Plasma apparatus and methods for processing feed material utilizing a powder ingress preventor (PIP)

Patent metadata

Field	Value
Publication number	US-12094688-B2
Application number	US-202318451720-A
Country	US
Kind code	B2
Filing date	Aug 17, 2023
Priority date	Aug 25, 2022
Publication date	Sep 17, 2024
Grant date	Sep 17, 2024

Abstract

Disclosed herein are systems, methods, and devices processing feed material utilizing a microwave plasma apparatus comprising a powder ingress preventor (PIP). In some embodiments, the microwave plasma apparatus comprises a core plasma tube and a liner; and a ring structure comprising: a bearing surface, the bearing surface contacting an interior diameter of the core plasma tube; and an opening, the opening contacting an outer diameter of the liner.

First claim

What is claimed is:

1. A microwave plasma apparatus for processing a material, comprising:
a core plasma tube;
a liner located within and concentric with the core plasma tube;
a plasma applicator; and
a ring structure located between the core plasma tube and the liner, the ring structure concentric with the core plasma tube and the liner, and the ring structure comprising:
a bearing surface, the bearing surface contacting a bottom surface of the plasma applicator; and
an opening, the opening surrounding the liner and having a diameter greater than an outer diameter of the liner.

2. The microwave plasma apparatus of claim 1 , wherein the ring structure is formed of glass or quartz.

3. The microwave plasma apparatus of claim 1 , wherein the ring structure comprises a single piece of material.

4. The microwave plasma apparatus of claim 1 , wherein the ring structure comprises an assembly comprising two or more pieces, wherein the assembly comprises a first piece comprising a flange and a second piece comprising a tube.

5. The microwave plasma apparatus of claim 1 , wherein the ring structure comprises a washer, wherein the washer comprises a plurality of holes.

6. The microwave plasma apparatus of claim 5 , wherein the plurality of holes form one or more concentric circles on a surface of the washer.

7. The microwave plasma apparatus of claim 1 , wherein the opening comprises one or more indentations or serrations.

8. The microwave plasma apparatus of claim 1 , wherein the ring structure comprises an inverted cone, wherein the inverted cone comprises a rim, the rim comprising one or more holes formed through the rim, wherein the inverted cone comprises a serrated bottom opening.

9. The microwave plasma apparatus of claim 8 , wherein the inverted cone comprises a serrated bottom opening.

10. A ring structure for preventing powder ingress within a microwave plasma apparatus, the ring structure comprising:
a bearing surface, the bearing surface contacting a lower surface of a plasma applicator of the microwave plasma apparatus; and
an opening, the opening the opening surrounding a liner of the microwave plasma apparatus and having a diameter greater than an outer diameter of the liner.

11. The ring structure of claim 10 , wherein the ring structure is formed of glass or quartz.

12. The ring structure of claim 10 , wherein the ring structure comprises a single piece of material.

13. The ring structure of claim 10 , wherein the ring structure comprises an assembly comprising two or more pieces, wherein the assembly comprises a first piece comprising a flange and a second piece comprising a tube.

14. The ring structure of claim 10 , wherein the ring structure comprises a washer, wherein the washer comprises a plurality of holes, wherein the plurality of holes form one or more concentric circles on a surface of the washer.

15. The ring structure of claim 10 , wherein the opening comprises one or more indentations or serrations.

16. The ring structure of claim 10 , wherein the ring structure comprises an inverted cone, the rim comprising one or more holes formed through the rim, wherein the inverted cone comprises a serrated bottom opening.

Assignees

• 6K Inc

Inventors

• Kozlowski Michael C
• Petersen Ed
• Colwell John
• Andrew Anthony

Classifications

• H01J37/32642 Primary

  Focus rings · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• H01J2237/327

  Arrangements for generating the plasma · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/32357

  Generation remote from the workpiece, e.g. down-stream · CPC title