Wafer scale active thermal interposer for device testing

Patent metadata

Field	Value
Publication number	US-12320841-B2
Application number	US-202117528002-A
Country	US
Kind code	B2
Filing date	Nov 16, 2021
Priority date	Nov 19, 2020
Publication date	Jun 3, 2025
Grant date	Jun 3, 2025

Abstract

A system for testing circuits of an integrated circuit semiconductor wafer includes a tester system for generating signals for input to the circuits and for processing output signals from the circuits for testing the wafer and a test stack coupled to the tester system. The test stack includes a wafer probe for contacting a first surface of the wafer and for probing individual circuits of the circuits of the wafer, a wafer thermal interposer (TI) layer operable to contact a second surface of the wafer and operable to selectively heat areas of the wafer, and a cold plate disposed under the wafer TI layer and operable to cool the wafer. The system further includes a thermal controller for selectively heating and maintaining temperatures of the areas of the wafer by controlling cooling of the cold plate and by controlling selective heating of the wafer TI layer.

First claim

We claim:

1. A test system for testing circuits of an integrated circuit semiconductor wafer, the test system comprising:
a test computer for testing said circuits by generating signals for input to said circuits, processing output signals from said circuits and generating a test result thereof;
a wafer probe, coupled to said test computer, for contacting a first surface of said wafer and for probing individual circuits of said circuits of said wafer;
a wafer thermal interposer (TI) layer operable to contact a second surface of said wafer and operable to selectively heat areas of said wafer, wherein said wafer TI layer comprises a plurality of resistive traces traversing said wafer TI layer and wherein said plurality of resistive traces are operable to selectively heat a plurality of zones of said wafer TI layer that correspond to said areas of said wafer;
a cold plate disposed adjacent to said wafer TI layer and operable to cool said wafer; and
a thermal controller for selectively heating and maintaining temperatures of said areas of said wafer during said testing by controlling cooling of said cold plate and by controlling selective heating of said plurality of resistive traces of said wafer TI layer.

2. The system as described in claim 1 wherein positions of said plurality of zones of said wafer TI layer correspond to a die layout of said wafer and wherein further said wafer TI layer is customized for said wafer.

3. The test system as described in claim 2 further comprising:
a chiller for cooling liquid; and
a valve for controlling an amount of said liquid flowing to said cold plate, wherein said valve is controlled by said thermal controller.

4. The system as described in claim 2 further comprising:
a first thermal interface material (TIM) layer disposed between said cold plate and said wafer TI layer; and
a second TIM layer disposed between said wafer TI layer and said wafer.

5. The system as described in claim 4 wherein said first and second TIM layers comprise indium foil.

6. The system as described in claim 4 wherein said first and second TIM layers comprise graphite material.

7. The system as described in claim 4 further comprising:
a first vacuum valve for establishing suction for securing said wafer to said wafer TI layer;
a second vacuum valve for establishing suction for securing said wafer TI layer to said cold plate; and
a vacuum pump coupled to both said first and second vacuum valves.

8. The system as described in claim 7 further comprising:
a first blow-off valve for controlling air to release said wafer from said wafer TI layer;
a second blow-off valve for controlling air to release said wafer TI layer from said cold plate; and
a source of air coupled to both said first and second blow-off valves.

9. The system as described in claim 2 wherein each zone of said plurality of zones corresponds to a respective single die of said die layout of said wafer.

10. The system as described in claim 2 wherein each zone of said plurality of zones corresponds to a respective plurality of dice of said die layout of said wafer.

11. The system as described in claim 2 wherein each die of said die layout of said wafer corresponds to multiple respective zones of said plurality of zones of said wafer TI layer.

12. The system as described in claim 2 further comprising a pin lift mechanism for displacing pins for lifting said wafer away from said wafer TI layer and wherein said cold plate and said wafer TI layer both comprise vertical pass through channels which are aligned with said pins for allowing said pins to pass through said cold plate and said wafer TI layer to lift said wafer.

13. The test system as described in claim 1 further comprising a power supply coupled to provide power to said wafer TI layer and controlled by said thermal controller via pulse-width modulation (PWM) signals, wherein said selective heating of said wafer TI layer is based on said PWM signals.

14. The system as described in claim 13 wherein said wafer TI layer further comprises a grounded shield layer disposed on a top surface of said wafer TI layer, said grounded shield layer operable for protecting said wafer from EMI radiation resultant from said PWM signals applied to said plurality of resistive traces.

15. A test system for testing circuits of an integrated circuit semiconductor wafer, the system comprising:
a test computer system for testing said circuits by generating signals for input to said circuits, processing output signals from said circuits and generating a test result for said circuits of said wafer;
a wafer probe for contacting a top surface of said wafer and for probing individual circuits of said circuits of said wafer, said wafer probe coupled to communicate with said test computer system;
a wafer thermal interposer (TI) layer operable to contact a bottom surface of said wafer and comprising a plurality of discretely controllable thermal zones, wherein each thermal zone is operable to be discretely and selectively heated to selectively heat a respective area of said wafer and wherein further said wafer comprises a die layout comprising a plurality of dice and wherein further positions and shapes of said plurality of discretely controllable thermal zones are customized to said die layout of said wafer;
a cold plate disposed under said wafer TI layer and operable to cool said wafer; and
a thermal controller for selectively heating and maintaining temperatures of areas of said wafer, during said testing, by controlling cooling of said cold plate and by controlling heating of said plurality of discretely controllable thermal zones of said wafer TI layer.

16. The test system as described in claim 15 wherein each thermal zone of said plurality of discretely controllable thermal zones corresponds to multiple dice of said die layout of said wafer.

17. The test system as described in claim 15 wherein each thermal zone of said plurality of discretely controllable thermal zones corresponds to a single die of said die layout of said wafer.

18. A test system as described in claim 15 wherein each die of said die layout of said wafer corresponds to multiple thermal zones of said plurality of discretely controllable thermal zones of said wafer TI layer.

19. The test system as described in claim 15 wherein said wafer TI layer comprises a plurality of resistive traces traversing said wafer TI layer and operable to selectively heat and maintain temperatures of said plurality of discretely controllable thermal zones of said wafer TI layer responsive to said thermal controller.

20. The test system as described in claim 15 wherein said thermal controller comprises instructions for implementing a preconditioning method of said plurality of discretely controllable thermal zones of said wafer TI layer, said preconditioning method comprising:
bringing a first thermal zone of said plurality of discretely controllable thermal zones to a testing temperature; and
while said test computer system is testing one or more die of said die layout corresponding to said first thermal zone, simultaneously bringing a second thermal zone of said plurality of discretely controllable thermal zones to a testing temperature in advance of testing one or more die of said die layout corresponding to said second thermal zone.

21. The test system as described in claim 15 wherein said thermal controller comprises instructions for implementing a preconditioning method of said plurality of discretely controllable

Assignees

• Advantest Test Solutions Inc

Inventors

• Kabbani Samer
• Ferrari Paul
• Hiroki Ikeda
• Toshiyuki Kiyokawa
• Cruzan Gregory
• Ranganathan Karthik

Classifications

• H10W40/47

  by flowing liquids, e.g. forced water cooling · CPC title

• G01R31/318511

  Wafer Test · CPC title

• F28F2260/02

  having microchannels · CPC title

• G01R31/2889

  Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence) · CPC title

• G01R31/2856

  Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM] · CPC title