Wafer processing apparatus with a rotatable table

Patent metadata

Field	Value
Publication number	US-12288710-B2
Application number	US-202117551586-A
Country	US
Kind code	B2
Filing date	Dec 15, 2021
Priority date	Dec 18, 2020
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

The disclosure relates to a wafer processing apparatus for processing wafers with a rotatable table provided with a support constructed and arranged to support a removable holder for storing a plurality of wafers. A drive assembly may be provided to provide a rotary movement to the rotatable table around a vertical axis perpendicular to the table; and, a supply line may be constructed and arranged to supply utilities to the rotatable table. The drive assembly may be controlled and configured to create the rotary movement of the table in a clockwise and/or an anticlockwise direction to avoid breakage of the supply line.

First claim

What is claimed is:

1. A wafer processing apparatus for processing wafers comprising:
a rotatable table provided with a support constructed and arranged to support a removable holder for holding a plurality of wafers; and,
a drive assembly to provide a rotary movement to the rotatable table around a substantially vertical axis substantially perpendicular to the table; wherein the apparatus is provided with a supply line to supply a utility to the rotatable table and the drive assembly is controlled and configured to create the rotary movement of the table in two directions, clockwise and anticlockwise, to avoid breakage of the supply line,
wherein the utility is a fluid and the supply line is hollow and constructed and arranged to supply the fluid to the table from a fluid supply of the apparatus, wherein the fluid is a purge gas and the supply line is connected to a purge gas supply of the apparatus, and wherein the apparatus is provided with a cassette storage comprising the rotatable table as a cassette storage carousel constructed and arranged to support a plurality of wafer cassettes and the supply line is operably connected to a plug to provide purge gas to the cassette.

2. The apparatus according to claim 1 , wherein the drive assembly is controlled and configured to create the rotary movement in one of the clockwise and anticlockwise direction over a first angle.

3. The apparatus according to claim 2 , wherein the drive assembly is controlled and configured to change the rotary direction to the other than said one of the clockwise and anticlockwise direction when the rotary movement in said one of the clockwise and anticlockwise direction reaches the first angle.

4. The apparatus according to claim 2 , wherein the drive assembly is controlled and configured to create the rotary movement in the other than said one of the clockwise and anticlockwise direction over a second angle equal but opposite to the first angle.

5. The apparatus according to claim 4 , wherein the drive assembly is controlled and configured to change the rotary direction to said one of the clockwise and anticlockwise direction again when the rotary movement in said other then said the one of the clockwise and anticlockwise direction reaches the second angle.

6. A wafer processing apparatus for processing wafers comprising:
a rotatable table provided with a support constructed and arranged to support a removable holder for holding a plurality of wafers; and,
a drive assembly to provide a rotary movement to the rotatable table around a substantially vertical axis substantially perpendicular to the table; wherein the apparatus is provided with a supply line to supply an utility to the rotatable table and the drive assembly is controlled and configured to create the rotary movement of the table in two directions, clockwise and anticlockwise, to avoid breakage of the supply line,

wherein the utility is electricity and the supply line comprises a metal core and is constructed and arranged to supply the electricity to the table from a power supply of the apparatus.

7. The apparatus according to claim 1 , wherein the supply line is curled to allow for the rotary movement.

8. The apparatus according to claim 1 , wherein the supply line comprises a flexible material to allow for the rotary movement.

9. The apparatus according to claim 1 , wherein the apparatus comprises a process chamber constructed and arranged to process a plurality of wafers supported in a wafer boat.

10. The apparatus according to claim 9 , wherein the rotatable table is constructed and arranged to support and rotate the wafer boat within the process chamber.

11. The apparatus according to claim 9 , wherein the rotatable table is constructed and arranged to support and rotate a plurality of wafers outside the process chamber.

12. The apparatus according to claim 1 , wherein the rotatable table is rotatable around the substantially vertical axis perpendicular to the table, wherein the substantially vertical axis is off center with respect to a wafer supported on the table.

13. The apparatus according to claim 1 , wherein the rotatable table is rotatable around a substantially vertical axis perpendicular to the table, wherein the vertical axis is substantially through the center of a wafer supported on the table.

14. A wafer processing apparatus for processing wafers comprising:
a rotatable table provided with a support constructed and arranged to support a removable holder for holding a plurality of wafers; and,
a drive assembly to provide a rotary movement to the rotatable table around a substantially vertical axis substantially perpendicular to the table; wherein the apparatus is provided with a supply line to supply an utility to the rotatable table and the drive assembly is controlled and configured to create the rotary movement of the table in two directions, clockwise and anticlockwise, to avoid breakage of the supply line,
wherein the supply line comprises a flexible material to allow for the rotary movement.

15. A wafer processing apparatus for processing wafers comprising:
a rotatable table provided with a support constructed and arranged to support a removable holder for holding a plurality of wafers; and,
a drive assembly to provide a rotary movement to the rotatable table around a substantially vertical axis substantially perpendicular to the table; wherein the apparatus is provided with a supply line to supply an utility to the rotatable table and the drive assembly is controlled and configured to create the rotary movement of the table in two directions, clockwise and anticlockwise, to avoid breakage of the supply line,
wherein the rotatable table is rotatable around the substantially vertical axis perpendicular to the table, wherein the substantially vertical axis is off center with respect to a wafer supported on the table.

Assignees

• Asm Ip Holding Bv

Inventors

• Oosterlaken Theodorus G M
• Patil Aniket Nitin
• Kothari Nimit

Classifications

• H10P72/3411 Primary

  involving loading and unloading of wafers · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3404 Primary

  Storage means · CPC title