Process chamber process kit with protective coating

Patent metadata

Field	Value
Publication number	US-12354843-B2
Application number	US-201916418274-A
Country	US
Kind code	B2
Filing date	May 21, 2019
Priority date	Jun 14, 2018
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

Embodiments described herein generally relate to a method and apparatus for fabricating a chamber component for a plasma process chamber. In one embodiment a chamber component used within a plasma processing chamber is provided that includes a metallic base material comprising a roughened non-planar first surface, wherein the roughened non-planar surface has an Ra surface roughness of between 4 micro-inches and 80 micro-inches, a planar silica coating formed over the roughened non-planar surface, wherein the planar silica coating has a surface that has an Ra surface roughness that is less than the Ra surface roughness of the roughened non-planar surface, a thickness between about 0.2 microns and about 10 microns, less than 1% porosity by volume, and contains less than 2E 12 atoms/centimeters 2 of aluminum.

First claim

The invention claimed is:

1. A chamber component used within a plasma processing chamber, comprising:
a metallic base material comprising a roughened non-planar surface, wherein the roughened non-planar surface is a metallic surface of the metallic base material, and the roughened non-planar surface has an average surface roughness (Ra) of between 4 micro-inches and 80 micro-inches; and
a silica coating formed over the roughened non-planar surface, wherein:
the silica coating has a surface that has an Ra that is less than the Ra of the roughened non-planar surface,
the silica coating has a thickness between about 0.2 microns and about 10 microns,
the silica coating has less than 1% porosity by volume, and
the formed silica coating blocks aluminum atoms from leaching from the metallic base material and into the formed silica coating such that the surface of the formed silica coating contains more than 0 atoms/centimeters 2 of aluminum and less than 2E 12 atoms/centimeters 2 of aluminum.

2. The chamber component of claim 1 , wherein the metallic base material comprises aluminum.

3. The chamber component of claim 1 , wherein the metallic base material comprises a gas distribution showerhead.

4. The chamber component of claim 1 , wherein the metallic base material comprises a nozzle assembly.

5. The chamber component of claim 1 , wherein the metallic base material comprises a baffle.

6. The chamber component of claim 1 , wherein the metallic base material comprises a liner.

7. The chamber component of claim 6 , wherein the liner comprises a cathode liner.

8. The chamber component of claim 1 , wherein:
the roughened non-planar surface comprises pits, and the silica coating fills in the pits; and
the silica coating is fully crystallized.

9. A method for fabricating a chamber component for use in a plasma processing environment, comprising:
forming a body of the chamber component from a metallic base material comprising a roughened non-planar surface, wherein the roughened non-planar surface is a metallic surface of the metallic base material, and the roughened non-planar surface has an average surface roughness (Ra) of between 4 micro-inches and 80 micro-inches;
forming a layer of silica coating on the body over the roughened non-planar surface; and
heating the layer of silica coating and the metallic base material, wherein:
the layer of silica coating has a surface that has an Ra that is less than the Ra of the roughened non-planar surface,
the layer of silica coating has a thickness between about 0.2 microns and about 10 microns,
the layer of silica coating has less than 1% porosity by volume, and
the formed silica coating blocks aluminum atoms from leaching from the metallic base material and into the formed silica coating such that the surface of the layer of the formed silica coating contains more than 0 atoms/centimeters 2 of aluminum and less than 2E 12 atoms/centimeters 2 of aluminum.

10. The method of claim 9 , wherein the metallic base material comprises aluminum.

11. The method of claim 9 , wherein the metallic base material comprises a gas distribution showerhead.

12. The method of claim 9 , wherein the metallic base material comprises a nozzle assembly.

13. The method of claim 9 , wherein the metallic base material comprises a baffle.

14. The method of claim 9 , wherein the metallic base material comprises a liner.

15. The method of claim 14 , wherein the liner comprises a cathode liner.

16. A method, comprising:
plasma treating a process chamber with a plasma containing nitrogen or oxygen, the process chamber including a chamber component comprising:
a metallic base material comprising a roughened non-planar surface, wherein the roughened non-planar surface is a metallic surface of the metallic base material, and the roughened non-planar surface has an average surface roughness (Ra) of between 4 micro-inches and 80 micro-inches;
a planar silica coating formed over the roughened non-planar surface, wherein:
the planar silica coating has a surface that has an Ra that is less than the Ra of the roughened non-planar surface,
the planar silica coating has a thickness between about 0.2 microns and about 10 microns,
the planar silica coating has less than 1% porosity by volume, and
the formed planar silica coating blocks aluminum atoms from leaching from the metallic base material and into the formed planar silica coating such that the surface of the formed planar silica coating contains more than 0 atoms/centimeters 2 of aluminum and less than 2E 12 atoms/centimeters 2 of aluminum;

placing a substrate into the process chamber, wherein a stack is disposed on the substrate; and
plasma treating the stack disposed on the substrate.

17. The method of claim 16 , wherein the plasma containing nitrogen or oxygen is formed by introducing one or more gases into the process chamber and energizing the one or more gases.

18. The method of claim 17 , wherein the one or more gases comprise O 2 , N 2 , NH 3 , Ar, H 2 , He, or a combination thereof.

19. The method of claim 16 , wherein the plasma treating the stack comprises treating the stack with a plasma containing ammonia.

20. The method of claim 19 , wherein forming the plasma containing ammonia further comprises introducing a hydrogen containing gas and an inert gas into the process chamber and energizing the hydrogen containing gas and the inert gas.

21. The method of claim 16 , wherein the plasma treating the stack comprises treating the stack with a plasma containing nitrogen.

Assignees

• Applied Materials Inc

Inventors

• Wu Jian
• Liu Wei
• Guarini Theresa Kramer
• Wang Linlin
• Bevan Malcolm
• Hawrylchak Lara

Classifications

• H10W74/01

  Manufacture or treatment · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• C23C24/085

  Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides · CPC title

• H01J37/32495 Primary

  Means for protecting the vessel against plasma · CPC title