Single crystal composite synthetic diamond material

Patent metadata

Field	Value
Publication number	US-12234570-B2
Application number	US-202017593201-A
Country	US
Kind code	B2
Filing date	Mar 30, 2020
Priority date	Mar 29, 2019
Publication date	Feb 25, 2025
Grant date	Feb 25, 2025

Abstract

A method of forming a diamond composite body and the diamond composite body. A first single crystal diamond body is provided, which contains nitrogen and has a uniform strain such that over an area of at least 1×1 mm, at least 90 percent of points display a modulus of strain-induced shift of NV resonance of less than 200 kHz, wherein each point in the area is a resolved region of 50 μm 2 . The first single crystal diamond body is treated to convert at least some of the nitrogen to form at least 0.3 ppm nitrogen-vacancy, NV − , centres. A CVD process is used to grow a second single crystal diamond body on a surface of the first single crystal diamond body. The second single crystal diamond body has an NV concentration less than or equal to 10 times lower than the NV − concentration in the first single crystal diamond body.

First claim

The invention claimed is:

1. A diamond composite body comprising:
a first single crystal diamond layer, the first single crystal diamond layer having an NV − concentration of at least 0.3 ppm and a uniform strain, such that over an area of at least 1×1 mm, at least 90 percent of points display a modulus of strain-induced shift of NV resonance of less than 200 kHz, wherein each point in the area is a resolved region of 50 μm 2 ; and
a second single crystal diamond layer having an NV − concentration less than or equal to 10 times lower than the NV − concentration in the first diamond layer.

2. The diamond composite body according to claim 1 , wherein the NV − concentration in the first layer is selected from any of at least 0.5 ppm, at least 0.8 ppm and at least 1.0 ppm.

3. The diamond composite body according to claim 1 , wherein the second single crystal diamond layer has an NV− concentration selected from less than 20 times, less than 50 times and less than 100 times lower than the NV− concentration in the first diamond layer.

4. The diamond composite body according to claim 1 , wherein the modulus of strain-induced shift of NV resonance is selected from any of less than 150 kHz, less than 100 kHz, less than 50 kHz, and less than 25 kHz.

5. The diamond composite body according to claim 1 , wherein the first single crystal diamond and second single crystal diamond layers are selected from any of CVD synthetic diamond and HPHT synthetic diamond.

6. The diamond composite body according to claim 1 , wherein a product of a concentration of NV− defects and decoherence time T2* in the first diamond layer selected from any of at least 2.0 ppm·μs, at least 2.5 ppm·μs, at least 3 ppm·μs, and at least 5 ppm·μs.

7. The diamond composite body according to claim 1 , wherein the first single crystal diamond layer has a thickness selected from any of 50 nm to 100 μm, 100 nm to 80 μm, 500 nm to 50 μm, and 800 to 20 μm.

8. The diamond composite body according to claim 1 , wherein the area in the first single crystal diamond layer is in a central 70% of the first single crystal diamond layer, and within the area there are no series of more than 1000 contiguous points having a modulus of strain-induced shift of NV resonance lines exceeding 150 kHz.

9. The diamond composite body according to claim 8 , wherein within the area there are no series of more than 500 contiguous points having a modulus of strain-induced shift of NV resonance lines exceeding 150 kHz.

10. The diamond composite body according to claim 1 , further comprising a third layer interposed between the first and second layer.

11. The diamond composite body according to claim 1 , wherein there is a gradient of NV − concentration across an interface between the first and second layers.

12. The diamond composite body according to claim 1 , wherein the area is selected from any of at least 1.5×1.5 mm and at least 2.0×2.0 mm.

13. A method of forming a diamond composite body, the method comprising:
providing a first single crystal diamond body, the first single crystal diamond body containing nitrogen and having a uniform strain such that over an area of at least 1×1 mm, at least 90 percent of points display a modulus of strain-induced shift of NV resonance of less than 200 kHz, wherein each point in the area is a resolved region of 50 μm2; and
treating the first single crystal diamond body to convert at least some of the nitrogen to form nitrogen-vacancy, NV−, centres, wherein the first single crystal diamond body has an NV− concentration of at least 0.3 ppm;
using a CVD process, growing a second single crystal diamond body on a surface of the first single crystal diamond body, the second single crystal diamond body having an NV-concentration less than or equal to 10 times lower than the NV− concentration in the first single crystal diamond body, thereby forming the diamond composite body comprising a first layer of the first single crystal diamond body and a second layer of the second single crystal diamond body.

14. The method according to claim 13 , wherein the treatment of the first single crystal diamond body comprises irradiating and annealing the first single crystal diamond body.

15. The method according to claim 13 , comprising providing a first single crystal diamond body having a modulus of strain-induced shift of NV resonance selected from any of less than 150 kHz, less than 100 kHz, less than 50 kHz, and less than 25 kHz.

16. The method according to claim 13 , wherein the first single crystal diamond body is selected from any of CVD synthetic diamond and HPHT synthetic diamond.

17. The method according to claim 13 , further comprising deterministically processing a surface of the first single crystal diamond body to obtain any of a desired thickness profile, a desired surface profile and a desired surface pattern.

Assignees

• Element Six Tech Ltd
• Element Six Uk Ltd

Inventors

• Edmonds Andrew Mark
• Colard Pierre-Olivier Francois Marc
• Markham Matthew Lee

Classifications

• C30B33/00

  After-treatment of single crystals or homogeneous polycrystalline material with defined structure (C30B31/00 takes precedence) · CPC title

• C30B29/68

  Crystals with laminate structure, e.g. "superlattices" · CPC title

• C30B25/205

  the substrate being of insulating material · CPC title

• C30B25/186

  being specially pre-treated by, e.g. chemical or physical means · CPC title

• C23C16/56

  After-treatment · CPC title