Sensor device formed from conductive graphene film

Patent metadata

Field	Value
Publication number	US-12358797-B2
Application number	US-202418652932-A
Country	US
Kind code	B2
Filing date	May 2, 2024
Priority date	Mar 9, 2015
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

A sensor device including a conductive graphene film covered on at least one side by a graphene support layer of parylene, a detection element configured to sense an environmental change, and an electrode. The parylene repairs some defects of the conductive graphene film without damaging, polluting, or degrading the conductivity of conductive graphene film.

First claim

The invention claimed is:

1. A sensor device comprising:
a conductive graphene film consisting essentially of one to eight monolayers of carbon atoms, the conductive graphene film covered on at least one side by a graphene support layer of parylene, the graphene support layer of parylene having an inside surface; the graphene support layer of parylene contacting with and supporting the conductive graphene film; wherein said graphene support layer of parylene is tube-shaped, the graphene support layer of parylene having a thickness of between 5 nm and 5 mm;
a detection element configured to sense an environmental change, either of a chemical or a physical nature, said detection element being formed of the conductive graphene film on a portion of the inside surface of the graphene support layer of parylene; and
an electrode disposed over a selected area of the graphene support layer of parylene, the electrode comprising a conductive graphene film, the conductive graphene film consisting essentially of a graphene film to one to eight monolayers of carbon atoms; wherein the graphene support layer of parylene supports the electrode during operation of the sensor device,
wherein the graphene support layer of parylene is deposited by gas phase deposition on a surface of the graphene film,
wherein the graphene support layer of parylene supports the graphene film during operation of the sensor device,
the parylene repairing some defects in said conductive graphene film, without damaging or polluting the conductive graphene film, and without degrading conductivity of the conductive graphene film, and
wherein the sensor device is configured for detection.

2. The sensor device of claim 1 , wherein the conductive graphene film consists essentially of a doped graphene film of one to eight monolayers of carbon atoms.

Assignees

• Centre Nat Rech Scient
• Univ Grenoble Alpes

Inventors

• Kalita Dipankar
• Bouchiat Vincent
• Marty Laetitia
• Bendiab Nedjma

Classifications

• C01B32/194

  After-treatment · CPC title

• G06F3/014

  Hand-worn input/output arrangements, e.g. data gloves · CPC title

• C01B32/186 Primary

  by chemical vapour deposition [CVD] · CPC title

• G06F3/0426

  tracking fingers with respect to a virtual keyboard projected or printed on the surface (virtual keyboards on touch screens G06F3/04886) · CPC title

• B32B2313/04

  Carbon · CPC title