Solution precursor plasma spray of ceramic coating for semiconductor chamber applications
US-2017291856-A1 · Oct 12, 2017 · US
US9340679B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9340679-B2 |
| Application number | US-201113997397-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2011 |
| Priority date | Dec 22, 2010 |
| Publication date | May 17, 2016 |
| Grant date | May 17, 2016 |
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Disclosed is a particulate mixture having the following chemical composition, in percentages by weight on the basis of the oxides: ZrO 2 : ≧10.0%; 2%<Al 2 O 3 ≦80%; 2 to 20.0% of an oxide chosen from Y 2 O 3 , Sc 2 O 3 , MgO, CaO, CeO 2 , and mixtures thereof, the MgO+CaO content being less than 5.0%; 0 to 18.0% of an oxide chosen from ZnO, lanthanide oxides except for CeO 2 , and mixtures thereof; less than 12.0% of other oxides. The particulate mixture also has a pigment made of a material chosen from oxide(s) of perovskite structure, oxides of spinel structure, oxides of hematite structure E 2 O 3 , the element E being selected from the group G E (1) consisting of the mixtures of aluminum and chromium, the mixtures of aluminum and manganese, and mixtures thereof, the oxides of rutile structure FO 2 .
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The invention claimed is: 1. An article chosen from the group formed by an item of jewelry, a watch, a bracelet, a necklace, a ring, a brooch, a tiepin, a handbag, a telephone, an item of furniture and a household tool, a handle, a button, a veneer, a visible part of a consumer goods item, a spectacle frame part, an item of crockery, a frame, a lid of a device for communication by radio waves with frequencies of between 800 MHz and 3 GHz, said lid being at least partly exposed to the external environment of the device and traversed by at least some of said waves during the use of the device, said article comprising a sintered part having the following chemical composition, as mass percentages on the basis of the oxides: zirconia ZrO 2 ≧10.0%; 2% to 20.0% of an oxide selected from the group G S (1) consisting of Y 2 O 3 , Sc 2 O 3 , MgO, CaO, CeO 2 , and mixtures thereof, the total content of MgO+CaO being less than 5.0%; 10%<Al 2 O 3 ≦80%; 0 to 18.0% of an oxide selected from the group G S (2) consisting of ZnO, lanthanide oxides with the exception of CeO 2 , and mixtures thereof; less than 12.0% of other oxides; said sintered part comprising 0.5% to 10.0% of a pigment made of a material chosen from oxide(s) of perovskite structure ABO 3 , oxides of spinel structure, oxides of hematite structure E 2 O 3 , the element E being selected from the group G E (1) consisting of mixtures of aluminum and chromium, mixtures of aluminum and manganese, and mixtures thereof, oxides of rutile structure FO 2 , the element F being selected from the group G F (1) consisting of mixtures of tin and vanadium, mixtures of titanium and chromium and niobium, mixtures of titanium and chromium and tungsten, mixtures of titanium and niobium and manganese, mixtures of tin and chromium, and mixtures thereof, orthosilicates selected from the group consisting of zirconium praseodymium orthosilicates (Zr,Pr)SiO 4 , zirconium vanadium orthosilicates (Zr,V)SiO 4 , and zirconium orthosilicates comprising iron oxide as inclusion, and mixtures thereof; and said sintered part being obtained from a particulate mixture which has a median size of less than 10 μm. 2. The article as claimed in claim 1 , in which the oxide of perovskite structure ABO 3 is such that the element A at the site A of the perovskite structure of said oxide is selected from the group G A (1) consisting of calcium, strontium, barium, lanthanum, praseodymium, neodymium, bismuth, cerium, and mixtures thereof; and the element B at the site B of the perovskite structure of said oxide is selected from the group G B (1) consisting of mixtures of cobalt and iron, mixtures of cobalt and manganese, mixtures of cobalt and chromium, mixtures of cobalt and nickel, mixtures of chromium and manganese, mixtures of chromium and nickel, mixtures of chromium and iron, mixtures of manganese and iron, mixtures of manganese and nickel, mixtures of nickel and iron, mixtures of cobalt and titanium, mixtures of cobalt and copper, cobalt, mixtures of chromium and titanium, mixtures of chromium and copper, mixtures of nickel and titanium, chromium, nickel, copper, iron, mixtures of nickel and copper, and mixtures thereof; and/or the oxide of spinel structure CD 2 O 4 or D(C,D) O 4 is such that the element C of the spinel structure is selected from the group G C (1) consisting of nickel Ni in a mole fraction of between 0 and 0.2 or in a mole fraction equal to 1, copper Cu in a mole fraction of between 0 and 0.2, iron Fe in a mole fraction of between 0.2 and 0.6 or in a mole fraction equal to 1, zinc Zn in a mole fraction of between 0 and 0.2 or in a mole fraction equal to 1, manganese Mn in a mole fraction of between 0 and 0.4, cobalt Co in a mole fraction of between 0 and 0.4 or in a mole fraction of between 0.4 and 1, tin Sn in a mole fraction of between 0 and 0.2 or in a mole fraction equal to 1, mixtures of zinc and iron, mixtures of iron and manganese, mixtures of zinc and manganese, mixtures of cobalt and zinc, and mixtures thereof; the percentage by weight of alumina in the sintered part being greater than 10%, and the element D of the spinel structure is selected from the group G D (1) consisting of manganese Mn in a mole fraction of between 0 and 0.4, iron Fe in a mole fraction of between 0 and 0.6 or in a mole fraction equal to 1, chromium Cr in a mole fraction of between 0.2 and 0.6 or in a mole fraction equal to 1, aluminum Al in a mole fraction of between 0 and 1, titanium Ti in a mole fraction of between 0 and 1, cobalt in a mole fraction equal to 1 unless the element C is cobalt, mixtures of iron and chromium, mixtures of iron and chromium and manganese, mixtures of manganese and chromium, mixtures of aluminum and chromium, and mixtures thereof. 3. The article as claimed in claim 2 , in which the oxide of perovskite structure ABO 3 is such that the element A at the site A of the perovskite structure of said oxide is selected from the group G A (2) consisting of lanthanum, praseodymium, neodymium, bismuth, cerium, and mixtures thereof; and the element B at the site B of the perovskite structure of said oxide is selected from the group G B (2) consisting of mixtures of cobalt and iron, mixtures of cobalt and manganese, mixtures of chromium and manganese, mixtures of chromium and iron, mixtures of cobalt and chromium and iron, mixtures of cobalt and chromium and iron and manganese, mixtures of cobalt and iron and manganese, mixtures of cobalt and chromium, mixtures of cobalt and nickel, mixtures of cobalt and titanium, mixtures of cobalt and copper, cobalt, mixtures of chromium and nickel, mixtures of chromium and titanium, mixtures of chromium and copper, mixtures of chromium and iron and manganese, mixtures of nickel and iron, mixtures of nickel and manganese, mixtures of nickel and cobalt, mixtures of nickel and titanium, mixtures of nickel and cobalt and chromium, mixtures of nickel and cobalt and chromium and manganese, mixtures of nickel and chromium and manganese, chromium, nickel, copper; and/or the oxide of spinel structure CD 2 O 4 or D(C,D)O 4 is such that the element C of the spinel structure is selected from the group G C (2) consisting of nickel Ni in a mole fraction of between 0 and 0.2 or in a mole fraction equal to 1, iron Fe in a mole fraction of between 0.2 and 0.6 or in a mole fraction equal to 1, zinc Zn in a mole fraction equal to 1, manganese Mn in a mole fraction of between 0 and 0.4, cobalt Co in a mole fraction of between 0 and 0.4 or in a mole fraction of between 0.4 and 1, tin Sn in a mole fraction of between 0 and 0.2 or in a mole fraction equal to 1, mixtures of zinc and iron, mixtures of iron and manganese, mixtures of zinc and manganese, mixtures of cobalt and zinc, and mixtures thereof, and the element D of spinel structure is selected from the group G D (2) consisting of manganese Mn in a mole fraction of between 0 and 0.4, iron Fe in a mole fraction of between 0.2 and 0.6 or in a mole fraction equal to 1, chromium Cr in a mole fraction of between 0 and 0.6 or in a mole fraction equal to 1, aluminum Al in a mole fraction equal to 1, titanium Ti in a mole fraction equal to 1, cobalt in a mole fraction equal to 1 unless the element C is cobalt, mixtures of iron and chromium, mixtures of iron and chromium and manganese, mixtures of manganese and chromium, mixtures of aluminum and chromium, and mixtures thereof. 4. The article as claimed in claim 1 , in which the element A at the site A of the perovskite structure is lanthanum. 5. The article as claimed in claim 1 , in which the oxide of spinel structure CD 2 O 4 or D(C,D)O 4 is such that Ni is present in a mole fraction of between 0 and 0.2. 6. The article as claimed in claim 1 , in which the pigment is chosen from the oxides of perovskite structure ABO 3 s
Submicron sized grains, i.e. from 0,1 to 1 micron · CPC title
Cerium oxides or oxide-forming salts thereof · CPC title
Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof · CPC title
expressed by specific surface values · CPC title
Cubic symmetry, e.g. beta-SiC · CPC title
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