Determination of mass/time ratios for buffer members used during growth of single crystal silicon ingots

Patent metadata

Field	Value
Publication number	US-12091769-B2
Application number	US-202318154418-A
Country	US
Kind code	B2
Filing date	Jan 13, 2023
Priority date	Dec 31, 2020
Publication date	Sep 17, 2024
Grant date	Sep 17, 2024

Abstract

Methods for producing single crystal silicon ingots by Continuous Czochralski (CCz) are disclosed. A batch of buffer members (e.g., quartz cullets) is added to an outer melt zone of the crucible assembly before the main body of the ingot is grown. In some embodiments, the ratio of the mass M of the batch of buffer members added to the melt to the time between adding the batch of buffer members to the melt and when the ingot main body begins to grow is controlled such that the ratio of M/T is greater than a threshold M/T.

First claim

What is claimed is:

1. A method for determining a threshold ratio of M/T for growing a single crystal silicon ingot in a continuous Czochralski process that includes forming a melt of silicon in a crucible assembly, adding a batch of quartz cullets to the melt with the batch having a mass M, contacting a surface of the melt with a seed crystal, withdrawing a single crystal silicon ingot from the melt, the single crystal silicon ingot comprising a main body, there being a time T between adding the batch of quartz cullets to the melt and start of growth of the main body, and adding solid polycrystalline silicon feedstock to the crucible assembly while withdrawing the single crystal silicon ingot to replenish the melt, the method comprising:
growing the plurality of single crystal silicon ingots with at least two of the ingots being grown with different ratios of M/T;
measuring a defect count in one or more wafers sliced from the plurality of single crystal silicon ingots; and
determining the ratio of M/T for single crystal silicon ingots from which wafers were sliced having a defect count below a threshold defect count.

2. The method as set forth in claim 1 wherein measuring the defect count in one or more wafers sliced from the plurality of single crystal silicon ingots comprises directing light to a surface of the wafer and detecting reflected light from the surface.

3. The method as set forth in claim 1 wherein the threshold defect count is 30 defects of a size of 0.2 μm or more.

4. The method as set forth in claim 1 wherein the crucible assembly comprises a weir and a sidewall that define an outer melt zone between the weir and the sidewall, the batch of quartz cullets being added to the outer melt zone.

5. The method as set forth in claim 4 wherein the weir is a first weir, the crucible assembly comprising a second weir radially inward to the first weir, the first weir and second weir defining a middle melt zone between the first weir and the second weir, the second weir defining an inner melt zone within the second weir.

6. The method as set forth in claim 1 wherein the melt of silicon in the crucible assembly is formed by adding an initial charge of solid polycrystalline silicon to the crucible assembly, the method comprising:
adding quartz cullets to the initial charge of solid polycrystalline silicon; and
melting the initial charge of solid polycrystalline silicon with the quartz cullets being disposed therein.

7. The method as set forth in claim 1 wherein the quartz cullets are less dense than the melt of silicon such that the quartz cullets float within the melt.

8. The method as set forth in claim 1 wherein quartz cullets are not added while the main body of the single crystal silicon ingot is withdrawn from the melt.

9. The method as set forth in claim 1 wherein quartz cullets are not added while a neck and/or crown of the single crystal silicon ingot is withdrawn from the melt.

Assignees

• Globalwafers Co Ltd

Inventors

• Pannocchia Matteo
• Marchese Francesca
• Ho Wai Kitt James

Classifications

• C30B29/06 Primary

  Silicon · CPC title

• C30B15/20

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• C30B15/02

  adding crystallising materials or reactants forming it in situ to the melt · CPC title

• C30B15/002 Primary

  Continuous growth · CPC title

• C30B15/12

  Double crucible methods · CPC title