Plasma treatment apparatus
US-2019184187-A1 · Jun 20, 2019 · US
US11540380B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11540380-B2 |
| Application number | US-201716097638-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 29, 2017 |
| Priority date | Sep 29, 2017 |
| Publication date | Dec 27, 2022 |
| Grant date | Dec 27, 2022 |
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The disclosure relates to a flexible active species generator comprising: a first electrode of a conductive metal thin film; a second electrode of a ground electrode; a flexible dielectric layer of an insulator formed between the first electrode and the second electrode; and a plasma resistant functional layer formed between the dielectric layer and the second electrode, wherein the first electrode and the second electrode are electrically connected to an external power supply to generate an atmospheric pressure plasma to generate active species. The flexible active species generator has a plasma resistant function to prevent deformation and decomposition of an insulator caused by the plasma as well as an active species generating function from atmospheric pressure plasma, and has durability and safety, which is thus applicable to articles, foods, garments and human body in various forms.
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What is claimed is: 1. An active species generator comprising: a first electrode of a conductive metal film; a second electrode of a ground electrode; a flexible dielectric layer of an insulator formed between the first electrode and the second electrode; and a plasma resistant functional layer formed between the dielectric layer and the second electrode, wherein the first electrode and the second electrode are electrically connected to an external power supply to generate an atmospheric pressure plasma to generate active species, wherein at least one of the dielectric layer and the plasma resistant functional layer includes an effective material, and wherein the effective material provides at least one effect selected from a cosmetic effect, an antibacterial effect, an anticancer effect, and an antiviral effect, wherein the effective material is at least one selected from the group consisting of a plant extract, a physiologically active material, an anticancer agent, and a vaccine, wherein the physiologically active material is at least one selected from caffeic acid, anomalin, adonitol, flavonoid, saponin, rutin, glutamic acid, quercetin, and astaxanthin, wherein the functional layer prevents physical or chemical changes in the dielectric layer, and wherein the functional layer is coated with an oxide that generates secondary electrons to reduce discharge voltage. 2. The active species generator of claim 1 , wherein the functional layer is formed of one selected from the group consisting of Al2O3, SiOx, SiOxCyHz, a-C and a-C:H. 3. The active species generator of claim 1 , wherein the second electrode is formed in a lattice or porous form. 4. The active species generator of claim 1 , wherein the dielectric layer is formed of one selected from the group consisting of polymer, flexible glass, fabric and paper. 5. The active species generator of claim 1 , wherein the functional layer further comprises a self-cleaning layer, a super water-repellent layer, a light-emitting layer or a mixed layer thereof. 6. The active species generator of claim 1 , wherein at least one of the first electrode and the second electrode is formed of a flexible conductive material. 7. The active species generator of claim 1 , wherein the second electrode is formed of a porous conductive material, a fabric conductive material, or a combination thereof. 8. The active species generator of claim 1 , wherein at least one of the first electrode and the second electrode is formed of a transparent conductive material. 9. The active species generator of claim 1 , wherein the dielectric layer is formed of one selected from the group consisting of polyethylene terephthalate, polyimide, polycarbonate, polyethylene, polyurethane, poly-methyl methacrylate, polystyrene, polytetrafluoroethylene, polydimethylsiloxane, and a mixture thereof. 10. The active species generator of claim 1 , wherein the dielectric layer comprises: a first dielectric layer formed on the bottom part and the side parts of the first electrode; and a second dielectric layer formed on the upper part of the first electrode. 11. The active species generator of claim 1 , wherein the at least one selected from the second electrode and the plasma resistant functional layer comprising the effective material is formed of a flexible conductive material. 12. The active species generator of claim 1 , wherein the dielectric layer comprises the effective material and is formed of a flexible non-conductive material. 13. The active species generator of claim 7 , further comprising a plurality of fine pore-forming structures formed on the second electrode or on the functional layer in contact with the second electrode to form fine pores in the epidermis of an organism.
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