Powder conveying apparatus, gas supply apparatus, and method for removing powder

Patent metadata

Field	Value
Publication number	US-12152298-B2
Application number	US-202118245618-A
Country	US
Kind code	B2
Filing date	Sep 21, 2021
Priority date	Sep 29, 2020
Publication date	Nov 26, 2024
Grant date	Nov 26, 2024

Abstract

A powder conveying apparatus, a gas supply apparatus, and a method for removing powder that suppresses internal leakage are provided.
A powder conveying apparatus includes a powder transport line via which a powder feedstock source is coupled to a vaporizer, and includes a first valve provided on a powder feedstock source-side of the powder transport line. The powder conveying apparatus includes a second valve provided on a vaporizer-side of the powder transport line, and includes a buffer tank configured to be filled with a purge gas. The powder conveying apparatus includes a first purge-gas supply line coupled to the powder transport line upstream of the second valve, the first purge-gas supply line enabling the purge gas to be supplied from the buffer tank to the second valve. The powder conveying apparatus includes a first purge gas valve provided on the first purge-gas supply line. The powder conveying apparatus includes a controller configured to control opening and closing of the first valve, the second valve, and the first purge gas valve.

First claim

The invention claimed is:

1. A powder conveying apparatus for conveying powder from a powder feedstock source to a vaporizer, the powder conveying apparatus comprising:
a powder transport line configured to connect the powder feedstock source to the vaporizer and configured to supply the powder from the powder feedstock source to the vaporizer;
a first purge-gas supply line via which a buffer tank is coupled to the powder transport line at a first branch point, the first purge-gas supply line enabling a purge gas to be supplied from the buffer tank to the powder transport line;
a first valve provided on a powder feedstock source-side of the powder transport line with respect to the first branch point;
a second valve provided on a vaporizer-side of the powder transport line with respect to the first branch point;
a first purge gas valve provided on the first purge-gas supply line; and
a controller configured to
a) control opening and closing of the first valve, the second valve, and the first purge gas valve,
b) supply the powder from the powder feedstock source to the vaporizer through the powder transport line and via the first valve and the second valve,
c) after b), close the first valve and open the second valve such that the purge gas from the buffer tank is delivered to the vaporizer via the second valve, and the second valve is purged as a result of delivering the purge gas to the vaporizer, and
d) repeat b) and c) a set number of times.

2. The powder conveying apparatus according to claim 1 , wherein the controller is configured to:
open the first valve and the second valve, and close the first purge gas valve to convey a powder feedstock from the powder feedstock source to the vaporizer, and
close the first purge gas valve to fill the buffer tank with the purge gas, and
close the first valve, and open the second valve and the first purge gas valve to supply the purge gas to the second valve.

3. The powder conveying apparatus according to claim 2 , wherein the controller is configured to repeatedly fill the buffer tank with the purge gas, and supply the purge gas to the second valve.

4. The powder conveying apparatus according to claim 3 , wherein the controller is configured to repeatedly fill the buffer tank with the purge gas, and supply the purge gas to the second valve, three times or more.

5. The powder conveying apparatus according to claim 3 ,
wherein the controller is configured to execute a hermeticity check for the second valve after the purge gas is supplied to the second valve.

6. The powder conveying apparatus according to claim 1 , further comprising:
a third valve provided on the powder transport line between the first valve and the second valve, the controller being configured to control opening and closing of the third valve;
a second purge-gas supply line via which the buffer tank is coupled to the powder transport line at a second branch point, the second branch point being situated between the first valve and the third valve, and the second purge-gas supply line being configured to supply the purge gas to from the buffer tank to the powder transport line; and
a second purge gas valve provided on the second purge-gas supply line, the controller being configured to control opening and closing of the second purge gas valve.

7. The powder conveying apparatus according to claim 6 , wherein the controller is configured to cause:
open the first valve, the second valve, and the third valve, and close the first purge gas valve and the second purge gas valve to convey the powder feedstock from the powder feedstock source to the vaporizer;
close the first purge gas valve and the second purge gas valve to fill the buffer tank with the purge gas;
close the first valve and the first purge gas valve, and open the second valve, and the third valve, and the second purge gas valve to supply the purge gas to the third valve;
close the first purge gas valve and the second purge gas valve to fill the buffer tank with the purge gas; and
close the first valve, the third valve, and the second purge gas valve, and open the second valve and the first purge gas valve to supply the purge gas to the second valve.

8. The powder conveying apparatus according to claim 7 , wherein the controller is configured to repeatedly fill the buffer tank with the purge gas, and supply the purge gas to the third valve, three times or more.

9. The powder conveying apparatus according to claim 7 ,
wherein the controller is configured to repeatedly fill the buffer tank with the purge gas, and supply the purge gas to the second valve, three times or more.

10. The powder conveying apparatus according to claim 7 ,
wherein the controller is configured to execute a hermeticity check for the second valve after the purge gas is supplied to the second valve.

11. A gas supply apparatus comprising:
the powder conveying apparatus according to claim 1 ;
the powder feedstock source configured to deliver the powder to the vaporizer under gravity feed; and
the vaporizer configured to vaporize the powder delivered from the powder feedstock source via the power conveying apparatus.

Assignees

• Tokyo Electron Ltd

Inventors

• Komori Eiichi

Classifications

• C23C14/246 Primary

  Replenishment of source material · CPC title

• B65G2201/042

  Granular material · CPC title

• B65G2812/1641

  Air pressure systems · CPC title

• B65G2812/1616

  Common means for pneumatic conveyors · CPC title

• B65G53/04

  Conveying materials in bulk pneumatically through pipes or tubes; Air slides · CPC title