Actuator device

Patent metadata

Field	Value
Publication number	US-11675185-B2
Application number	US-202117512045-A
Country	US
Kind code	B2
Filing date	Oct 27, 2021
Priority date	Jul 21, 2017
Publication date	Jun 13, 2023
Grant date	Jun 13, 2023

Abstract

An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

First claim

The invention claimed is:

1. An actuator device comprising:
a support portion;
a movable portion;
a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and
a first wiring provided on the first connection portion,
wherein the first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface includes at least one curved portion curved to protrude toward the first connection portion in a cross-section perpendicular to an extension direction of the first wiring.

2. The actuator device according to claim 1 ,
wherein the second surface intersects the first surface so as to form an acute angle in a cross-section perpendicular to the extension direction of the first wiring.

3. The actuator device according to claim 1 ,
wherein the second surface intersects the first surface so as to form an angle of 45° or less in a cross-section perpendicular to the extension direction of the first wiring.

4. The actuator device according to claim 1 ,
wherein the at least one curved portion includes a plurality of curved portions.

5. The actuator device according to claim 1 ,
wherein the second surface further includes a flat portion and the at least one curved portion includes a pair of curved portions located at both sides of the flat portion respectively in a cross-section perpendicular to the extension direction of the first wiring.

6. The actuator device according to claim 1 ,
wherein the first connection portion is formed of a semiconductor material and a diffusion layer having impurities diffused therein is formed in the first connection portion so as to contact the first wiring.

7. The actuator device according to claim 1 ,
wherein the first main body is formed of at least one of tungsten, titanium, nickel, molybdenum, aluminum alloy, tungsten alloy, titanium alloy, nickel alloy, and stainless steel.

8. The actuator device according to claim 1 ,
wherein the first wiring further includes a seed layer provided between the first connection portion and the first main body.

9. The actuator device according to claim 8 ,
wherein the seed layer is formed of a metal material having a Vickers hardness of 50 HV or more.

10. The actuator device according to claim 1 further comprising:
a barrier layer provided between the first connection portion and the first wiring.

11. The actuator device according to claim 10 ,
wherein the barrier layer is formed of a material having a Vickers hardness of 50 HV or more.

12. The actuator device according to claim 1 , further comprising:
a second wiring provided on the support portion and connected to the first wiring,
wherein the second wiring is formed of a metal material having a Vickers hardness of less than 50 HV.

13. The actuator device according to claim 1 , further comprising:
a frame portion supporting the support portion and the movable portion;
a second connection portion connecting the support portion to the frame portion on a second axis so that the support portion is swingable around the second axis intersecting the first axis; and
a third wiring provided on the second connection portion,
wherein the third wiring includes a second main body formed of a metal material having a specific resistance smaller than that of a metal material forming the first main body.

14. The actuator device according to claim 1 , further comprising:
a frame portion supporting the support portion and the movable portion;
a second connection portion connecting the support portion to the frame portion on a second axis so that the support portion is swingable around the second axis intersecting the first axis; and
a third wiring provided on the second connection portion,
wherein the third wiring includes a second main body formed of a metal material having a Vickers hardness of 50 HV or more,
wherein the second main body includes a third surface facing the second connection portion and a fourth surface other than the third surface, and
wherein the fourth surface includes a curved portion curved to protrude toward the second connection portion in a cross-section perpendicular to an extension direction of the third wiring.

15. The actuator device according to claim 1 , further comprising:
a mirror provided to the movable portion.

16. The actuator device according to claim 1 , further comprising:
an insulation layer provided on the first connection portion so as to run on the first wiring,
wherein a surface of the insulation layer on a side opposite to the first connection portion includes a curved portion curved to protrude toward the first connection portion in a cross-section perpendicular to an extension direction of the first wiring.

17. The actuator device according to claim 1 , further comprising:
an insulation layer provided on the first connection portion so as to run on the first wiring,
wherein a surface of the insulation layer on a side opposite to the first connection portion has a shape in which a curvature is continuous over an entirety of the surface in a cross-section perpendicular to an extension direction of the first wiring.

18. The actuator device according to claim 1 , further comprising:
a fourth wiring provided on the movable portion and electrically connected to the first wiring,
wherein the fourth wiring is formed of a metal material having a Vickers hardness of less than 50 HV.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Daiki
• MORINAGA Yuki
• Tanaka Go

Classifications

• B81B2201/03

  Microengines and actuators · CPC title

• G02B26/10

  Scanning systems · CPC title

• B81B3/0075

  For improving wear resistance · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• B81B7/0009

  Structural features, others than packages, for protecting a device against environmental influences (B81C1/00777 takes precedence) · CPC title