Heat treatment apparatus and heat treatment method

Patent metadata

Field	Value
Publication number	US-12196492-B2
Application number	US-202217662699-A
Country	US
Kind code	B2
Filing date	May 10, 2022
Priority date	May 24, 2021
Publication date	Jan 14, 2025
Grant date	Jan 14, 2025

Abstract

A heat treatment apparatus including: a cylindrical processing container; a heater configured to heat the processing container; and a cooler configured to cool the processing container, wherein the cooler includes: discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container; a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes; and blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths.

First claim

The invention claimed is:

1. A heat treatment apparatus comprising:
a cylindrical processing container;
a heater configured to heat the processing container; and
a cooler configured to cool the processing container,
wherein the cooler includes:
discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container;
a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes; and
blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths, and
wherein the branch includes a plurality of branch chambers provided in multiple stages.

2. The heat treatment apparatus according to claim 1 , further comprising check valves provided for the respective ones of the flowing paths, the check valves being configured to prevent backflow of the cooling medium from the discharge holes that communicate with the respective ones of the flowing paths to respective ones of the blowers.

3. The heat treatment apparatus according to claim 2 , further comprising a controller configured to independently control each of the blowers.

4. The heat treatment apparatus according to claim 3 , further comprising sensors provided for respective ones of the flowing paths, the sensors configured to detect a characteristic value of the respective ones of the flowing paths, wherein the controller monitors backflow of the cooling medium based on detected values of the sensors.

5. The heat treatment apparatus according to claim 4 , further comprising sensors provided for respective ones of the flowing paths, the sensors configured to detect a characteristic value of the respective ones of the flowing paths, wherein the controller controls rotation speeds of the blowers based on detected values of the sensors.

6. The heat treatment apparatus according to claim 5 , wherein the characteristic value includes temperature of the cooling medium sent from the blowers to the discharge holes.

7. The heat treatment apparatus according to claim 6 , wherein the characteristic value includes a differential pressure before and after the blowers.

8. The heat treatment apparatus according to claim 7 , wherein the characteristic value includes a flow rate of the cooling medium sent from the blowers to the discharge holes.

9. The heat treatment apparatus according to claim 1 , further comprising a controller configured to independently control each of the blowers.

10. The heat treatment apparatus according to claim 9 , further comprising sensors provided for respective ones of the flowing paths, the sensors configured to detect a characteristic value of the respective ones of the flowing paths, wherein the controller monitors backflow of the cooling medium based on detected values of the sensors.

11. The heat treatment apparatus according to claim 10 , wherein the characteristic value includes temperature of the cooling medium sent from the blowers to the discharge holes.

12. The heat treatment apparatus according to claim 10 , wherein the characteristic value includes a differential pressure before and after the blowers.

13. The heat treatment apparatus according to claim 10 , wherein the characteristic value includes a flow rate of the cooling medium sent from the blowers to the discharge holes.

14. The heat treatment apparatus according to claim 9 , further comprising sensors provided for respective ones of the flowing paths, the sensors configured to detect a characteristic value of the respective ones of the flowing paths, wherein the controller controls rotation speeds of the blowers based on detected values of the sensors.

15. A heat treatment method in a heat treatment apparatus, the heat treatment apparatus including:
a heater configured to heat a cylindrical processing container; and
a cooler configured to cool the processing container,
wherein the cooler includes:
discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container;
a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes; and
blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths, and
wherein the branch includes a plurality of branch chambers provided in multiple stages,
wherein when a heat treatment is performed in the processing container, the respective ones of the blowers are independently controlled according to a condition of the heat treatment.

Assignees

• Tokyo Electron Ltd

Inventors

• Obara Kazuteru
• Yamaguchi Tatsuya

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0431 Primary

  Apparatus for thermal treatment · CPC title

• F27D2021/0007

  Monitoring the pressure · CPC title

• F27D2019/0056

  Regulation involving cooling · CPC title

• F27D2009/0005

  the cooling medium being a gas · CPC title