Imaging system and method of manufacturing a metalens array

Patent metadata

Field	Value
Publication number	US-12050327-B2
Application number	US-201916537326-A
Country	US
Kind code	B2
Filing date	Aug 9, 2019
Priority date	Jun 4, 2019
Publication date	Jul 30, 2024
Grant date	Jul 30, 2024

Abstract

An imaging system and a method of manufacturing a metalens array is provided. The imaging system includes a metalens array, and light scattered from an object is split by the metalens array, such that an image is formed in front of an observer. The metalens array is at least partially transparent to visible light, so that the observer can also see the environment. The method of manufacturing the metalens array includes bonding together a plurality of substrates, and dicing the plurality of substrates into metalens arrays. The metalens arrays can be used in the imaging system.

First claim

We claim:

1. An imaging system, comprising:
a metalens array, comprising:
first metalens elements disposed on a first substrate, each of the first metalens elements are spaced from each other, each of the first metalens elements have a first width from a first leading sidewall to a first trailing sidewall; and
second metalens elements disposed on a second substrate and contacting a lower surface of the first substrate and an upper surface of the second substrate, each of the second metalens elements are spaced from each other, wherein:
each of the second metalens elements have a second width from a second leading sidewall to a second trailing sidewall;
the second trailing sidewall extend past the first trailing sidewall of each of the first metalens elements disposed on the first substrate; and
the second leading sidewall of each of the second metalens elements extend past the first leading sidewall of each of the first metalens elements disposed on the first substrate,

wherein the metalens array is configured such that a first beam of light incident on the metalens array is reflected and collimated into a reflected beam, and
the metalens array is at least partially transparent to visible light in a direction parallel to the direction of the reflected beam.

2. The imaging system of claim 1 , wherein at least one of the first substrate and the second substrate comprises glass.

3. The imaging system of claim 1 , wherein at least one of the first substrate and the second substrate comprises plastic.

4. The imaging system of claim 1 , wherein the imaging system is an augmented reality (AR) imaging system.

5. The imaging system of claim 1 , further comprising a micro display, wherein light created from the micro display forms the first beam of light.

6. The imaging system of claim 1 , further comprising:
third metalens elements disposed on a third substrate and contacting the lower surface of the second substrate and the upper surface of the third substrate, each of the third metalens elements are spaced from each other, wherein:
each of the third metalens elements have a third width from a third leading sidewall to a third trailing sidewall;
the third trailing sidewall of each of the third metalens elements extend past the second trailing sidewall of each of the second metalens elements disposed on the second substrate; and
the third leading sidewall of each of the third metalens elements extend past the second leading sidewall of each of the second metalens elements disposed on the second substrate.

7. An imaging system, comprising:
a frame;
a lens attached to the frame; and
a metalens array disposed in the lens, the metalens array comprising:
first metalens elements disposed on a first substrate, each of the first metalens elements are spaced from each other, each of the first metalens elements have a first width from a first leading sidewall to a first trailing sidewall; and
second metalens elements disposed on a second substrate and contacting a lower surface of the first substrate and an upper surface of the second substrate, each of the second metalens elements are spaced from each other, wherein:
each of the second metalens elements have a second width from a second leading sidewall to a second trailing sidewall;
the second trailing sidewall extend past the first trailing sidewall of each of the first metalens elements disposed on the first substrate; and
the second leading sidewall of each of the second metalens elements extend past the first leading sidewall of each of the first metalens elements disposed on the first substrate,

wherein the metalens array is configured such that a first beam of light incident on the one or more metalens arrays is reflected and collimated into a reflected beam, and
the metalens array is at least partially transparent to visible light in a direction parallel to the direction of the reflected beam.

8. The imaging system of claim 7 , wherein at least one of the first substrate and the second substrate comprises glass.

9. The imaging system of claim 7 , wherein at least one of the first substrate and the second substrate comprises plastic.

10. The imaging system of claim 7 , wherein the imaging system is an augmented reality (AR) imaging system.

11. The imaging system of claim 7 , further comprising a micro display, wherein light created from the micro display forms the first beam of light.

12. The imaging system of claim 7 , further comprising:
third metalens elements disposed on a third substrate and contacting the lower surface of the second substrate and the upper surface of the third substrate, each of the third metalens elements are spaced from each other, wherein:
each of the third metalens elements have a third width from a third leading sidewall to a third trailing sidewall;
the third trailing sidewall of each of the third metalens elements extend past the second trailing sidewall of each of the second metalens elements disposed on the second substrate; and
the third leading sidewall of each of the third metalens elements extend past the second leading sidewall of each of the second metalens elements disposed on the second substrate.

13. A method of manufacturing a metalens array, comprising:
bonding together a first substrate and a second substrate to create a substrate stack, wherein:
the first substrate comprises first metalens elements disposed thereon, each of the first metalens elements are spaced from each other, each of the first metalens elements have a first width from a first leading sidewall to a first trailing sidewall; and
the second substrate comprises second metalens elements disposed thereon and contacting a lower surface of the first substrate and an upper surface of the second substrate, each of the second metalens elements are spaced from each other, wherein:
each of the second metalens elements have a second width from a second leading sidewall to a second trailing sidewall;
the second trailing sidewall extend past the first trailing sidewall of each of the first metalens elements disposed on the first substrate; and
the second leading sidewall of each of the second metalens elements extend past the first leading sidewall of each of the first metalens elements disposed on the first substrate;

dicing the substrate stack into a plurality of metalens arrays; and
placing the metalens array into an imaging system.

14. The method of claim 13 , wherein the metalens array is configured such that:
a first beam of light incident on the metalens array is reflected and collimated into a reflected beam, and
the metalens array is at least partially transparent to visible light in a direction parallel to the direction of the reflected beam.

15. The method of claim 13 , wherein the first metalens elements comprise at least one red metalens element, at least one green metalens element, and at least one blue metalens element.

16. The method of claim 13 , wherein each metalens element is an achromatic metalens element.

17. The method of claim 13 , wherein at least one of the first substrate and the second substrate comprises glass.

18. The method of claim 13 , wherein at least one of the first substrate and the second substrate comprises plastic.

19. The method of claim 13 , wherein the placing the metalens array into an imaging system comprises embedding the metalens array into a lens.

20. The method of claim 13 , wherein:
third metalens elements are disposed on a third substrate and contacting the lower surface of

Assignees

• Applied Materials Inc

Inventors

• Fu Jinxin
• Roy Tapashree
• Godet Ludovic
• Mcmillan Wayne
• Visser Robert J

Classifications

• G02B3/0012 Primary

  characterised by the manufacturing method · CPC title

• G02B27/0172 Primary

  characterised by optical features · CPC title

• G02B2027/0134

  of stereoscopic type · CPC title

• G02B27/10

  Beam splitting or combining systems (polarising systems G02B27/28; mixing and splitting light signals using optical waveguides G02B6/28; {beam shaping, e.g. changing the cross-sectional area, by dividing or superposing multiple light beams G02B27/0905}) · CPC title

• G02B27/30

  Collimators · CPC title