Mask-free photolithography using metastable undercooled metal particles

Patent metadata

Field	Value
Publication number	US-11633807-B2
Application number	US-202017092735-A
Country	US
Kind code	B2
Filing date	Nov 9, 2020
Priority date	Nov 8, 2019
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

Various embodiments relate to forming particles using undercooled metal particles in response to focused low power laser light. Particle growth can be initiated by utilizing the metastable and liquid nature of the particles, allowing for surface instability promoted by the laser light to induce liquid flow to translate to a neighboring particle. This event can cascade radially leading to accumulation of the liquid metal at the epicenter. The grown solidified particle size can be varied by using different power, exposure time, or working distance. Once the liquid has accumulated into a single region, it eventually solidifies either through homogeneous or heterogeneous nucleation to give a solid particle of larger size than the original. Such a method can be used to print patterns on a surface in four dimensions, where the fourth dimension (4D) is attained through gradient in size of the particles made. Additional systems and methods are disclosed.

First claim

What is claimed is:

1. A method of mask-free photolithography comprising:
irradiating a metastable undercooled metal particle, the metastable undercooled metal particle being disposed on a structure, using laser light focused on the metastable undercooled metal particle, the focused laser light having a center of exposure aligned with the metastable undercooled metal particle;
maintaining the laser light focused on the metastable undercooled metal particle as the metastable undercooled metal particle autonomously grows with continued exposure to the laser light; and
terminating exposure to the laser light after a coalescence of the metastable undercooled metal particle with metal particles is created from a metal flow towards a source of the laser light, which coalescence results in a large particle, in the center of exposure, that is larger than the metastable undercooled metal particle at a start of the irradiation.

2. The method of claim 1 , wherein focusing the laser light on the metastable undercooled metal particle includes positioning the metastable undercooled metal particle at a working distance from a lens to the metastable undercooled metal particle, with the working distance equal to a focal length of the lens with the laser light impinging on the metastable undercooled metal particle in a direction from the lens that is perpendicular to the structure at a point where the metastable undercooled metal particle is disposed on the structure.

3. The method of claim 1 , wherein focusing the laser light on the metastable undercooled metal particle includes positioning the metastable undercooled metal particle at a working distance from a lens to the metastable undercooled metal particle, with the working distance being larger or smaller that a focal length of the lens to control photon flux or create hysteresis in a beam of the laser light.

4. The method of claim 1 , wherein focusing the laser light includes controlling an incident angle to the metastable undercooled metal particle to generate gravity perturbed builds providing asymmetric shapes.

5. The method of claim 1 , wherein focusing the laser light includes shilling an incident angle of the laser light to the metastable undercooled metal particle to affect a shape of the large particle or a build.

6. The method of claim 1 , wherein the method includes controlling a size of the large particle by using one or more of power associated with the laser light, exposure time to the laser light, and working distance.

7. The method of claim 1 , wherein:
irradiating the metastable undercooled metal particle includes using multiple sources of laser light; or
irradiating the metastable undercooled metal particle includes using laser light of different frequencies, wavelengths, or powers to control the metal flow.

8. The method of claim 1 , wherein the method includes forming a pattern by generating a number of large particles from individual metastable undercooled metal particles.

9. The method of claim 8 , wherein the method includes:
forming the pattern having a gradient in size of the large particles in the pattern; or
removing one or more large particles from the pattern by exposing the one or more large particles to energy from a laser source to melt the one or more large particles.

10. The method of claim 1 , wherein the method includes:
using a moving particle bed to control a shape of the grown large particle or a build; or
changing composition of the large particle by varying the power density of the laser light during the autonomous growth; or
controlling particle growth rate by drying the undercooled particles from different solvents to create capillary bridges of different dimensions based on drying time or polarity based on solvent type.

11. The method of claim 1 , wherein the method includes using a surface propagating acoustic Rayleigh wave to promote particle cleavage and coalescence.

Assignees

• Univ Iowa State Res Found Inc

Inventors

• Thuo Martin
• Collins Peter C
• Martin Andrew

Classifications

• G03F7/0037

  Production of three-dimensional images · CPC title

• B23K26/08

  Devices involving relative movement between laser beam and workpiece · CPC title

• B23K26/0648

  comprising lenses · CPC title

• G03F7/2053

  using a laser (ablative removal B41C) · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title