Cobalt-boron (CoB) layer for magnetic recording devices, memory devices, and storage devices

Patent metadata

Field	Value
Publication number	US-12033675-B2
Application number	US-202217956786-A
Country	US
Kind code	B2
Filing date	Sep 29, 2022
Priority date	Sep 29, 2022
Publication date	Jul 9, 2024
Grant date	Jul 9, 2024

Abstract

Embodiments of the present disclosure relate to a cobalt-boron (CoB) layer for magnetic recording devices, memory devices, and storage devices. In one or more embodiments, the CoB layer is part of a spin-orbit torque (SOT) device. In one or more embodiments, the SOT device is part of an SOT based sensor, an SOT based writer, a memory device (such as a magnetoresistive random-access memory (MRAM) device), and/or a storage device (such as a hard disk drive (HDD) or a tape drive). In one embodiment, an SOT device includes a seed layer, and a cap layer spaced from the seed layer. The SOT device includes a spin-orbit torque (SOT) layer, and a nano layer (NL) between the seed layer and the cap layer. The SOT device includes a cobalt-boron (CoB) layer between the seed layer and the cap layer, and the CoB layer is ferromagnetic.

First claim

What is claimed is:

1. A spin-orbit torque (SOT) device, comprising:
a first electrode;
a seed layer disposed over the first electrode;
a cap layer spaced from the seed layer, wherein the cap layer is nonmagnetic;
a spin Hall layer;
a nano layer (NL) between the seed layer and the cap layer, wherein the NL is magnetic;
a cobalt-boron (CoB) layer between the seed layer and the cap layer, wherein the CoB layer is ferromagnetic and the CoB layer is substantially free from materials other than cobalt (Co) and boron (B), wherein there is spin orbital coupling between the CoB layer and the spin Hall layer; and
a second electrode disposed over the cap layer.

2. The SOT device of claim 1 , wherein a majority of a phase of the CoB layer is amorphous.

3. The SOT device of claim 1 , wherein a B atomic percentage of the CoB layer is within a range of 5% to 30%, and a Co atomic percentage of the CoB layer is within a range of 65% to 90%.

4. The SOT device of claim 3 , wherein the B atomic percentage and the Co atomic percentage added together equal at least 95% of a total atomic percentage of the CoB layer.

5. The SOT device of claim 3 , wherein the B atomic percentage is about 20%.

6. The SOT device of claim 1 , wherein a first thickness of the CoB layer is at least 35 Angstroms.

7. The SOT device of claim 6 , wherein the first thickness is within a range of 50 Angstroms to 100 Angstroms.

8. The SOT device of claim 6 , wherein a second thickness of the NL is 5 Angstroms or less.

9. The SOT device of claim 8 , wherein a third thickness of the cap layer is 50 Angstroms or less.

10. The SOT device of claim 1 , further comprising:
a first insertion layer between the CoB layer and the cap layer, the first insertion layer formed of hafnium (Hf); and
a second insertion layer between the first insertion layer and the cap layer, the second insertion layer formed of tantalum (Ta).

11. The SOT device of claim 10 , wherein each of the first insertion layer and the second insertion layer has a thickness within a range of 10 Angstroms to 15 Angstroms.

12. A magnetic recording device comprising the SOT device of claim 1 .

13. A spin-orbit torque (SOT) device, comprising:
a first electrode;
a spin-orbit torque (SOT) layer that includes bismuth antimony (BiSb);
a cobalt-boron (CoB) layer, wherein the CoB layer is ferromagnetic;
a nano layer (NL) between the SOT layer and the CoB layer, wherein the NL is magnetic;
one or more insertion layers above the CoB layer such that the CoB layer is between the NL and the one or more insertion layers; and
a second electrode spaced from the first electrode.

14. The SOT device of claim 13 , wherein the NL is formed of a magnetic material that includes one or more of cobalt (Co), nickel-iron (NiFe), cobalt-iron (CoFe), or a Heusler alloy.

15. The SOT device of claim 14 , wherein the magnetic material of the NL includes Co 2 FeGe.

16. The SOT device of claim 13 , wherein the CoB layer has a resistivity that is at least 100 μOhms-cm.

17. The SOT device of claim 13 , further comprising:
a seed layer;
a cap layer spaced from the seed layer, wherein the cap layer is nonmagnetic; and
a buffer layer between the seed layer and the SOT layer,
wherein each of the SOT layer, the NL, the CoB layer, and the one or more insertion layers is between the buffer layer and the cap layer.

18. The SOT device of claim 17 , further comprising:
wherein each of the seed layer, the cap layer, and the buffer layer is between the first electrode and the second electrode.

19. A magnetic recording device comprising the SOT device of claim 13 .

20. A spin-orbit torque (SOT) device, comprising:
a first electrode;
a seed layer disposed over the first electrode;
a cap layer spaced from the seed layer, wherein the cap layer is nonmagnetic;
a spin Hall layer between the seed layer and the cap layer;
a polarizing means between the seed layer and the cap layer, wherein the polarizing means is magnetic;
a cobalt-boron (CoB) layer between the polarizing means and the cap layer, wherein the CoB layer is ferromagnetic, wherein there is spin orbital coupling between the CoB layer and the spin Hall layer;
one or more insertion layers between the CoB layer and the cap layer; and
a second electrode disposed over the cap layer.

Assignees

• Western Digital Tech Inc

Inventors

• Okamura Susumu
• Le Quang
• York Brian R
• Hwang Cherngye
• Simmons Randy G
• Ho Kuok San
• Takano Hisashi

Classifications

• H10N50/85

  Materials of the active region · CPC title

• H10N50/10

  Magnetoresistive devices · CPC title

• G11B5/37

  using galvano-magnetic devices, e.g. Hall-effect devices (G11B5/39 takes precedence){using Hall or Hall-related effect, e.g. planar-Hall effect or pseudo-Hall effect} · CPC title

• G11B5/235

  Selection of material for gap filler {(G11B5/232 takes precedence)} · CPC title

• G11B5/314

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title