7 wherein the parameter is pulse width.

11. Apparatus as in claim 1 wherein the first optical path includes first optics having a first focal length and the second optical path includes second optics having a second focal length different from the first focal length.

12. Apparatus as in claim 1 wherein the radiation source is configured to emit near infrared radiation.

13. Apparatus as in claim 1 wherein the radiation source is configured such that a pulse characteristic of the first pulse has a first value and the pulse characteristic of the second pulse has a second value different from the first value.

14. Apparatus as in claim 13 wherein the pulse characteristic is pulse width.

15. Apparatus as in claim 13 wherein the pulse characteristic is integrated pulse energy.

16. Apparatus comprising:
a radiation source configured to generate a first pulse at a first time and a second pulse at a second time; and
an optical element arranged to receive the first pulse and the second pulse and configured to deliver the first pulse along a first optical path to a droplet of source material at a first time to create a conditioned target of source material from the droplet of source material and to deliver the second pulse along a second optical path to the conditioned target of source material at a second time;
wherein the optical element comprises an optical deflector arranged to receive the first pulse and the second pulse and configured to have a first deflection state in which the optical deflector deflects the first pulse along the first optical path to the droplet of source material at the first time and a second deflection state in which the optical deflector deflects the second pulse along the second optical path to the droplet of source material at the second time, and
wherein the second optical path is spatially different from the first optical path.

17. Apparatus as in claim 16 wherein the optical deflector comprises an acousto-optic deflector.

18. Apparatus as in claim 16 wherein the optical deflector is additionally configured to change a parameter of at least one of the first pulse and the second pulse.

19. Apparatus as in claim 18 wherein the optical deflector is additionally configured to change a parameter of the first pulse to a first value and to change the parameter of the second pulse to a second value different from the first value.

20. Apparatus as in claim 18 wherein the parameter is integrated pulse energy.

21. Apparatus as in claim 18 wherein the parameter is pulse width.

Assignees

• Asml Netherlands Bv

Inventors

• Fomenkov Igor Vladimirovich
• Tao Yezheng
• Rafac Robert Jay

Classifications

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/0088

  for preconditioning the plasma generating material · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G02F1/0128

  based on electro-mechanical, magneto-mechanical, elasto-optic effects · CPC title

• H05G2/0086 Primary

  Optical arrangements for conveying the laser beam to the plasma generation location · CPC title