Miniature pressure/force sensor with integrated leads

Patent metadata

Field	Value
Publication number	US-12216013-B2
Application number	US-202318388473-A
Country	US
Kind code	B2
Filing date	Nov 9, 2023
Priority date	Feb 3, 2016
Publication date	Feb 4, 2025
Grant date	Feb 4, 2025

Abstract

A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly comprising a common insulating layer and a common conductor layer on the insulating layer. The conductor layer includes at least a portion of the sensing element and at least the first trace.

First claim

The invention claimed is:

1. A capacitive pressure sensor, comprising:
a first trace assembly, including:
a spring metal diaphragm including a base portion and a moving portion;
an insulating layer including a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and

a second trace assembly joined to the first trace assembly, including:
a diaphragm including a base;
an insulating layer having a diaphragm portion on the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion.

2. The pressure sensor of claim 1 wherein the base portion of the first trace assembly is joined to the base portion of the second trace assembly.

3. The pressure sensor of claim 1 and further including a spacer, and wherein the base portions of the first and second trace assemblies are joined to the spacer.

4. The pressure sensor of claim 1 wherein the spring metal diaphragm includes a plurality of arms coupling the moving portion to the base portion.

5. A capacitive pressure sensor, comprising:
a trace assembly, including:
a spring metal diaphragm including a base portion and a moving portion;
an insulating layer having a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm;
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and

a metal can electrically and mechanically connected to the base portion of the spring metal diaphragm and defining a void adjacent the moving portion of the spring metal diaphragm.

6. A capacitive pressure sensor, comprising:
an insulating layer including a diaphragm portion, a lead portion, and first and second opposite sides;
a conductor layer on the first side of the insulating layer including:
an electrode on the diaphragm portion;
a first trace extending from the electrode on the lead portion; and
a second trace on the lead portion;

a metal spacer member on the second side of the insulating layer around the electrode;
a conductive via electrically connecting the second trace to the metal spacer member; and
a metal electrode member mechanically and electrically joined to the metal spacer member.

Assignees

• Hutchinson Technology

Inventors

• Davis Michael W
• Ladwig Peter F
• Lang Matthew S
• Myers Dean E
• Olsen Clark T
• Riemer Douglas P

Classifications

• G01L1/146

  for measuring force distributions, e.g. using force arrays (G01L1/148 takes precedence) · CPC title

• G01L1/2268 Primary

  Arrangements for correcting or for compensating unwanted effects · CPC title