Infrared detector improved via engineering of the effective mass of charge carriers

Patent metadata

Field	Value
Publication number	US-12272718-B2
Application number	US-202218275174-A
Country	US
Kind code	B2
Filing date	Feb 1, 2022
Priority date	Feb 5, 2021
Publication date	Apr 8, 2025
Grant date	Apr 8, 2025

Abstract

A device for detecting infrared radiation, includes at least one pixel having an axis in a direction Z, the pixel comprising a first absorbent planar structure comprising at least one semiconductor layer. The composition of the materials used to produce the at least one layer of the first absorbent planar structure is chosen such that: the first absorbent planar structure has an effective valence band formed by a plurality of energy levels. Each energy level is occupied by one of: a first type of positive charge carrier, called heavy holes, having a first effective mass; or a second type of positive charge carrier, called light holes, having a second effective mass strictly less than the first effective mass. The maximum energy level of the effective valence band is occupied by light holes along the axis of the pixel.

First claim

The invention claimed is:

1. A device (D 1 ) for detecting infrared radiation, comprising at least one pixel (Pxl) having an axis (Δ) in a direction Z, said pixel comprising a first absorbent planar structure (SPA) comprising at least one semiconductor layer (C mm , C 1 , C 2 );
each layer (C mm , C 1 , C 2 ) of the first absorbent planar structure (SPA) being arranged in a crystal lattice structure;
the first absorbent planar structure (SPA) being N-doped and being produced epitaxially on a substrate (Sub), and the composition of the materials used to produce the at least one layer (C mm , C 1 , C 2 ) of the first absorbent planar structure (SPA) being chosen such that:
the first absorbent planar structure (SPA) has an effective valence band (BV eff ) formed by a plurality of energy levels (Ev hh , Ev lh ); each energy level (Ev hh , Ev lh ) being occupied by one of:
a first type of positive charge carrier, called heavy holes (hh), having a first effective mass (m hh );
or a second type of positive charge carrier, called light holes (lh), having a second effective mass (m lh ) strictly less than the first effective mass (m hh );
the maximum energy level of the effective valence band (BV eff ) being occupied by light holes (lh) along the axis (Δ) of the pixel;
the crystal lattice structure of said layer does not exhibit any dislocations resulting from mechanical relaxation of said lattices;
the effective mass of the positive charge carriers along the axis of the pixel (Δ) being less than half the effective mass of the positive charge carriers in directions defining a plane orthogonal to the axis of the pixel (Δ).

2. The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , wherein the substrate (Sub) is arranged in a crystal lattice structure and wherein the composition of the materials used to produce the at least one layer (C mm , C 1 , C 2 ) of the first absorbent planar structure (SPA) is chosen such that
the lattices of the at least one layer (C mm , C 1 , C 2 ) forming said absorbent planar structure (SPA) experience internal mechanical stresses so as to adapt to the lattices of the crystal structure of the substrate (SUB);
and such that the stress resulting from the sum of the internal mechanical stresses is a tensile stress.

3. The device (D 1 ) for detecting infrared radiation as claimed in claim 2 , wherein the composition of the materials used to produce the at least one layer (C mm , C 1 , C 2 ) of the first absorbent planar structure (SPA) is chosen such that the amplitude of the stress resulting from the sum of the internal mechanical stresses is less than a predetermined dislocation limit stress;
the density of dislocations in the first absorbent planar structure being strictly less than 10 4 dislocations/cm2.

4. The device (D 1 ) for detecting infrared radiation as claimed in claim 2 , wherein the first absorbent planar structure (SPA) comprises a first superlattice (SR) comprising a stack along the axis of the pixel (Δ) of an elementary group of semiconductor layers (G 1 ) comprising:
a first layer (C 1 ) made of a first semiconductor material (SC 1 ) having
a first conduction band minimum value (Ec 1 );
a first valence band maximum value (Ev1);
a first energy gap value (Eg 1 );
at least one second layer (C 2 ) made of a second semiconductor material (SC 2 ) having:
a second conduction band minimum value (Ec 2 ) strictly less than the first conduction band minimum value (Ec 1 );
a second valence band maximum value (Ev2) strictly less than the first valence band maximum value (Ev1);
and a second energy gap value (Eg 2 );
the lattices of the first layer (C 1 ) experiencing tensile stresses and the lattices of the second layer (C 2 ) experiencing compressive stresses.

5. The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein
the first superlattice has a first effective valence band maximum value (Ev eff ),
and wherein the positive charge carriers in the first layer (C 1 ) of an elementary group (G 1 ) see an energy barrier (BE) equal to the difference between:
the maximum energy level (Ev hh ) of the effective valence band (BV eff ) occupied by heavy holes (hh);
and a first effective valence band maximum value (Ev eff );
the product of said energy barrier (BE) and the thickness (e m2 ) of the second layer (C 2 ) being less than a predetermined value.

6. The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the second semiconductor material (SC 2 ) is the ternary alloy InAs y3 Sb 1-y3 ,
where y3 is the molar fraction of arsenic in the alloy InAs y3 Sb 1-y3 .

7. The device (D 1 ) for detecting infrared radiation as claimed in claim 6 ,
wherein the first semiconductor material (SC 1 ) is the quaternary alloy Ga x3 In 1-x3 As y4 Sb 1-y4 ,
where x3 is the molar fraction of gallium in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 and y4 is the molar fraction of arsenic in the alloy Ga x3 In 1-x2 As y4 Sb 1-y4 .

8. The device (D 1 ) for detecting infrared radiation as claimed in claim 7 , wherein:
the molar fraction y3 of arsenic in the alloy InAs y3 Sb 1-y3 is between 0.6 and 0.88,
the molar fraction x3 of gallium in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 is between 0.2 and 0.5,
and the molar fraction y4 of arsenic in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 is between a minimum value (y4 min ) and a maximum value (y4 max ) such that:
the minimum value (y4 min ) of the molar fraction y4 of arsenic in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 being an affine function of the molar fraction x3 of gallium in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 characterized by a leading coefficient equal to −0.92 and an ordinate at the origin equal to 0.93,
the maximum value (y4 max ) of the molar fraction y4 of arsenic in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 being an affine function of the molar fraction x3 of gallium in the alloy Ga x3 In 1-x3 As y4 Sb 1-y4 characterized by a leading coefficient equal to −0.66 and an ordinate at the origin equal to 1.13.

9. The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , wherein the effective mass of the holes carrying positive charges along the axis of the pixel (Δ) is less than one tenth of the mass of a free electron.

10. The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , wherein the difference between the maximum energy level occupied by light holes (Ev lh ) and the maximum energy level occupied by heavy holes (Ev hh ) is greater than the product of the Boltzmann constant and the operating temperature.

11. The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , wherein the first absorbent planar structure (SPA) consists of a single layer (C mm ) made of a bulk III-V semiconductor material.

12. The device (D 1 ) for detecting infrared radiation as claimed in claim 11 , wherein the bulk semiconductor material is the quaternary alloy Ga x1 In 1-x1 As y1 Sb 1-y1 ,
where x1 is the molar fraction of gallium in the alloy Ga x1 In 1-x1 As y1 Sb 1-y1
and y1 is the molar fraction of arsenic in the alloy Ga x In 1-x1 As y1 Sb 1-y1 .

13. The device (D 1 ) for detecting infrared radiation as claimed in claim 12 , wherein:
the substrate is made of gallium antimonide GaSb;
the molar fraction x1 of gallium Ga in the alloy Ga x In 1-x1 As y1 Sb 1-y1 is between 0 and 1;
and the molar fraction y1 of arsenic As in the alloy Ga x In 1-x1 As y1 Sb 1-y1 is between a minimum value (y1 min ) and a maximum value (y1 max ) such that:
the minimum value (y1 min ) is an affine function of the molar fraction x1 of gallium Ga in the alloy Ga x In 1-x1 As y1 Sb 1-y1

Assignees

• Lynred
• Commissariat Energie Atomique

Inventors

• Evirgen Axel
• Reverchon Jean-Luc
• Trinite Virginie

Classifications

• H10F77/1248 Primary

  having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP · CPC title

• H10F77/146

  Superlattices; Multiple quantum well structures · CPC title

• H10F30/223

  the potential barrier being a PIN barrier · CPC title

• H10F30/2215 Primary

  the devices comprising active layers made of only Group III-V materials · CPC title

• H10F77/16

  Material structures, e.g. crystalline structures, film structures or crystal plane orientations · CPC title