Solution precursor plasma spray of ceramic coating for semiconductor chamber applications
US-2017291856-A1 · Oct 12, 2017 · US
US12070802B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12070802-B2 |
| Application number | US-201716339557-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 10, 2017 |
| Priority date | Oct 17, 2016 |
| Publication date | Aug 27, 2024 |
| Grant date | Aug 27, 2024 |
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A sintered material includes a first material and a second material, wherein the first material is partially stabilized ZrO 2 in which 1 to 90 volume % of Al 2 O 3 is dispersed in crystal grain boundaries or crystal grains, the Al 2 O 3 is a grain having a grain size of less than or equal to 1 μm, and the second material is at least one compound selected from a group consisting of a carbide, a nitride, and a carbonitride, and 5 to 95 volume % of the second material is included in the sintered material.
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The invention claimed is: 1. A sintered material comprising a first material and a second material, wherein the first material is partially stabilized ZrO 2 in which 1 to 90 volume % of Al 2 O 3 is dispersed in crystal grain boundaries or crystal grains, the Al 2 O 3 is a grain having a grain size of more than or equal to 0.1 μm and less than or equal to 1 μm, the second material is at least one compound selected from a group consisting of a carbide, a nitride, and a carbonitride, the sintered material includes 30 to 80 volume % of the second material, and the sintered material includes 20 volume % or more of the first material. 2. The sintered material according to claim 1 , wherein the compound includes at least one element selected from a group consisting of a group 4 element, a group 5 element, a group 6 element, and Si in a periodic table. 3. The sintered material according to claim 1 , wherein a volume ratio, ZrO 2 /(ZrO 2 +Al 2 O 3 ), in the first material is more than or equal to 0.49. 4. The sintered material according to claim 1 , wherein the sintered material further includes a third phase, the third phase includes at least one selected from a group consisting of aluminum oxide, magnesium oxide, cerium oxide, yttrium oxide, and hafnium oxide, and the sintered material includes less than or equal to 50 volume % of the third phase. 5. A cutting tool comprising the sintered material recited in claim 1 . 6. The sintered material according to claim 1 , wherein the first material is partially stabilized ZrO 2 in which 1 to 90 volume % of Al 2 O 3 is dispersed in both of crystal grain boundaries and crystal grains.
based on rare-earth compounds {(non-oxide rare earth compounds C04B35/5156)} · CPC title
Composites · CPC title
with aluminium oxide · CPC title
based on carbides {or oxycarbides (containing free metal binder C22C29/00)} · CPC title
based on yttrium oxide · CPC title
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