Actuator device

Patent metadata

Field	Value
Publication number	US-12085710-B2
Application number	US-202318138266-A
Country	US
Kind code	B2
Filing date	Apr 24, 2023
Priority date	Jul 21, 2017
Publication date	Sep 10, 2024
Grant date	Sep 10, 2024

Abstract

An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

First claim

The invention claimed is:

1. An actuator device comprising:
a support portion;
a movable portion;
a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis;
a first wiring provided on the first connection portion; and
a first insulation layer provided on at least the first connection portion,
wherein the first wiring includes a first main body formed of a metal material,
wherein the first insulation layer includes a part provided on the first wiring,
wherein a surface of the part of the first insulation layer on a side opposite to the first connection portion has a shape in which a curvature is continuous over an entirety of the surface in a cross-section perpendicular to an extension direction of the first wiring.

2. The actuator device according to claim 1 ,
wherein the surface of the part of the first insulation layer includes a curved portion curved to protrude toward a side opposite to the first connection portion in a cross-section perpendicular to the extension direction of the first wiring.

3. The actuator device according to claim 2 ,
wherein the surface of the part of the first insulation layer includes a plurality of the curved portion in a cross-section perpendicular to the extension direction of the first wiring.

4. The actuator device according to claim 3 ,
wherein the surface of the part of the first insulation layer further includes a flat portion interposed between the plurality of the curved portion in a cross-section perpendicular to the extension direction of the first wiring.

5. The actuator device according to claim 1 ,
wherein the first insulation layer further includes an additional part provided on a region on the first insulation layer other than the region where the first wiring is provided, and the part provided on the first wiring is continuously formed with the additional part.

6. The actuator device according to claim 5 ,
wherein a surface of the first insulation layer on the first connection portion on a side opposite to the first connection portion has a shape in which a curvature is continuous over an entirety of the surface in a cross-section perpendicular to the extension direction of the first wiring.

7. The actuator device according to claim 1 ,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface intersects the first surface so as to form an acute angle in a cross-section perpendicular to the extension direction of the first wiring.

8. The actuator device according to claim 1 ,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface intersects the first surface so as to form a right angle in a cross-section perpendicular to the extension direction of the first wiring.

9. The actuator device according to claim 1 ,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to the extension direction of the first wiring.

10. The actuator device according to claim 1 ,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface includes a point where a curvature is discontinuous in a cross-section perpendicular to the extension direction of the first wiring.

11. The actuator device according to claim 1 ,
wherein the metal material forming the first main body has a Vickers hardness of 50 HV or more.

12. The actuator device according to claim 1 , further comprising:
a frame portion supporting the support portion and the movable portion;
a second connection portion connecting the support portion to the frame portion on a second axis so that the support portion is swingable around the second axis intersecting the first axis;
a second wiring provided on the second connection portion, and
a second insulation layer provided on at least the second connection portion,
wherein the second wiring includes a second main body formed of a metal material,
wherein the second insulation layer includes a second part provided on the second wiring,
wherein a surface of the second part of the second insulation layer on a side opposite to the second connection portion has a shape in which a curvature is continuous over an entirety of the surface in a cross-section perpendicular to an extension direction of the second wiring.

13. The actuator device according to claim 12 ,
wherein the first insulation layer is integrally formed with the second insulation layer.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Daiki
• MORINAGA Yuki
• Tanaka Go

Classifications

• G02B26/10

  Scanning systems · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B3/0075

  For improving wear resistance · CPC title

• B81B2201/03

  Microengines and actuators · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title