Component and method for manufacturing a component

Patent metadata

Field	Value
Publication number	US-12177986-B2
Application number	US-202017637725-A
Country	US
Kind code	B2
Filing date	Oct 12, 2020
Priority date	Oct 16, 2019
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

In an embodiment a component includes at least one carrier layer, the carrier layer having a top side and a bottom side and at least one functional layer arranged on the top side of the carrier layer, the functional layer including a material having a specific electrical characteristic, wherein the component is configured for direct integration into an electrical system as a discrete component.

First claim

The invention claimed is:

1. A component comprising:
at least one carrier layer having a top side and a bottom side;
at least one functional layer arranged on the top side of the carrier layer, the functional layer comprising a material having a specific electrical characteristic;
at least two cover electrodes configured for electrically contacting the functional layer from a top side of the functional layer,
wherein the cover electrodes are arranged next to one another and are spatially and electrically separated from one another by at least one recess or a comb-like structure, and
wherein the cover electrodes are arranged directly on the functional layer;
at least one feedthrough completely penetrating the carrier layer and the functional layer such that the feedthrough extends from the top side of the functional layer through the functional layer and the carrier layer to the bottom side of the carrier layer; and
at least one contact element arranged on the bottom side of the carrier layer, the at least one contact element configured for electrically contacting of the component,
wherein the component is configured for direct integration into an electrical system as a discrete component.

2. The component according to claim 1 , wherein the carrier layer comprises silicon, silicon carbide or glass.

3. The component according to claim 1 , wherein the functional layer is arranged on the carrier layer in a form-fitting and material-fitting manner, or wherein the functional layer is located directly in a material of the carrier layer locally or as a layer.

4. The component according to claim 1 , further comprising at least one protective layer arranged on a top side of the component and/or on at least one side face of the component.

5. The component according to claim 4 , wherein the protective layer comprises SiO 2 .

6. The component according to claim 1 , wherein the component has at least two feedthroughs, wherein two contact elements are located on the bottom side of the carrier layer.

7. The component according to claim 1 , wherein the cover electrodes comprise at least one sputtered layer.

8. The component according to claim 1 , wherein the component is configured for direct integration into a Micro Electro Mechanical System (MEMS) structure and/or into a Semiconductor Embedded in Substrate (SESUB) structure.

9. A method for manufacturing the component according to claim 1 , the method comprising:
providing a carrier material for forming the carrier layer;
forming the at least one feedthrough, the feedthrough completely penetrating the carrier material;
filling the at least one feedthrough with a metallic material;
coating the carrier material with a functional material to form the functional layer;
singulating components; and
before singulating the components, depositing the two cover electrodes on the top side of the functional material for electrically contacting the functional layer from the top side of the functional layer.

10. The method according to claim 9 , wherein the functional layer is generated by a physical vapor deposition (PVD) or chemical vapor deposition (CVD) process, or wherein the functional material is provided by a sol-gel process or by a ceramic slurry and is applied to the carrier material by a chemical solution deposition (CSD) process.

11. The method according to claim 9 , further comprising annealing after coating the carrier material with the functional material.

12. The method according to claim 9 , wherein coating the carrier material with the functional material is performed before forming the at least one feedthrough or before filling the at least one feedthrough.

13. The method according to claim 9 , further comprising forming the at least one contact element for electrically contacting the component on the bottom side of the carrier layer.

14. The method according to claim 9 , wherein the component is formed for direct integration into a Micro Electro Mechanical System (MEMS) structure and/or into a Semiconductor Embedded in Substrate (SESUB) structure.

Assignees

• Tdk Electronics Ag

Inventors

• Ihle Jan
• Bernert Thomas
• Endler Stefan
• Krenn Michael
• Bigl Stephan
• Puff Markus
• Redolfi Sebastian

Classifications

• H05K3/341

  Surface mounted components · CPC title

• H05K1/181

  associated with surface mounted components · CPC title

• H01G2/06

  specially adapted for mounting on a printed-circuit support · CPC title

• H01C7/025

  Perovskites, e.g. titanates · CPC title

• H01G4/33

  Thin- or thick-film capacitors {(thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)} · CPC title