Organic vapor jet printing system

Patent metadata

Field	Value
Publication number	US-12274155-B2
Application number	US-202418402792-A
Country	US
Kind code	B2
Filing date	Jan 3, 2024
Priority date	Dec 16, 2020
Publication date	Apr 8, 2025
Grant date	Apr 8, 2025

Abstract

Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

First claim

We claim:

1. An organic vapor jet printing (OVJP) deposition system comprising:
a plurality of OVJP print bars, each comprising one or more OVJP print heads;
a float table comprising:
one or more substrate grippers configured to hold a substrate having a first active surface, and to adjust a position of the substrate on the float table in at least two degrees of motion; and
one or more controls arranged to provide control over the one or more substrate grippers; and
wherein a height of each of the plurality of OVJP print bars is configured to be adjusted independently of each of the other OVJP print bars of the plurality of OVJP print bars; and

wherein the float table is configured to be moved in a region that extends below the plurality of OVJP print bars; and
wherein the substrate is configured to be moved on the float table independently of movement of the float table below the plurality of OVJP print bars.

2. The OVJP deposition system of claim 1 , where the one or more substrate grippers comprise a plurality of vacuum grippers.

3. The OVJP deposition system of claim 1 , wherein the float table is disposed below the plurality of OVJP print bars relative to gravity.

4. The OVJP deposition system of claim 1 , wherein the float table is disposed above the plurality of OVJP print bars relative to gravity.

5. The OVJP deposition system of claim 1 , further comprising one or more sensors configured to measure alignment of the substrate on the float table with the plurality of OVJP print bars, wherein the one or more sensors comprise an alignment camera configured to align the substrate with the plurality of OVJP print bars.

6. The OVJP deposition system of claim 5 , wherein the alignment camera is disposed on a common frame with the plurality OVJP print bars.

7. The OVJP deposition system of claim 1 , wherein the plurality of OVJP print bars are aligned.

8. The OVJP deposition system of claim 1 , wherein the plurality of OVJP print bars are staggered.

9. The OVJP deposition system of claim 1 , further comprising print bar gas bearings disposed on all sides of at least one print bar of the plurality of OVJP print bars.

10. The OVJP deposition system of claim 1 , wherein the height of the plurality of OVJP print bars is configured to be adjusted concurrently as a group.

11. An organic vapor jet printing (OVJP) deposition system comprising:
a plurality of OVJP print bars, each comprising one or more OVJP print heads;
a float table comprising:
one or more substrate grippers configured to hold a substrate having a first active surface, and to adjust a position of the substrate on the float table in at least two degrees of motion; and
one or more controls arranged to provide control over the one or more substrate grippers; and
wherein a height of each of the plurality of OVJP print bars is configured to be adjusted independently of each of the other OVJP print bars of the plurality of OVJP print bars; and
wherein the float table is configured to be moved in a region that extends below the plurality of OVJP print bars; and
wherein the substrate is configured to be moved on the float table independently of movement of the float table below the plurality of OVJP print bars; and
wherein a height of the one or more OVJP print heads on each OVJP print bar of the plurality of OVJP print bars is configured to be adjusted independently of the height of the each OVJP print bar.

12. The OVJP deposition system of claim 11 , where the one or more substrate grippers comprise a plurality of vacuum grippers.

13. The OVJP deposition system of claim 11 , wherein the float table is disposed below the plurality of OVJP print bars relative to gravity.

14. The OVJP deposition system of claim 11 , wherein the float table is disposed above the plurality of OVJP print bars relative to gravity.

15. The OVJP deposition system of claim 11 , further comprising one or more sensors configured to measure alignment of the substrate on the float table with the plurality of OVJP print bars, wherein the one or more sensors comprise an alignment camera configured to align the substrate with the plurality of OVJP print bars.

16. The OVJP deposition system of claim 15 , wherein the alignment camera is disposed on a common frame with the plurality OVJP print bars.

17. The OVJP deposition system of claim 11 , wherein the plurality of OVJP print bars are aligned.

18. The OVJP deposition system of claim 11 , wherein the plurality of OVJP print bars are staggered.

19. The OVJP deposition system of claim 11 , further comprising print bar gas bearings disposed on all sides of at least one print bar of the plurality of OVJP print bars.

20. The OVJP deposition system of claim 11 , wherein the height of the plurality of OVJP print bars is configured to be adjusted concurrently as a group.

Assignees

• Universal Display Corp

Inventors

• Nguyen Kent Khuong
• Krishnaswami Sriram
• Toet Daniel
• Hawthorne Jeff
• Quinn William E

Classifications

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/36

  using air tracks · CPC title

• H10K71/191

  characterised by provisions for the orientation or alignment of the layer to be deposited · CPC title

• H10K71/164

  using vacuum deposition · CPC title

• C23C14/228

  Gas flow assisted PVD deposition · CPC title