Apparatus and method for treating substrate

Patent metadata

Field	Value
Publication number	US-12222159-B2
Application number	US-202117408953-A
Country	US
Kind code	B2
Filing date	Aug 23, 2021
Priority date	Sep 18, 2020
Publication date	Feb 11, 2025
Grant date	Feb 11, 2025

Abstract

An apparatus for treating a substrate includes a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state, a fluid supply unit that supplies the drying fluid into the inner space, a fluid exhaust unit that releases the drying fluid from the inner space, and a controller. The controller controls the fluid supply unit and the fluid exhaust unit to perform a pressure-raising step of raising pressure in the inner space to a set pressure and a flow step of generating a flow of the drying gas in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space.

First claim

What is claimed is:

1. An apparatus for treating a substrate, the apparatus comprising:
a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state;
a fluid supply unit configured to supply the drying fluid into the inner space;
a fluid exhaust unit configured to release the drying fluid from the inner space and including:
a main exhaust line connected with the body;
a plurality of branch lines connected to the main exhaust line,
wherein the plurality of branch lines includes a flow line;
a controller configured to control the fluid supply unit and the fluid exhaust unit to perform:
a pressure-raising step of raising pressure in the inner space to a set pressure; and
a flow step of generating a flow of the drying fluid in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space; and
a pressure adjustment member installed at the flow line and configured to:
measure pressure of the drying fluid flowing through the main exhaust line; and
adjust the pressure in the inner space to the set pressure by adjusting an amount of the drying fluid released per unit time through the flow line.

2. The apparatus of claim 1 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the pressure in the inner space is maintained at the set pressure while the flow step is performed.

3. The apparatus of claim 1 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that an amount of the drying fluid supplied into the inner space per unit time by the fluid supply unit is equal to an amount of the drying fluid released from the inner space per unit time by the fluid exhaust unit while the flow step is performed.

4. The apparatus of claim 1 ,
wherein the fluid exhaust unit further includes:
a first exhaust valve configured to selectively flow the drying fluid through the main exhaust line, and
wherein the controller is configured control the fluid supply unit and the fluid exhaust unit such that the first exhaust valve remains turned on while the flow step is performed.

5. The apparatus of claim 4 ,
wherein the fluid exhaust unit further includes:
a slow vent line branched from the main exhaust line;
a second exhaust valve installed at the slow vent line;
a quick vent line branched from the main exhaust line; and
a third exhaust valve installed at the quick vent line,

wherein the first exhaust valve is installed at the flow line, and
wherein an amount of the drying fluid released per unit time through the quick vent line is greater than an amount of the drying fluid released per unit time through the slow vent line.

6. The apparatus of claim 5 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit to perform:
a first vent step of lowering the pressure in the inner space by releasing the drying fluid in the inner space through the slow vent line by turning on the second exhaust valve; and
a second vent step of lowering the pressure in the inner space through the quick vent line by turning on the third exhaust valve.

7. The apparatus of claim 1 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the flow step is performed for a time period between 20 seconds and 65 seconds.

8. The apparatus of claim 7 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the flow step is performed for a time period between 25 seconds and 65 seconds.

9. The apparatus of claim 2 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the set pressure has a value between 120 Bar and 150 Bar.

10. The apparatus of claim 9 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the set pressure is equal to 150 Bar.

11. An apparatus for treating a substrate, the apparatus comprising:
a body having an inner space in which the substrate is dried by a drying fluid in a supercritical state;
a fluid supply unit configured to supply the drying fluid into the inner space;
a fluid exhaust unit configured to release the drying fluid from the inner space; and
a controller,
wherein the fluid exhaust unit includes:
a main exhaust line connected with the body; and
a first exhaust valve configured to cause the drying fluid to selectively flow through the main exhaust line,

wherein the controller is configured to perform:
a pressure-raising step of raising pressure in the inner space to a set pressure;
a flow step of maintaining the pressure in the inner space at the set pressure; and
a vent step of lowering the pressure in the inner space, and

wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that the first exhaust valve remains turned on during the flow step.

12. The apparatus of claim 11 ,
wherein the controller is configured to control the fluid supply unit and the fluid exhaust unit such that an amount of the drying fluid supplied per unit time by the fluid supply unit is equal to an amount of the drying fluid released per unit time through the main exhaust line during the flow step.

13. The apparatus of claim 12 ,
wherein the fluid exhaust unit further includes a pressure adjustment member configured to adjust the pressure in the inner space to the set pressure, based on pressure of the drying fluid flowing through the main exhaust line during the flow step.

14. The apparatus of claim 13 ,
wherein the main exhaust line branches into branch lines, and
wherein the branch lines include:
a vent line configured to lower the pressure in the inner space, and
a flow line having the first exhaust valve and the pressure adjustment member installed thereon.

15. The apparatus of claim 11 ,
wherein the fluid supply unit includes:
a first supply line configured to supply the drying fluid from above the substrate supported in the inner space; and
a second supply line configured to supply the drying fluid from below the substrate supported in the inner space.

16. The apparatus of claim 11 ,
wherein the fluid supply unit includes:
a first supply line configured to supply the drying fluid from a side to the substrate supported in the inner space; and
a second supply line configured to supply the drying fluid from below the substrate supported in the inner space.

17. An apparatus for treating a substrate, the apparatus comprising:
a body having an inner space in which an organic solvent remaining on the substrate is dried by a drying fluid in a supercritical state;
a fluid supply unit configured to supply the drying fluid into the inner space;
a fluid exhaust unit configured to release the drying fluid from the inner space; and
a controller,
wherein the controller is configured to perform:
a pressure-raising step of raising pressure in the inner space to a set pressure by supplying, by the fluid supply unit, the drying fluid into the inner space;
a flow step of generating a flow of the drying fluid in the inner space by releasing, by the fluid exhaust unit, the drying fluid from the inner space while the fluid supply unit supplies the drying fluid into the inner space; and
a vent step of lowering the pressure in the inner space by releasing, by the fluid exhaust unit, the drying fl

Assignees

• Semes Co Ltd

Inventors

• Yoon Do Hyeon
• Choi Yong Hyun
• Lim Eui Sang
• Choi Jun Young

Classifications

• F26B21/35

  Temperature; Pressure · CPC title

• F26B21/40 Primary

  using gases other than air · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0408 Primary

  for drying · CPC title