Arene molybdenum (0) precursors for deposition of molybdenum films
US-11584768-B2 · Feb 21, 2023 · US
Molybdenum (0) precursors for deposition of molybdenum films
US12060370B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12060370-B2 |
| Application number | US-202117146878-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 12, 2021 |
| Priority date | Jan 12, 2021 |
| Publication date | Aug 13, 2024 |
| Grant date | Aug 13, 2024 |
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- Title
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Abstract
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Molybdenum(0) coordination complexes comprising ligands which each coordinate to the metal center by nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
First claim
Opening claim text (preview).
What is claimed is: 1. A metal coordination complex consisting of a molybdenum(0) precursor having a general formula of Mo(L) z , wherein z is 2, and L is selected from the group consisting of and wherein each R may be independently selected from Me-, Et-, iPr-, and tBu-.
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by heating · CPC title
Physical treatment to alter the texture of the surface, e.g. scratching or polishing · CPC title
by cleaning or etching · CPC title
After-treatment · CPC title
characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations · CPC title
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- What does patent US12060370B2 cover?
- Molybdenum(0) coordination complexes comprising ligands which each coordinate to the metal center by nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, moly…
- Who is the assignee on this patent?
- Applied Materials Inc, Nat Univ Singapore
- What technology area does this patent fall under?
- Primary CPC classification C07F11/00. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Aug 13 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).