Apparatus for preparing a single crystal comprising a volatilization chamber and a plurality of crystal pieces fixed by combined fixtures located in a solid connection chamber

Patent metadata

Field	Value
Publication number	US-12098478-B2
Application number	US-202017415962-A
Country	US
Kind code	B2
Filing date	Sep 25, 2020
Priority date	Apr 17, 2020
Publication date	Sep 24, 2024
Grant date	Sep 24, 2024

Abstract

Disclosed is an apparatus for preparing a large-size single crystal, which relates to the field of semiconductor material preparation, and more particularly, to an apparatus for preparing a large-size single crystal from a plurality of small-size single crystals by connecting them in solid states. The apparatus includes a hydrocooling furnace, a solid connection chamber hermetically disposed in the hydrocooling furnace, and combined fixtures provided in the solid connection chamber, wherein a plurality of crystal pieces are fixed by the combined fixtures, a top column or a stress block is used for pressing the crystal piece through the combined fixtures, a heating wire surrounding the solid connection chamber is provided in the hydrocooling furnace, a vacuum tube is communicated with the solid connection chamber, and a thermocouple is disposed close to the combined fixtures. The present disclosure is advantageous in that: 1, single crystal pieces with a small size can be connected and prepared into a single crystal with a larger size, 2, in the preparation process, the problems in the conventional single crystal growth process, such as twinning and polycrystallization, can be excluded from consideration, 3, the equipment is simple, and 4, preparation of single crystals with any size is possible theoretically.

First claim

The invention claimed is:

1. An apparatus for preparing a large-size single crystal, characterized by comprising a hydrocooling furnace, a solid connection chamber hermetically disposed in the hydrocooling furnace, and combined fixtures in the solid connection chamber,
a plurality of crystal pieces are fixed by the combined fixtures, a stress block placed in the solid connection chamber is used for pressing the crystal pieces through the combined fixtures,
a heating wire surrounding the solid connection chamber is provided in the hydrocooling furnace,
a vacuum tube is communicated with the solid connection chamber,
thermocouples are disposed above and below the combined fixtures; and
a volatilization chamber is communicated with the solid connection chamber through a volatilization gas tube, the volatilization chamber configured to load a volatile substance,
wherein the stress block has a weight sufficient to generate a pressure required at a splicing surface of the plurality of crystal pieces.

2. The apparatus according to claim 1 , characterized in that the combined fixtures comprise two circular fixtures, where an inner surface of each of the circular fixtures has an arc matched with the shape of the crystal piece, and the arc of each of the circular fixtures is smaller than 180º.

3. The apparatus according to claim 2 , characterized in that the combined fixtures are vertically placed, and the stress block is placed on an upper circular fixture.

4. The apparatus according to claim 1 , characterized in that the combined fixtures comprise two opposite groups of cubic features I and II for single crystal pieces, where an inner surface of a cubic fixture for single crystals is a plane of which a length is smaller than a total length of the crystal pieces in combination.

5. The apparatus according to claim 1 , characterized in that
the hydrocooling furnace comprises a hydrocooling furnace body II, a left side cover of the furnace body II, and a right side cover of the furnace body II,
the solid connection chamber comprises a body of the solid connection chamber II and a cap of the solid connection chamber II, where the body of the solid connection chamber II and the cap of the solid connection chamber II enclose an inner cavity,
the hydrocooling furnace and the solid connection chamber are connected through a right hydrocooling flange and a left hydrocooling flange,
the combined fixtures in the solid connection chamber are pressed by a right top column and a left top column, and the right and left top columns are positioned by the right and left hydrocooling flanges, respectively.

6. The apparatus according to claim 1 , characterized in that
the hydrocooling furnace comprises a hydrocooling furnace body I and a side cover ( 20 - 1 ) of the hydrocooling furnace body I, a first flange of the hydrocooling furnace body I for positioning the volatilization gas tube is provided in a first connecting hole, and a second flange of the hydrocooling furnace body I for positioning a vacuum tube is provided in a second connecting hole,
the solid connection chamber comprises a body of the solid connection chamber I and a cap of the solid connection chamber I, where the body of the solid connection chamber I and the cap of the solid connection chamber I enclose an inner cavity.

7. The apparatus according to claim 1 , characterized in that the hydrocooling furnace is further provided with a gas filling tube with a valve.

8. The apparatus according to claim 1 , characterized in that an auxiliary heating wire is provided around the volatilization chamber and the volatilization gas tube.

Assignees

• The 13Th Research Institute Of China Electronics Tech Group Corporation

Inventors

• Wang Shujie
• Sun Niefeng
• Shi Yanlei
• Shao Huimin
• Li Xiaolan
• Wang Yang
• Fu Lijie
• Xu Senfeng
• Jiang Jian
• Liu Huisheng
• Sun Tongnian

Classifications

• C30B33/06 Primary

  Joining of crystals · CPC title