Etching and thinning for the fabrication of lithographically patterned diamond nanostructures

Patent metadata

Field	Value
Publication number	US-12184259-B2
Application number	US-202117466979-A
Country	US
Kind code	B2
Filing date	Sep 3, 2021
Priority date	Mar 6, 2019
Publication date	Dec 31, 2024
Grant date	Dec 31, 2024

Abstract

A back side of a diamond or other substrate is thinned using plasma etches and a mask situated away from the back side by a spacer having a thickness between 50 μm and 250 μm. Typically, a combined RIE/ICP etch is used to thin the substrate from 20-40 μm to less than 1 μm. For applications in which color centers are implanted or otherwise situated on a front side of the diamond substrate, after thinning, a soft graded etch is applied to reduce color center linewidth, particularly for nitrogen vacancy (NV) color centers.

First claim

We claim:

1. A method of thinning a device substrate, comprising:
situating a mask substrate to be displaced from and facing a back side of the device substrate, the mask substrate defining an aperture corresponding to an area of the back side of the device substrate to be thinned;
exposing the back side of the device substrate to an etch through the aperture defined in the mask substrate, wherein the device substrate is a diamond substrate;
defining a phononic crystal on a front side on the diamond substrate; and
defining a plurality of surface mechanical resonators (SMRs) on the front side of the diamond substrate, the SMRs including one or more color centers.

2. The method of claim 1 , wherein the etch is one or more of a reactive ion etch (RIE) and an inductively coupled plasma (ICP) etch.

3. The method of claim 1 , wherein at least a portion of the etch includes a simultaneous RIE and ICP etch.

4. The method of claim 1 , wherein the color centers are nitrogen vacancy (NV) centers or silicon vacancy (SiV) centers, or a combination thereof.

5. The method of claim 4 , wherein the mask substrate is displaced from the diamond substrate a distance of between 50 μm and 250 μm during back side etching.

6. The method of claim 5 , further comprising situating a spacer between the mask substrate and the back side of the device substrate and contacting the mask substrate and the back side of the device substrate so that the mask substrate is displaced from the back side of the diamond substrate.

7. The method of claim 6 , wherein the spacer has a thickness of between 50 μm and 250 μm.

8. The method of claim 1 , wherein the mask substrate is a sapphire substrate.

9. The method of claim 1 ,
wherein the etch applied to the back side of the device substrate is a graded soft etch.

10. The method of claim 9 , wherein the device substrate is a diamond substrate, and further comprising:
forming a plurality of nitrogen vacancy (NV) centers on a front side of the diamond substrate; and
applying the graded, soft etch to the back side of the diamond substrate to reduce a linewidth associated with the plurality of NV centers.

11. The method of claim 9 , wherein the graded soft etch is a stepwise graded etch.

12. The method of claim 9 , wherein the graded, soft etch includes at least an initial etch step having an etch rate of at least 5 nm/min.

13. The method of claim 9 , wherein the graded, soft etch is a stepwise graded inductively coupled plasma (ICP) O 2 etch including at least an initial etch step at an initial ICP power level to produce an initial etch rate greater than 5 nm/min applied for an initial exposure time of at least 30 minutes and a final etch step at a final ICP power level that is less than ⅓ of the initial power level applied for a final exposure time of less than 15 minutes.

14. The method of claim 13 , wherein the stepwise etch further comprises:
a first etch step applied after the initial etch, the first etch step associated with a first power level and a first etch rate of less than ¼ of the initial etch rate for a first exposure time of less than ½ of the initial exposure time; and
a second etch step applied after the first etch and prior to the final etch step, the second etch step associated with a second power level and a second etch rate that is less than the first etch rate for a second exposure time of less than ½ of the first exposure time.

15. The method of claim 9 , wherein the graded, soft etch is a stepwise graded ICP O 2 etch that includes a series of etch steps associated with decreasing ICP powers.

Assignees

• Univ Oregon

Inventors

• Lekavicius Ignas
• Wang Hailin

Classifications

• G03F7/2035

  simultaneous coating and exposure; using a belt mask, e.g. endless · CPC title

• G03F7/0042

  with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists (G03F7/075 takes precedence) · CPC title

• G10K11/24

  for conducting sound through solid bodies, e.g. wires · CPC title

• G10K11/162

  Selection of materials · CPC title

• H03H9/02047

  Treatment of substrates · CPC title