Active gas generation apparatus

Patent metadata

Field	Value
Publication number	US-12295089-B2
Application number	US-202017442136-A
Country	US
Kind code	B2
Filing date	Feb 27, 2020
Priority date	Feb 27, 2020
Publication date	May 6, 2025
Grant date	May 6, 2025

Abstract

In the present disclosure, in a high-voltage side electrode component, the electrode main dielectric film is provided on the lower surface of the electrode conductive film, and the electrode additional dielectric film is disposed below the electrode main dielectric film at an upper main/additional inter-dielectric distance. The electrode main dielectric film includes the whole electrode conductive film in a plan view, and has a formation area larger than the electrode conductive film. The electrode additional dielectric film includes the electrode conductive film in a plan view and has a formation area slightly larger than the electrode conductive film and smaller than the electrode main dielectric film. The ground side electrode component has the same features as the above-mentioned features of the high-voltage side electrode component.

First claim

The invention claimed is:

1. An active gas generation apparatus comprising:
a first electrode component that includes a first electrode conductive film; and
a second electrode component that includes a second electrode conductive film, the second electrode component being provided to face the first electrode component, wherein an active gas is obtained by activating a source gas supplied to a discharge space between the first electrode component and the second electrode component,
wherein the discharge space is defined as a region where the first and the second electrode conductive films overlap in a plan view, in which an AC voltage is applied between the first and the second electrode conductive films,
wherein the first electrode component further includes
a first main dielectric film, the first main dielectric film being provided on a side of the discharge space with respect to the first electrode conductive film, and being adjacent to the first electrode conductive film, and
a first additional dielectric film, the first additional dielectric film being provided on a side of the discharge space with respect to the first main dielectric film, at a first distance with respect to the first main dielectric film, in which a first additional dielectric space is provided between the first main dielectric film and the first additional dielectric film,

wherein the first additional dielectric space is set such that a dielectric barrier discharge is not caused in the first additional dielectric space when the dielectric barrier discharge is caused in the discharge space,
wherein the first main dielectric film overlaps the first electrode conductive film in a plan view, and has a formation area larger than the first electrode conductive film, and
wherein the first additional dielectric film overlaps the first electrode conductive film in a plan view, and has a formation area larger than the first electrode conductive film and smaller than the first main dielectric film.

2. The active gas generation apparatus according to claim 1 ,
wherein the second electrode component includes only the second electrode conductive film, and
wherein a space between the first additional dielectric film and the second electrode conductive film is the discharge space.

3. The active gas generation apparatus according to claim 1 ,
wherein, in the first electrode component, the first main dielectric film is provided on a lower surface of the first electrode conductive film, and
wherein, in the first electrode component, the first additional dielectric film is provided, below the first main dielectric film, at the first distance with respect to the first main dielectric film,
wherein, the second electrode component further includes
a second main dielectric film provided on an upper surface of the second electrode conductive film, and
a second additional dielectric film, the second additional dielectric film being provided above the second main dielectric film, at a second distance with respect to the second main dielectric film,

wherein a second additional dielectric space is provided between the second main dielectric film and the second additional dielectric film,
wherein the second additional dielectric space is set such that a dielectric barrier discharge is not caused in the second additional dielectric space when the dielectric barrier discharge is caused in the discharge space,
wherein the second main dielectric film overlaps the second electrode conductive film in a plan view, and has a formation area larger than the second electrode conductive film, and
wherein the second additional dielectric film overlaps the second electrode conductive film in a plan view, and has a formation area larger than the second electrode conductive film and smaller than the second main dielectric film.

4. The active gas generation apparatus according to claim 3 ,
wherein the second electrode component includes only the second electrode conductive film and the second additional dielectric film,
wherein the second additional dielectric film is provided on a side of the discharge space with respect to the second electrode conductive film, without contacting the second electrode conductive film, and
wherein a space between the first additional dielectric film and the second additional dielectric film is the discharge space.

5. The active gas generation apparatus according to claim 4 ,
wherein, in the second electrode component, the second additional dielectric film is provided, above the second electrode conductive film, at a third distance with respect to the second electrode conductive film, and
wherein, in the second electrode component, the second additional dielectric space is provided between the second electrode conductive film and the second additional dielectric film.

6. The active gas generation apparatus according to claim 1 ,
wherein each of the first electrode conductive film, the first main dielectric film, and the first additional dielectric film is circular in shape in a plan view, and
wherein center positions of the first electrode conductive film, the first main dielectric film, and the first additional dielectric film are aligned in a plan view.

7. The active gas generation apparatus according to claim 1 ,
wherein each of the first electrode conductive film, the first main dielectric film, and the first additional dielectric film is square in shape in a plan view, and
wherein center positions of the first electrode conductive film, the first main dielectric film, and the first additional dielectric film are aligned in a plan view.

8. The active gas generation apparatus according to claim 1 ,
wherein the first distance between the first main dielectric film and the first additional dielectric film is adjusted by a spacer.

9. The active gas generation apparatus according to claim 8 ,
wherein a value of a first voltage applied to the first additional dielectric space is set in association with the first distance, so that the value of the first voltage is less than a first threshold value while the dielectric barrier discharge is caused in the discharge space, the first threshold value being a criteria to cause the dielectric barrier discharge in the first additional dielectric space.

10. The active gas generation apparatus according to claim 1 ,
wherein a material of the first additional dielectric film is a material having sputtering resistance.

11. The active gas generation apparatus according to claim 1 ,
wherein a substance having catalytic properties is applied to a surface of the first additional dielectric film on the side of discharge space.

12. The active gas generation apparatus according to claim 1 , further comprising:
a third additional dielectric film which is subjected to application of catalyst, that is disposed in the discharge space between the first additional dielectric film and the second electrode component.

13. The active gas generation apparatus according to claim 3 ,
wherein each of the second electrode conductive film, the second main dielectric film, and the second additional dielectric film is circular in shape in a plan view, and wherein center positions of the second electrode conductive film, the second main dielectric film, and the second additional dielectric film are aligned in a plan view.

14. The active gas generation apparatus according to claim 3 ,
wherein each of the second electrode conductive film, the second main dielectric film, and the second additional dielectric film is square in shape in a plan view, and
center positions of the second electrode conductive film, the sec

Assignees

• Toshiba Mitsubishi Electric Industrial Systems Corp
• Tmeic Corp

Inventors

• Arita Ren
• Watanabe Kensuke

Classifications

• H05H1/2431

  using cylindrical electrodes, e.g. rotary drums · CPC title

• H01J37/32559

  Protection means, e.g. coatings · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/32348

  Dielectric barrier discharge · CPC title

• H05H1/2425 Primary

  the electrodes being flush with the dielectric · CPC title