Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Patent metadata

Field	Value
Publication number	US-12080149-B2
Application number	US-202217882172-A
Country	US
Kind code	B2
Filing date	Aug 5, 2022
Priority date	Mar 19, 2020
Publication date	Sep 3, 2024
Grant date	Sep 3, 2024

Abstract

According to one aspect of a technique the present disclosure, there is provided a processing apparatus including: an apparatus controller including a memory storing apparatus data containing monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing analysis items. The apparatus controller is capable of outputting the alarm containing an alarm ID for specifying a type and an occurrence time of the alarm; specifying candidates of the analysis items from the alarm ID; acquiring monitor data corresponding to the candidates; determining a rank of the cause of the alarm according to a difference between monitor data at the occurrence time and a predetermined threshold value; and displaying a relationship between the monitor data and the threshold value. The display screen displays an occurrence history of the alarm and history of acquiring the monitor data.

First claim

What is claimed is:

1. A processing apparatus comprising
an apparatus controller comprising a memory configured to store apparatus data containing at least monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing at least analysis items used for analyzing a cause of the alarm,
wherein the apparatus controller is configured to be capable of:
outputting the alarm containing an alarm ID for specifying a type of the alarm indicating the failure and an occurrence time of the alarm when the failure is detected;
specifying candidates of the analysis items from the alarm ID;
acquiring a plurality of monitor data corresponding to the specified candidates;
determining a rank of the cause of the alarm in accordance with a difference between a value of each of the plurality of monitor data at the occurrence time of the alarm and a predetermined threshold value by comparing each of the plurality of monitor data with the threshold value; and
displaying a relationship between the value of each of the plurality of monitor data and the threshold value in chronological order on a display screen, and

wherein the display screen comprises a region in which an occurrence history of a plurality of alarms comprising the alarm is displayed and a region in which a history of acquiring the plurality of monitor data in accordance with the rank is displayed together with the value of each of the plurality of monitor data, the rank, the threshold value and the occurrence time of the alarm,
wherein the apparatus controller is further configured to be capable of, when the alarm is generated but no apparatus data related to the alarm exceeds a pre-set threshold value, identifying a specific apparatus data among a plurality of apparatus data closest to the pre-set threshold value as a factor of generating the alarm.

2. The processing apparatus of claim 1 , wherein the apparatus controller is further configured to be capable of:
receiving a cause analysis request for identifying, among the plurality of alarms, a specific alarm caused by a flawed exhaust control;
acquiring the monitor data containing the sensor information related to a pump for an exhaust as the analysis items used for analyzing the cause of the specific alarm; and
displaying the monitor data containing the sensor information related to the pump.

3. The processing apparatus of claim 1 , wherein the alarm analysis table further contains the alarm ID for specifying the alarm, the number of items indicating the number of the analysis items used for analyzing the cause of the alarm represented by the alarm ID and analysis item serial numbers for specifying the analysis items, and
wherein the apparatus controller is further configured to be capable of:
receiving a cause analysis request for the alarm containing the alarm ID;
searching the alarm analysis table with the alarm ID;
acquiring the number of the items and the analysis item serial numbers; and
specifying candidates for an item that causes the alarm.

4. The processing apparatus of claim 3 , wherein the apparatus controller is further configured to be capable of acquiring the monitor data corresponding to the analysis items specified by the analysis item serial numbers of the number defined by the number of the items.

5. The processing apparatus of claim 3 , wherein the memory is further configured to store an alarm cause investigation table in which a cause analysis process related to the analysis item serial numbers is defined, and
wherein the apparatus controller is further configured to be capable of acquiring the cause analysis process based on the analysis item serial numbers corresponding to the alarm ID.

6. The processing apparatus of claim 5 , wherein the apparatus controller is further configured to be capable of repeatedly acquiring the cause analysis process related to the analysis item serial numbers in accordance with the number of the items corresponding to the alarm ID.

7. The processing apparatus of claim 1 , wherein the alarm analysis table further contains the alarm ID for specifying the alarm and analysis item serial numbers for specifying the analysis items for analyzing the cause of the alarm represented by the alarm ID, and
wherein the memory is further configured to store a plurality of FT factor diagrams created in advance for each alarm ID, and
wherein the apparatus controller is further configured to be capable of:
receiving a cause analysis request for the alarm;
searching an FT factor diagram corresponding to the alarm ID contained in the cause analysis request among the plurality of FT factor diagrams stored in the memory; and
based on the searched FT factor diagram, creating the alarm analysis table and an alarm cause investigation table in which a cause analysis process related to the analysis item serial numbers is defined.

8. The processing apparatus of claim 1 , wherein the apparatus data is related to an exhaust apparatus configured to exhaust an atmosphere of a process chamber in which a substrate is processed, and comprises one or more data selected from the group comprising a pump current, a pump rotation speed and a pump back pressure.

9. The processing apparatus of claim 8 , wherein the apparatus controller is further configured to be capable of issuing the alarm when an average value of at least one data selected from the group comprising the pump current, the pump rotation speed and the pump back pressure deviates from a pre-set threshold value for a predetermined number of times in a row.

10. The processing apparatus of claim 8 , further comprising at least the process chamber and the exhaust apparatus,
wherein the process chamber and the exhaust apparatus are configured to be arranged on a same floor.

11. A display method comprising:
(a) storing at least apparatus data containing at least monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information, and an alarm analysis table containing at least analysis items used for analyzing a cause of the alarm;
(b) outputting the alarm containing an alarm ID for specifying a type of the alarm indicating the failure and an occurrence time of the alarm when the failure is detected;
(c) specifying candidates of the analysis items from the alarm ID;
(d) acquiring a plurality of monitor data corresponding to the specified candidates;
(e) determining a rank of the cause of the alarm in accordance with a difference between a value of each of the plurality of monitor data at the occurrence time of the alarm and a predetermined threshold value by comparing each of the plurality of monitor data with the threshold value; and
(f) displaying a relationship between the value of each of the plurality of monitor data and the threshold value in chronological order on a display screen,
wherein the display screen comprises a region in which an occurrence history of a plurality of alarms comprising the alarm is displayed and a region in which a history of acquiring the plurality of monitor data in accordance with the rank is displayed together with the value of each of the plurality of monitor data, the rank, the threshold value and the occurrence time of the alarm,
wherein, in (e), when the alarm is generated but no apparatus data related to the alarm exceeds a pre-set threshold value, identifying a specific apparatus data among a plurality of apparatus data closest to the pre-set threshold value as a factor of generating the alarm.

12. A method of manufacturing a semiconductor device, comprising the display method of claim 11 .

Assignees

• Kokusai Electric Corp

Inventors

• Okuno Masanori
• Kawasaki Junichi
• Mori Shinichiro
• Joho Yasuhiro
• Yamazaki Satomi

Classifications

• H10P72/13

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• G08B21/182

  Level alarms, e.g. alarms responsive to variables exceeding a threshold · CPC title

• G05B23/027

  Alarm generation, e.g. communication protocol; Forms of alarm · CPC title