Actuator device

Patent metadata

Field	Value
Publication number	US-11199695-B2
Application number	US-201816631259-A
Country	US
Kind code	B2
Filing date	Jun 18, 2018
Priority date	Jul 21, 2017
Publication date	Dec 14, 2021
Grant date	Dec 14, 2021

Abstract

An actuator device includes: a support portion; a movable portion; a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and a first wiring provided on the first connection portion. The first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more. The first main body includes a first surface facing the first connection portion and a second surface other than the first surface. The second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

First claim

The invention claimed is:

1. An actuator device comprising:
a support portion;
a movable portion;
a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis; and
a first wiring provided on the first connection portion,
wherein the first wiring includes a first main body formed of a metal material having a Vickers hardness of 50 HV or more,
wherein the first main body includes a first surface facing the first connection portion and a second surface other than the first surface, and
wherein the second surface has a shape in which a curvature is continuous over the entire second surface in a cross-section perpendicular to an extension direction of the first wiring.

2. The actuator device according to claim 1 ,
wherein the second surface includes a curved portion curved to protrude toward a side opposite to the first connection portion in a cross-section perpendicular to the extension direction of the first wiring.

3. The actuator device according to claim 1 ,
wherein the second surface intersects the first surface so as to form an acute angle in a cross-section perpendicular to the extension direction of the first wiring.

4. The actuator device according to claim 1 ,
wherein the first connection portion is formed of a semiconductor material and a diffusion layer having impurities diffused therein is formed in the first connection portion so as to contact the first wiring.

5. The actuator device according to claim 1 ,
wherein the first main body is formed of at least one of tungsten, titanium, nickel, molybdenum, aluminum alloy, tungsten alloy, titanium alloy, nickel alloy, and stainless steel.

6. The actuator device according to claim 1 ,
wherein the first wiring further includes a seed layer provided between the first connection portion and the first main body.

7. The actuator device according to claim 6 ,
wherein the seed layer is formed of a metal material having a Vickers hardness of 50 HV or more.

8. The actuator device according to claim 1 , further comprising:
a barrier layer provided between the first connection portion and the first wiring.

9. The actuator device according to claim 8 ,
wherein the barrier layer is formed of a material having a Vickers hardness of 50 HV or more.

10. The actuator device according to claim 1 , further comprising:
a second wiring provided on the support portion and connected to the first wiring,
wherein the second wiring is formed of a metal material having a Vickers hardness of less than 50 Hy.

11. The actuator device according to claim 1 , further comprising:
a frame portion supporting the support portion and the movable portion;
a second connection portion connecting the support portion to the frame portion on a second axis so that the support portion is swingable around the second axis intersecting the first axis; and
a third wiring provided on the second connection portion,
wherein the third wiring includes a second main body formed of a metal material having a specific resistance smaller than that of a metal material forming the first main body.

12. The actuator device according to claim 1 , further comprising:
a frame portion supporting the support portion and the movable portion;
a second connection portion connecting the support portion to the frame portion on a second axis so that the support portion is swingable around the second axis intersecting the first axis; and
a third wiring provided on the second connection portion,
wherein the third wiring includes a second main body formed of a metal material having a Vickers hardness of 50 HV or more,
wherein the second main body includes a third surface facing the second connection portion and a fourth surface other than the third surface, and
wherein the fourth surface has a shape in which a curvature is continuous over the entire fourth surface in a cross-section perpendicular to an extension direction of the third wiring.

13. The actuator device according to claim 1 , further comprising:
a mirror provided to the movable portion.

14. The actuator device according to claim 1 , further comprising:
a coil provided to the movable portion,
wherein the first wiring is electrically connected to the coil.

15. The actuator device according to claim 14 ,
wherein the coil is a driving coil.

16. The actuator device according to claim 1 ,
wherein the coil is a sensing coil.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Daiki
• MORINAGA Yuki
• Tanaka Go

Classifications

• B81B2201/03

  Microengines and actuators · CPC title

• B81B7/02 Primary

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title

• B81B7/0009

  Structural features, others than packages, for protecting a device against environmental influences (B81C1/00777 takes precedence) · CPC title

• G02B26/10

  Scanning systems · CPC title

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title