Two-dimensional magnetic recording read head with TaOx layer for flat middle shield topography and method of forming thereof

Patent metadata

Field	Value
Publication number	US-12131759-B2
Application number	US-202318226609-A
Country	US
Kind code	B2
Filing date	Jul 26, 2023
Priority date	Nov 8, 2022
Publication date	Oct 29, 2024
Grant date	Oct 29, 2024

Abstract

The present disclosure generally relates to a dual free layer (DFL) two dimensional magnetic recording (TDMR) read head, and a method of forming thereof. The read head comprises a lower sensor, middle shields disposed on the lower sensor, and an upper sensor disposed on the middle shields. After the lower reader is formed, a dielectric layer is deposited around an outer perimeter of the lower shield. Portions of the dielectric layer are ion milled such that the remaining portions form a substantially flat layer. Another embodiment includes a deposition of a TaOx layer on the dielectric layer, where x is a numeral. Portions of the dielectric layer and the TaOx layer are then ion milled such that the remaining portions of the TaOx layer and the dielectric layer collectively form a substantially planar layer. The middle shields are formed over the lower reader and are substantially planar.

First claim

What is claimed is:

1. A read head, comprising:
a first sensor disposed at a media facing surface (MFS);
a first rear hard bias (RHB) structure disposed adjacent to the first sensor recessed from the MFS;
first soft bias shields disposed adjacent to the first sensor at the MFS;
a dielectric layer disposed around an outer perimeter of the first sensor, the first soft bias shields, and the first RHB structure, the dielectric layer being substantially planar;
a cap layer disposed on the dielectric layer, the cap layer comprising TaOx, where x is an integer greater than 1;
a middle shield disposed over the first sensor, the first soft bias shields, and the first RHB structure, the middle shield being substantially planar; and
a second sensor disposed at the MFS on the middle shield.

2. The read head of claim 1 , further comprising:
a second RHB structure disposed adjacent to the second sensor on the middle shield, the second RHB structure being recessed from the MFS;
second soft bias shields disposed adjacent to the second sensor at the MFS;
a first lower shield, the first sensor and the first RHB structure being disposed on the lower shield; and
a first upper shield disposed on the second sensor and the second RHB structure.

3. The read head of claim 1 , wherein a portion of the cap layer comprising TaOx is disposed adjacent to at least one of the first RHB structure and the first soft bias shields.

4. The read head of claim 1 , wherein the first sensor and the second sensor are each a dual free layer (DFL) sensor.

5. The read head of claim 1 , wherein a thickness of the dielectric layer and the cap layer is substantially equal to a thickness of the first RHB structure, and wherein the dielectric layer comprises Al 2 O 3 , SiO 2 , MgO, or combinations thereof.

6. The read head of claim 5 , wherein a thickness of the first sensor is substantially equal to the thickness of the first RHB structure, and wherein a thickness of the first soft bias shields is substantially equal to the thickness of the first sensor.

7. The read head of claim 1 , wherein the middle shield extends substantially linearly from the MFS into the read head.

8. The read head of claim 1 , wherein the first sensor and the first soft bias shields have a collective width at the MFS substantially equal to a width of the first RHB structure.

9. The read head of claim 1 , wherein the middle shield comprises a second upper shield disposed over the first sensor and the first RHB structure, a read separation gap disposed on the second upper shield, and a second lower shield disposed on the read separation gap.

10. A magnetic recording device comprising the read head of claim 1 .

11. A magnetic recording device, comprising:
a read head formed by a method comprising:
forming a lower reader, the lower reader comprising a first sensor disposed at a media facing surface (MFS), a first rear hard bias (RHB) structure disposed adjacent to the first sensor recessed from the MFS, and first soft bias shields disposed adjacent to the first sensor at the MFS;
defining one or more dimensions of the lower reader;
depositing a dielectric layer around an outer perimeter of the lower reader;
depositing a TaOx layer, where x is a numeral, on the dielectric layer;
ion milling portions of the TaOx layer such that the remaining portions of the TaOx layer and the dielectric layer collectively form a substantially planar layer;
forming a middle shield over the substantially planar layer and the lower reader; and
forming an upper reader over the middle shield.

12. The magnetic recording device of claim 11 , wherein the read head further comprises:
a second RHB structure disposed adjacent to the upper reader on the middle shield, the second RHB structure being recessed from the MFS;
second soft bias shields disposed adjacent to the upper reader at the MFS;
a first lower shield, the lower reader and the first RHB structure being disposed on the lower shield; and
a first upper shield disposed on the upper reader and the second RHB structure.

13. The magnetic recording device of claim 11 , wherein a portion of the TaOx layer is disposed adjacent to at least one of the first RHB structure and the first soft bias shields.

14. The magnetic recording device of claim 11 , wherein the lower reader and the upper reader are each a dual free layer (DFL) sensor.

15. The magnetic recording device of claim 11 , wherein a thickness of the dielectric layer and the TaOx layer is substantially equal to a thickness of the first RHB structure, and wherein the dielectric layer comprises Al 2 O 3 , SiO 2 , MgO, or combinations thereof.

16. The magnetic recording device of claim 11 , wherein a thickness of the lower reader is substantially equal to the thickness of the first RHB structure, and wherein a thickness of the first soft bias shields is substantially equal to the thickness of the lower reader.

17. The magnetic recording device of claim 11 , wherein the middle shield extends substantially linearly from the MFS into the read head.

18. The magnetic recording device of claim 11 , wherein the lower reader and the first soft bias shields have a collective width at the MFS substantially equal to a width of the first RHB structure.

19. The magnetic recording device of claim 11 , wherein the middle shield comprises a second upper shield disposed over the lower reader and the first RHB structure, a read separation gap disposed on the second upper shield, and a second lower shield disposed on the read separation gap.

20. A read head, comprising:
a first dual free layer (DFL) reader disposed at a media facing surface (MFS);
a first rear hard bias (RHB) structure disposed adjacent to the first DFL reader recessed from the MFS;
first soft bias shields disposed adjacent to the first DFL reader at the MFS;
a dielectric layer disposed around an outer perimeter of the first DFL reader, the first soft bias shields, and the first RHB structure, the dielectric layer being substantially planar;
a cap layer disposed on the dielectric layer, the cap layer comprising TaOx, where x is an integer greater than 1;
a middle shield disposed over the first DFL reader, the first soft bias shields, and the first RHB structure, the middle shield being substantially planar; and
a second DFL reader disposed at the MFS on the middle shield.

21. The read head of claim 20 , further comprising:
a second RHB structure disposed adjacent to the second DFL reader on the middle shield, the second RHB structure being recessed from the MFS;
second soft bias shields disposed adjacent to the second DFL reader at the MFS;
a first lower shield, the first DFL reader and the first RHB structure being disposed on the lower shield; and
a first upper shield disposed on the second sensor and the second RHB structure.

22. The read head of claim 20 , wherein a portion of the cap layer is disposed adjacent to at least one of the first RHB structure and the first soft bias shields.

23. The read head of claim 20 , wherein a thickness of the dielectric layer and the cap layer is substantially equal to a thickness of the first RHB structure, and wherein the dielectric layer comprises Al 2 O 3 , SiO 2 , MgO, or combinations thereof.

24. The read head of claim 20 , wherein a thickness of the first DFL reader is substantially equal to the thickness of the first RHB structure, and wherein a thickness of the first soft bias shields is substan

Assignees

• Western Digital Tech Inc

Inventors

• Jiang Hongquan
• Li Guanxiong
• Mao Ming

Classifications

• G11B5/3163

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• G11B5/3932

  Magnetic biasing films · CPC title

• G11B5/59688

  Servo signal format patterns or signal processing thereof, e.g. dual, tri, quad, burst signal patterns · CPC title

• G11B5/11 Primary

  Shielding of head against electric or magnetic fields · CPC title

• G11B5/398

  Specially shaped layers · CPC title