Environmental control material holder

Patent metadata

Field	Value
Publication number	US-11581209-B2
Application number	US-202017091642-A
Country	US
Kind code	B2
Filing date	Nov 6, 2020
Priority date	Nov 8, 2019
Publication date	Feb 14, 2023
Grant date	Feb 14, 2023

Abstract

Environmental control material holders can retain environmental control material within wafer carriers, allowing the environmental control material to protect wafers from moisture while also securing the environmental control material. The environmental control material holders may include a baseplate and tabs defining spaces to hold environmental control material, and can be configured to engage a handle of a wafer cassette. The environmental control material holders may retain one or more environmental control materials. Additionally, the environmental control material holders can be configured to also retain a humidity indicator.

First claim

The invention claimed is:

1. An environmental control material holder for a wafer carrier, comprising:
a baseplate; and
one or more tabs, at least one of the one or more tabs including a retaining feature configured to engage with a handle of a wafer cassette;
wherein, when the environmental control material holder is in a folded state, a surface of the baseplate and an opposite surface of each of the one or more tabs facing the baseplate are spaced apart from one another to define one or more spaces for retaining an environmental control material therein,
wherein the environmental control holder is configured to engage with the handle of the wafer cassette,
wherein the one or more tabs are configured to engage with the baseplate and the handle of the wafer cassette.

2. The environmental control material holder of claim 1 , further comprising a plurality of environmental control material retention tabs extending from the baseplate.

3. The environmental control material holder of claim 1 , wherein the one or more tabs are a plurality of tabs, and the baseplate includes a channel located between two of the plurality of tabs.

4. The environmental control material holder of claim 1 , further comprising an environmental control material retained in at least one of the one or more spaces, the environmental control material including at least one of a desiccant, an ionic absorbent, or a volatile organic compound absorbent.

5. The environmental control material holder of claim 4 , wherein the environmental control material includes at least one of silica gel, bentonite clay, activated charcoal, calcium sulfate, calcium chlorite, or zeolites.

6. The environmental control material holder of claim 1 , further comprising a packet containing at least one environmental control material, the packet retained in at least one of the one or more spaces.

7. The environmental control material holder of claim 6 , wherein the at least one environmental control material includes at least one of a desiccant, an ionic absorbent, or a volatile organic compound absorbent.

8. The environmental control material holder of claim 1 , wherein the retaining feature is configured to form a snap-fit with a handle of a wafer cassette.

9. The environmental control material holder of claim 1 , wherein at least one tab of the one or more tabs includes retention features configured to retain a humidity indicator.

10. The environmental control material holder of claim 1 , further comprising at least one hinge joining at least one of the one or more tabs to the baseplate.

11. The environmental control material holder of claim 1 , wherein the retaining feature includes a ramped surface configured to facilitate insertion of the environmental control material holder into a handle of a wafer cassette and an engagement surface configured to retain the environmental control material holder in place by way of contact a handle of a wafer cassette.

12. The environmental control material holder of claim 1 , wherein the environmental control material holder is formed from at least one polymer material selected from the group consisting of: a polyolefin, a polyether ether ketone (PEEK), a perfluoroalkoxy alkane (PFA), and combinations thereof.

Assignees

• Entegris Inc

Inventors

• Steffens Jason T
• Harris Andrew
• Zabka Michael C
• Lundgren B Jorden
• Lymburn Bryant L

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/13 Primary

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title