Semiconductor chip, method for manufacturing the same, and electronic device
US-2024213290-A1 · Jun 27, 2024 · US
US2016247933A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016247933-A1 |
| Application number | US-201314378374-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 29, 2013 |
| Priority date | Nov 26, 2013 |
| Publication date | Aug 25, 2016 |
| Grant date | — |
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Official abstract text for this publication.
The present invention provides a method for manufacturing an assembly of a flexible display device and an assembly of a flexible display device manufactured therewith. The method includes: (1) providing a flexible base ( 22 ); (2) forming a graphene layer ( 24 ) on the flexible base ( 22 ); (3) forming a protective layer ( 26 ) on the graphene layer ( 24 ); (4) forming a low-temperature polysilicon layer ( 28 ) on the protective layer ( 26 ). The method for manufacturing an assembly of a flexible display device and the assembly of the flexible display device manufactured therewith according to the present invention are such that the graphene layer is formed on the flexible base to effectively conduct out heat generated in the process of forming the low-temperature polysilicon layer so as to protect the flexible base from being affected by the heat without increasing the thickness of the protective layer thereby reducing internal stress and facilitating the realization of thinning.
Opening claim text (preview).
What is claimed is: 1 . A method for manufacturing an assembly of a flexible display device, comprising the following steps: (1) providing a flexible base; (2) forming a graphene layer on the flexible base; (3) forming a protective layer on the graphene layer; and (4) forming a low-temperature polysilicon layer on the protective layer. 2 . The method for manufacturing an assembly of a flexible display device as claimed in claim 1 , wherein the flexible base is made of polyethylene terephthalate, polyethylene naphthalate, or polyimide. 3 . The method for manufacturing an assembly of a flexible display device as claimed in claim 1 , wherein the graphene layer is formed on the flexible base by microwave chemical vapor deposition, transferring, or spin coating and the graphene layer has a thickness of 10 nm-100 nm. 4 . The method for manufacturing an assembly of a flexible display device as claimed in claim 1 , wherein the protective layer comprises at least one of a silicon nitride layer and a silicon oxide layer. 5 . The method for manufacturing an assembly of a flexible display device as claimed in claim 1 , wherein the low-temperature polysilicon layer is formed by subjecting an amorphous silicon layer to annealing, followed by being treated with doping and laser activation. 6 . A method for manufacturing an assembly of a flexible display device, comprising the following steps: (1) providing a flexible base; (2) forming a graphene layer on the flexible base; (3) forming a protective layer on the graphene layer; and (4) forming a low-temperature polysilicon layer on the protective layer; wherein the flexible base is made of polyethylene terephthalate, polyethylene naphthalate, or polyimide. 7 . The method for manufacturing an assembly of a flexible display device as claimed in claim 6 , wherein the graphene layer is formed on the flexible base by microwave chemical vapor deposition, transferring, or spin coating and the graphene layer has a thickness of 10 nm-100 nm. 8 . The method for manufacturing an assembly of a flexible display device as claimed in claim 6 , wherein the protective layer comprises at least one of a silicon nitride layer and a silicon oxide layer. 9 . The method for manufacturing an assembly of a flexible display device as claimed in claim 6 , wherein the low-temperature polysilicon layer is formed by subjecting an amorphous silicon layer to annealing, followed by being treated with doping and laser activation. 10 . An assembly of a flexible display device, comprising: a flexible base, a graphene layer formed on the flexible base, a protective layer formed on the graphene layer, and a low-temperature polysilicon layer formed on the protective layer. 11 . The assembly of the flexible display device as claimed in claim 10 , wherein the flexible base is made of polyethylene terephthalate, polyethylene naphthalate, or polyimide. 12 . The assembly of the flexible display device as claimed in claim 10 , wherein the graphene layer is formed on the flexible base by microwave chemical vapor deposition, transferring, or spin coating and the graphene layer has a thickness of 10 nm-100 nm. 13 . The assembly of the flexible display device as claimed in claim 10 , wherein the protective layer comprises at least one of a silicon nitride layer and a silicon oxide layer. 14 . The assembly of the flexible display device as claimed in claim 10 , wherein the low-temperature polysilicon layer is formed by subjecting an amorphous silicon layer to annealing, followed by being treated with doping and laser activation.
Silicon, silicon germanium or germanium · CPC title
consisting of two layers · CPC title
Monolayers · CPC title
being insulating materials · CPC title
Carbon, e.g. diamond-like carbon · CPC title
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