Continuous coating apparatus

Patent metadata

Field	Value
Publication number	US-9267203-B2
Application number	US-201013824494-A
Country	US
Kind code	B2
Filing date	Dec 13, 2010
Priority date	Dec 13, 2010
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

Provided is a continuous coating apparatus which can supply a liquid coating material (a molten metal) to a levitation-heating space through various paths, and can easily control a supply flow rate of the liquid coating material, and has a simplified structure. The continuous coating apparatus includes: a vacuum chamber unit through which a coating target passes; a levitation-heating unit disposed in the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material; and a liquid coating material supply unit connected so that a liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit, and communicating with the outside of the vacuum chamber unit.

First claim

The invention claimed is:

1. A continuous coating apparatus comprising:
a vacuum chamber unit through which a coating target passes;
a levitation-heating unit disposed inside of the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material; and
a liquid coating material supply unit comprising:
a crucible disposed outside of the vacuum chamber unit and storing the liquid coating material;
a coating material supply pipe wherein the coating material supply pipe is connected between the crucible and the levitation-heating unit so that the liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit disposed inside the vacuum chamber unit, and communicating with the crucible disposed outside of the vacuum chamber unit;
a vapor guide unit connected to the liquid coating material supply unit inside the vacuum chamber unit;
a second heating unit provided in the vapor guide unit in addition to the levitation-heating unit; and

a dipping-type valve unit including an opening/closing member provided in the crucible at a lower portion of an elevating member, so that the dipping-type valve unit controls an opening/closing degree of the inlet of the coating material supply pipe disposed in the liquid coating material stored in the crucible, whereby the supply flow rate of the coating material is controlled.

2. The continuous coating apparatus of claim 1 , wherein the levitation-heating unit comprises one or more electromagnetic coils which levitate and heat the supplied coating material by an electromagnetic force and generate the evaporation vapor.

3. The continuous coating apparatus of claim 1 , wherein the vapor guide unit encloses at least a portion of the levitation-heating unit, so that the evaporation vapor generated from the inside thereof is guided and sprayed to the coating target.

4. The continuous coating apparatus of claim 3 , wherein the vapor guide unit comprises:
an evaporation vapor generation section the liquid coating material supplied therein and enclosing the levitation-heating unit, the coating material supply pipe provided in the liquid coating material supply unit being connected to one of an upper portion and a lower portion of the evaporation vapor generation section; and,
at least an evaporation vapor nozzle section of a vapor guide section connected to the evaporation vapor generation section, and the evaporation vapor nozzle section connected to the evaporation vapor generation section or the vapor guide section;
wherein the evaporation vapor nozzle section including an evaporation vapor spray opening formed in correspondence with the width of the coating target.

5. The continuous coating apparatus of claim 4 , wherein,
the evaporation vapor generation section and the vapor guide section of the vapor guide unit are provided in a tube form,
the evaporation vapor generation section is made of an electrically nonconductive material, and
the second heating unit is provided for the vapor guide section and the evaporation vapor nozzle section.

6. The continuous coating apparatus of claim 5 , wherein the levitation-heating unit comprises one or more electromagnetic coils which levitate and heat the supplied coating material by an electromagnetic force and generate the evaporation vapor and wherein the heating unit disposed at the vapor guide unit is spaced apart by a distance equal to at least once the inner diameter or a distance equal to at least twice the inner radius of the one or more electromagnetic coils disposed to be adjacent thereto and wound.

7. The continuous coating apparatus of claim 4 , further comprising a filter member disposed in the vicinity of the evaporation vapor spray opening provided in the evaporation vapor nozzle section so that the evaporation vapor passes therethrough, the filter member being made in a fabric structure by using a heat-resistant metal or ceramic material.

8. The continuous coating apparatus of claim 1 , further comprising additional heating units which are respectively connected to the crucible and the supply pipe provided in the liquid coating material supply unit.

9. The continuous coating apparatus of claim 1 , wherein the coating target is provided in a form of a substrate continuously passing through the vacuum chamber, and the liquid coating material is provided in a form of a molten metal.

10. The continuous coating apparatus of claim 1 , wherein the liquid coating material is supplied to the levitation-heating unit by a pressure differential between the crucible disposed outside of the vacuum chamber unit and the levitation-heating unit disposed inside of the vacuum chamber unit.

11. A continuous coating apparatus comprising:
a vacuum chamber unit through which a coating target passes;
a levitation-heating unit disposed in the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material;
a liquid coating material supply unit comprising:
a crucible disposed outside of the vacuum chamber unit and storing the liquid coating material;
a coating material supply pipe wherein the coating material supply pipe is connected between the crucible and the levitation-heating unit so that the liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit disposed inside the vacuum chamber unit, and communicating with the crucible disposed outside of the vacuum chamber unit;
a vapor guide unit connected to the liquid coating material supply unit inside the vacuum chamber unit and enclosing at least a portion of the levitation-heating unit, so that the evaporation vapor generated from the inside thereof is guided to and sprayed to the coating target; and
a second heating unit provided in the vapor guide unit in addition to the levitation-heating unit.

Assignees

• Nam Kyung-Hoon
• Kwak Young-Jin
• Lee Dong-Yoeul
• Kim Tae-Yeob
• Jung Yong-Hwa
• Kim Kyoung-Bo
• Jung Woo-Sung
• Eom Mun-Jong
• Lee Sang-Cheol
• Park Sang-Hoon
• Posco

Inventors

• Nam Kyung-Hoon
• Kwak Young-Jin
• Lee Dong-Yoeul
• Kim Tae-Yeob
• Jung Yong-Hwa
• Kim Kyoung-Bo
• Jung Woo-Sung
• Eom Mun-Jong
• Lee Sang-Cheol
• Park Sang-Hoon

Classifications

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• C23C14/246

  Replenishment of source material · CPC title

• H05B6/32

  Arrangements for simultaneous levitation and heating · CPC title