Tunable filter and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-12244284-B2
Application number	US-202117907295-A
Country	US
Kind code	B2
Filing date	Oct 28, 2021
Priority date	Apr 23, 2021
Publication date	Mar 4, 2025
Grant date	Mar 4, 2025

Abstract

The present disclosure provides an adjustable filter and a method for manufacturing the same, and belongs to the technical field of electronics. The tunable filter includes: a base substrate having a first surface and a second surface opposite to each other in a thickness direction of the base substrate; wherein the base substrate is provided with first connecting vias extending through the base substrate along the thickness direction of the base substrate; and at least one inductor and at least one capacitor integrated on the base substrate; wherein each of the at least one inductor includes first sub-structures on the first surface, second sub-structures on the second surface, and first connection electrodes in the first connecting vias, and the first connection electrodes connect the first sub-structures to the second sub-structures, respectively, to form a coil structure of the inductor.

First claim

What is claimed is:

1. A tunable filter, comprising:
a base substrate having a first surface and a second surface opposite to each other in a thickness direction of the base substrate; wherein the base substrate is provided with first connecting vias extending through the base substrate along the thickness direction of the base substrate; and
at least one inductor and at least one capacitor on the base substrate; wherein each of the at least one inductor comprises first sub-structures on the first surface, second sub-structures on the second surface, and first connection electrodes in the first connecting vias, and the first sub-structures are connected to the second sub-structures by the first connection electrodes, respectively;
wherein the at least one capacitor comprises a first capacitor and a second capacitor; the at least one inductor comprises one inductor; and
a first lead terminal of the inductor is connected to a first signal terminal, and a second lead terminal of the inductor is connected to a second signal terminal and a first plate of the first capacitor; a second plate of the first capacitor is connected to a second plate of the second capacitor and a first bias voltage terminal; and a first plate of the second capacitor is connected to a second bias voltage terminal.

2. The tunable filter of claim 1 , wherein the first plate and the second plate of the second capacitor are sequentially arranged along a direction away from the base substrate, and the second capacitor further comprises a P-type semiconductor layer, an intrinsic semiconductor layer and an N-type semiconductor layer stacked between the first plate and the second plate.

3. The tunable filter of claim 2 , further comprising a first interlayer dielectric layer on a side of the second plate of the second capacitor away from the base substrate, wherein the first signal terminal, the second signal terminal, the first bias voltage terminal, and the second bias voltage terminal are arranged on a side of the first interlayer dielectric layer away from the base substrate; and
the first signal terminal is connected to the first lead terminal of the inductor through a second connecting via extending through the first interlayer dielectric layer; the second signal terminal is connected to the second plate of the second capacitor through a third connecting via extending through the first interlayer dielectric layer; the first bias voltage terminal is connected to the second plate of the second capacitor through a fourth connecting via extending through the first interlayer dielectric layer; and the second bias voltage terminal is connected to the first plate of the second capacitor through a fifth connecting via extending through the first interlayer dielectric layer.

4. The tunable filter of claim 3 , further comprising a fifth connection pad, a sixth connection pad, a seventh connection pad, an eighth connection pad, and a ninth connection pad on a side of a layer, where the third signal terminal, the fourth signal terminal, the fifth signal terminal, the first control signal terminal, and the second control signal terminal are located, away from the base substrate; and
the fifth connection pad covers a side of the third signal terminal away from the base substrate; the sixth connection pad covers a side of the fourth signal terminal away from the base substrate; the seventh connection pad covers a side of the fifth signal terminal away from the base substrate; the eighth connection pad covers a side of the first control signal terminal away from the base substrate; and the ninth connection pad covers a side of the second control signal terminal away from the base substrate.

5. The tunable filter of claim 3 , further comprising a first connection pad, a second connection pad, a third connection pad, and a fourth connection pad on a side of a layer, where the first signal terminal, the second signal terminal, the first bias voltage terminal, and the second bias voltage terminal are located, away from the base substrate; and
the first connection pad covers a side of the first signal terminal away from the base substrate; the second connection pad covers a side of the second signal terminal away from the base substrate; the third connection pad covers a side of the first bias voltage terminal away from the base substrate; the fourth connection pad covers a side of the second bias voltage terminal away from the base substrate.

6. The tunable filter of claim 2 , wherein the second sub-structures of the inductor, the first plate of the first capacitor, and the first plate of the second capacitor are arranged in a same layer and are made of a same material; and/or
the first plate of the first capacitor and the second plate of the second capacitor are arranged in a same layer and made of a same material.

7. The tunable filter of claim 6 , further comprising a first interlayer dielectric layer on a side of the second plate of the second capacitor away from the base substrate, wherein the first signal terminal, the second signal terminal, the first bias voltage terminal, and the second bias voltage terminal are arranged on a side of the first interlayer dielectric layer away from the base substrate; and
the first signal terminal is connected to the first lead terminal of the inductor through a second connecting via extending through the first interlayer dielectric layer; the second signal terminal is connected to the second plate of the second capacitor through a third connecting via extending through the first interlayer dielectric layer; the first bias voltage terminal is connected to the second plate of the second capacitor through a fourth connecting via extending through the first interlayer dielectric layer; and the second bias voltage terminal is connected to the first plate of the second capacitor through a fifth connecting via extending through the first interlayer dielectric layer.

8. The tunable filter of claim 7 , further comprising a first connection pad, a second connection pad, a third connection pad, and a fourth connection pad on a side of a layer, where the first signal terminal, the second signal terminal, the first bias voltage terminal, and the second bias voltage terminal are located, away from the base substrate; and
the first connection pad covers a side of the first signal terminal away from the base substrate; the second connection pad covers a side of the second signal terminal away from the base substrate; the third connection pad covers a side of the first bias voltage terminal away from the base substrate; the fourth connection pad covers a side of the second bias voltage terminal away from the base substrate.

9. The tunable filter of claim 7 , further comprising a fifth connection pad, a sixth connection pad, a seventh connection pad, an eighth connection pad, and a ninth connection pad on a side of a layer, where the third signal terminal, the fourth signal terminal, the fifth signal terminal, the first control signal terminal, and the second control signal terminal are located, away from the base substrate; and
the fifth connection pad covers a side of the third signal terminal away from the base substrate; the sixth connection pad covers a side of the fourth signal terminal away from the base substrate; the seventh connection pad covers a side of the fifth signal terminal away from the base substrate; the eighth connection pad covers a side of the first control signal terminal away from the base substrate; and the ninth connection pad covers a side of the second control signal terminal away from the base substrate.

10. The tunable filter of claim 1 , wherein the base substrate comprises a glass substrate.

11.

Assignees

• Beijing Boe Sensor Technology Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Du Guochen
• Xie Zhenyu
• Chang Shan
• Lin Chiachiang

Classifications

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H01P1/20 Primary

  Frequency-selective devices, e.g. filters · CPC title

• H03H7/0115 Primary

  comprising only inductors and capacitors (H03H7/075, H03H7/09, H03H7/12, H03H7/13 take precedence) · CPC title

• H03H7/0153 Primary

  Electrical filters; Controlling thereof · CPC title

• H03H7/01

  Frequency selective two-port networks · CPC title