Apparatus for transporting semiconductor wafers

Patent metadata

Field	Value
Publication number	US-12308267-B2
Application number	US-202218552445-A
Country	US
Kind code	B2
Filing date	Mar 23, 2022
Priority date	Apr 1, 2021
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

A transport container transports semiconductor wafers. The transport container includes: a mandated 3D printed shape, including a device in a base that is suitable for removing liquid media; and at a surface of the transport container, a coating material configured for protection from chemicals capable of etching the wafers. The coating material is applied by of a low-temperature coating process. The coating material consists of polytetrafluoroethylene, perfluoroalkoxy polymer, or polyvinylidene fluoride. The mandated form of the transport container also includes an integrated workpiece holder for the wafers or carriers for the wafers, configured such that that the wafers to be transported are loadable in standing form. The transport container is configured for a designated transport direction of the transport container in an automatic transport system that runs parallel to a front or rear side of the semiconductor wafers.

First claim

The invention claimed is:

1. A transport container for transporting semiconductor wafers, the transport container comprising:
a mandated shape generated from a base material by 3D printing; and
in at least a region of a surface of the transport container, a coating material configured for protection from chemicals capable of etching the semiconductor wafers,
wherein the coating material has been applied by a low-temperature coating process,
wherein the coating material consists of one of polytetrafluoroethylene, a perfluoroalkoxy polymer, and polyvinylidene fluoride,
wherein the mandated form of the transport container comprises a device in a base that is suitable for removing liquid media,
wherein the mandated form of the transport container comprises one or more integrated workpiece holders for the semiconductor wafers or carriers for the semiconductor wafers, configured such that that the semiconductor wafers to be transported are loadable in standing form, and
wherein the transport container is configured for a designated transport direction of the transport container in an automatic transport system that runs parallel to a front side or a rear side of the semiconductor wafers.

2. The transport container as claimed in claim 1 ,
wherein the device capable of removing liquid media is configured such that it is opened automatically by the deposition of the transport container.

3. The transport container as claimed in claim 1 , comprising active energy stores for electrical energy.

4. The transport container as claimed in claim 1 , comprising a system for electronic data processing.

5. The transport container as claimed in claim 1 , comprising one or more securing devices configured for securing the container both to a floor-based transport system and to a ceiling-based transport system.

6. The transport container as claimed in claim 1 , comprising one or more cover apparatuses configured for preventing emergence of liquid during a transport operation.

7. The transport container as claimed in claim 1 , wherein a weight of the transport container filled with liquid and the semiconductor wafers is more than 15 kg and less than 120 kg.

8. The transport container according to claim 1 , wherein the coating material has been applied by a sintering process having a temperature below 150° C.

9. A process for transporting the semiconductor wafers, which comprises using the transport container as claimed in claim 1 .

10. A method for producing a transport container for transporting semiconductor wafers, the method comprising:
using a 3D printing to produce the transport container with a mandated shape from a base material;
applying, in at least a region of a surface of the transport container, a coating material configured for protection from chemicals capable of etching the semiconductor wafers, the coating material being applied with a low-temperature sintering process below 150° C., the coating material consisting of one of polytetrafluoroethylene, a perfluoroalkoxy polymer, and polyvinylidene fluoride,
wherein the mandated form of the transport container comprises a device in a base that is configured for removing liquid media,
wherein the mandated form of the transport container comprises one or more integrated workpiece holders for semiconductor wafers or carriers for semiconductor wafers, so that the semiconductor wafers to be transported can be loaded in standing form, and
wherein the transport container is configured such that a designated transport direction of the transport container in an automatic transport system runs parallel to a front side or a rear side of the semiconductor wafers.

Assignees

• Siltronic Ag

Inventors

• Lamprecht Ludwig
• Vogel Thoralf

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1911 Primary

  characterised by materials, roughness, coatings or the like · CPC title

• H10P72/155 Primary

  characterised by a material, a roughness, a coating or the like · CPC title

• H01L21/67383

  Electricity · mapped topic

• H01L21/67366

  Electricity · mapped topic