Method for fabricating pattern of cured product and methods for manufacturing optical component, circuit board and quartz mold replica as well as coating material for imprint pretreatment and cured product thereof

Patent metadata

Field	Value
Publication number	US-12362176-B2
Application number	US-202117316965-A
Country	US
Kind code	B2
Filing date	May 11, 2021
Priority date	Mar 8, 2017
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

The method for fabricating pattern of a cured product includes a first step (arranging step) of arranging a layer formed of a liquid film of a curable composition (α1) containing at least a component (A1) serving as a polymerizable compound on a substrate and a second step (dispensing step) of dispensing liquid droplets of a curable composition (a2) containing at least a component (A2) serving as a polymerizable compound discretely onto a layer formed of a composition (α1′) of components of the curable composition (α1) except a component (D1) serving as a solvent, in which: the mixing of the composition (α1′) and the curable composition (α2) is exothermic.

First claim

What is claimed is:

1. A kit comprising:
a liquid curable composition (α 1 ), which contains at least a component (A 1 ) as a polymerizable compound and a component (D 1 ) as a solvent; and
a liquid curable composition (α 2 ), which contains at least a component (A 2 ) as a polymerizable compound,
wherein the liquid curable composition (α 1 ) is such that it forms a liquid film when coated on a substrate surface and then forms a liquid film of a liquid curable composition (α 1 ′) when the component (D 1 ) is volatilized,
wherein the liquid curable composition (α 2 ) is such that when it is applied to the liquid film of the liquid curable composition (α 1 ′) on the substrate, the liquid curable composition (α 1 ′) and the liquid curable composition (α 2 ) are mixed at least partially, and spreading of components of the liquid curable composition (α 2 ) in a substrate surface direction is accelerated,
wherein mixing of the liquid curable composition (α 1 ′) and the liquid curable composition (α 2 ) at a 1:1 weight ratio and stirring in an environment at 25° C. increases a temperature of a composition obtained by the mixing, and
wherein a surface tension of the liquid curable composition (α 1 ′) is larger than a surface tension of the liquid curable composition (α 2 ) to promote pre-spreading of the liquid curable composition (α 2 ) applied to the liquid film of the liquid curable composition (α 1 ′).

2. The kit according to claim 1 , wherein the component (A 1 ) contains at least one of a monofunctional (meth)acrylic compound and a multifunctional (meth)acrylic compound.

3. The kit according to claim 1 , wherein the component (A 1 ) contains a polymerizable compound having at least one organic group selected from the group consisting of an aromatic group and an alicyclic hydrocarbon group.

4. The kit according to claim 1 , wherein the component (A 1 ) contains a polymerizable compound having an alkylene ether group.

5. The kit according to claim 1 , wherein the component (A 1 ) contains a polymerizable compound having two or more repeating units of an alkylene ether group.

6. The kit according to claim 1 , wherein a content of a photopolymerization initiator in the liquid curable composition (α 1 ) is less than 0.1 wt % with respect to a total weight of all components except the component (D 1 ).

7. The kit according to claim 1 , wherein the liquid curable composition (α 1 ) contains a fluorine-based surfactant or a hydrocarbon surfactant.

8. The kit according to claim 1 , wherein the liquid curable composition (α 1 ′) has a viscosity at 23° C. of 1 mPa·s to 1,000 mPa·s.

9. The kit according to claim 1 , wherein the component (A 2 ) contains at least one selected from the group consisting of a monofunctional (meth)acrylic compound and a multifunctional (meth)acrylic compound.

10. The kit according to claim 1 , wherein the component (A 2 ) contains a polymerizable compound having at least one organic group selected from the group consisting of an aromatic group and an alicyclic hydrocarbon group.

11. The kit according to claim 1 , wherein the liquid curable composition (α 2 ) contains a component (B 2 ) as a photopolymerization initiator.

12. The kit according to claim 11 , wherein the component (B 2 ) contains two or more kinds of photopolymerization initiators.

13. The kit according to claim 1 , wherein the liquid curable composition (α 2 ) contains a fluorine-based surfactant or a hydrocarbon surfactant.

14. The kit according to claim 1 , wherein the liquid curable composition (α 2 ) contains at least one selected from the group consisting of a fluorine-based surfactant and a hydrocarbon surfactant.

15. The kit according to claim 1 , wherein a composition (α 2 ′) of components of the liquid curable composition (α 2 ) except a component (D 2 ) as a solvent has a viscosity at 23° C. of 1 mPa·s to 12 mPa·s.

16. A cured product, which is obtained by providing the kit of according to claim 1 , and curing the liquid curable composition (α 1 ′) and the liquid curable composition (α 2 ).

17. The kit according to claim 1 , wherein the increase in the temperature of the composition is at least 0.5° C. when measured with a thermal analyzer.

18. The kit according to claim 17 , wherein the thermal analyzer is selected from the group consisting of a differential thermal analyzer (DTA), a thermal gravimetric-differential thermal analyzer (TG-DTA), and a differential scanning calorimeter (DSC).

Assignees

• Canon Kk

Inventors

• Kato Jun
• Ito Toshiki

Classifications

• H10P76/204 Primary

  of organic photoresist masks · CPC title

• C08F10/14

  Monomers containing five or more carbon atoms · CPC title

• C08F10/04

  Monomers containing three or four carbon atoms · CPC title

• G03F7/094

  Multilayer resist systems, e.g. planarising layers · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title