Mask-free photolithography using metastable undercooled metal particles

Patent metadata

Field	Value
Publication number	US-12358077-B2
Application number	US-202318175239-A
Country	US
Kind code	B2
Filing date	Feb 27, 2023
Priority date	Nov 8, 2019
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

Various embodiments relate to forming particles using undercooled metal particles in response to focused low power laser light. Particle growth can be initiated by utilizing the metastable and liquid nature of the particles, allowing for surface instability promoted by the laser light to induce liquid flow to translate to a neighboring particle. This event can cascade radially leading to accumulation of the liquid metal at the epicenter. The grown solidified particle size can be varied by using different power, exposure time, or working distance. Once the liquid has accumulated into a single region, it eventually solidifies either through homogeneous or heterogeneous nucleation to give a solid particle of larger size than the original. Such a method can be used to print patterns on a surface in four dimensions, where the fourth dimension (4D) is attained through gradient in size of the particles made. Additional systems and methods are disclosed.

First claim

What is claimed is:

1. An article of manufacture comprising:
a structure; and
particles positioned on the structure and patterned in three dimensions with a gradient in sizes of the particles, each particle having a size, structure, and properties structured from a metastable undercooled metal particle based on time of exposure of the metastable undercooled metal particle, among a set of metastable undercooled metal particles, to laser light, after a coalescence of the metastable undercooled metal particle with metal particles created from a metal flow from the set of metastable undercooled metal particles towards a source of the laser light, which coalescence results in the respective particle being larger than the metastable undercooled metal particle at a start of the exposure.

2. The article of manufacture of claim 1 , wherein the particles have a thermodynamic state dictated by irradiation time, alloy composition, a wavelength of the laser light, power of the laser light, or processing temperature.

3. The article of manufacture of claim 1 , wherein the particles have different properties than those of the metastable undercooled metal particle at a start of the irradiation.

4. The article of manufacture of claim 3 , wherein the properties include one or more of luster, shear modulus, reflectivity, thermal expansivity, or thermal conductivity.

5. The article of manufacture of claim 1 , wherein one or more of the particles have shells, each shell having a composition different from a bulk composition of the metastable undercooled metal particle used at a start of the irradiation of the respective particle, due to depletion of a component from an alloy of the metastable undercooled metal particle used at a start of the irradiation.

6. The article of manufacture of claim 1 , wherein the particles have a textured surface.

7. The article of manufacture of claim 1 , wherein the particles have a smooth surface.

8. The article of manufacture of claim 1 , wherein the particles are structured as an alloy having an asymmetric distribution of components.

9. The article of manufacture of claim 1 , wherein the particles are capable of further relaxation upon application of a stimulus after terminating the exposure to the laser light, to alter surface or bulk structures.

10. The article of manufacture of claim 1 , wherein the particles are arranged in layers, the particles including a group of the particles having different sizes varied in each layer.

11. The article of manufacture of claim 1 , wherein the particles include indium.

12. The article of manufacture of claim 1 , wherein the metastable undercooled metal particle is a metastable undercooled metal Field's particle.

13. The article of manufacture of claim 1 , wherein the metastable undercooled metal particle includes bismuth.

14. The article of manufacture of claim 1 , wherein the structure is a silicon wafer.

15. An article of manufacture comprising:
a structure including particles, each particle structured from a metastable undercooled metal particle, each particle having a size based on time of exposure of the metastable undercooled metal particle among a set of metastable undercooled metal particles to laser light, after coalescence of the metastable undercooled metal particle with metal particles created from a metal flow from the set of metastable undercooled metal particles towards a source of the laser light, which coalescence results in the particle being larger than the metastable undercooled metal particles at a start of the exposure; and
a pattern of the particles, the particles having different compositions.

16. The article of manufacture of claim 15 , wherein the pattern of the particles has a gradient in the sizes of the particles in the pattern.

17. The article of manufacture of claim 15 , wherein the pattern includes one or more composition gradients.

18. The article of manufacture of claim 15 , wherein the metastable undercooled metal particles includes bismuth.

19. The article of manufacture of claim 15 , wherein the particles have a thermodynamic state dictated by irradiation time of the laser light, alloy composition, a wavelength of the laser light, power of the laser light, or processing temperature.

Assignees

• Univ Iowa State Res Found Inc

Inventors

• Thuo Martin
• Collins Peter C
• Martin Andrew

Classifications

• B22F3/00

  Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor {; Presses and furnaces} · CPC title

• B22F12/42

  Light-emitting diodes [LED] · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B22F10/20

  Direct sintering or melting · CPC title

• B33Y50/02

  for controlling or regulating additive manufacturing processes · CPC title