Vertical batch furnace assembly with detector to detect cassette

Patent metadata

Field	Value
Publication number	US-12009241-B2
Application number	US-202017063214-A
Country	US
Kind code	B2
Filing date	Oct 5, 2020
Priority date	Oct 14, 2019
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

Vertical batch furnace assembly for processing wafers comprising a cassette handling space with a cassette storage, and a cassette handling mechanism. The cassette handling mechanism comprises a cassette handler which is configured to transfer wafer cassettes between cassette storage positions and a wafer transfer position by supporting and moving the wafer cassettes on a cassette handler arm. The cassette handler arm is provided with a detector to detect a cassette in a detection area. The cassette handler moves the detection area of the detector towards one of the cassette storage positions to detect whether a cassette is present.

First claim

The invention claimed is:

1. A vertical batch furnace assembly for processing wafers provided with a cassette handling space constructed and arranged to handle wafer cassettes for storing wafers, the space comprising:
at least one process chamber;
at least one in/out port;
a wafer transfer position, wherein the wafer transfer position is configured to hold one wafer cassette at a time;
a plurality of cassette storage positions configured to store a plurality of wafer cassettes;
at least one storage carousel comprising at least one of the plurality of cassette storage positions;
a rotatable cassette storage carousel comprising at least another one of the plurality of cassette storage positions, wherein the rotatable cassette storage carousel is configured to rotate around a vertical storage carousel axis,
a swapper carousel, wherein the swapper carousel comprises a plurality of cassette support surfaces, wherein the swapper carousel is rotatable around a vertical swapper axis, wherein the swapper carousel is configured to transfer each of the plurality of cassette support surfaces to at least one cassette load/retrieve positions and to the wafer transfer position, wherein the vertical storage carousel axis is aligned with the vertical swapper axis,
a wafer handler configured to transfer at least one wafer from a wafer cassette to each of the at least one process chamber while the wafer cassette is on the wafer transfer position;
a first cassette handler comprising a first cassette handler arm; and
a second cassette handler comprising a second cassette handler arm;
wherein the plurality of cassette storage positions comprises a first subset of cassette storage positions and a second subset of cassette storage positions, wherein the first subset of cassette storage positions does not comprise cassette storage positions of the second subset of cassette storage positions, and wherein the second subset of cassette storage positions does not comprise cassette storage positions of the first subset of cassette storage positions,
wherein the first cassette handler arm is configured to be able to reach the first subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
wherein the second cassette handler arm is configured to be able to reach the second subset of cassette storage positions of the plurality of cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port,
wherein each of the cassette handlers is configured to transfer wafer cassettes to and from cassette storage positions, the at least one cassette load/retrieve positions, and the at least one in/out port, while supporting the wafer cassettes on the cassette handler arm, wherein the cassette handler arm is provided with a detector to detect a cassette that is spaced apart from the cassette handler arm, and wherein each of the cassette handlers is constructed and arranged to move the cassette handler arm to a position in which the cassette handler arm is spaced apart from, and the detector is positioned to transmit signals in a direction of, one of the plurality of cassette storage positions, and wherein the detector detects, with the cassette handler arm in the position, whether a cassette is present at said one cassette storage position.

2. The vertical batch furnace assembly according to claim 1 , wherein the cassette handler arm is provided with a gripper constructed and arranged to be moveable in a first direction underneath a wafer cassette at a cassette storage position to pick up the cassette and wherein the detector is mounted on the central, longitudinal axis of the gripper to transmit the signals outward along a path generally parallel to the central, longitudinal axis of the gripper.

3. The vertical batch furnace assembly according to claim 2 , wherein the gripper has a triangular shape with one of its corners extending in the direction.

4. The vertical batch furnace assembly according to claim 2 , wherein the detector further detects an orientation of the cassette present at said one cassette storage position.

5. The vertical batch furnace assembly according to claim 2 , wherein the detector is mounted near an edge of the gripper.

6. The vertical batch furnace assembly according to claim 2 , wherein the detector is constructed and arranged to detect the cassette in a detection area and the detector is mounted near an edge of the gripper with the detection area adjacent to the gripper.

7. The vertical batch furnace assembly according to claim 1 , wherein
the detector comprises:
a laser or a laser emitting diode to transmit a beam of radiation in the direction; and,
a receiver surface sensitive to radiation of the laser beam returned from the wafer cassette when positioned in said one cassette storage position.

8. The vertical batch furnace assembly according to claim 1 , wherein each of the cassette handlers is provided with an elevator mechanism configured to reach wafer cassettes placed on cassette storage positions at different vertical heights within the cassette handling space.

9. The vertical batch furnace assembly according to claim 8 , wherein the elevator mechanism of each of the cassette handlers is arranged on a wall of the cassette handling space.

10. The vertical batch furnace assembly according to claim 1 , wherein the plurality of cassette storage positions are configured to store at least 20 wafer cassettes.

11. The vertical batch furnace assembly according to claim 1 , wherein the plurality of cassette storage positions are configured to store at least 40 wafer cassettes.

12. The vertical batch furnace assembly according to claim 1 , wherein the wafer cassettes are embodied as Front Opening Unified Pods (FOUP's).

13. The vertical batch furnace assembly according to claim 1 , further comprising at least one cassette in-out port provided in a wall bounding the cassette handling space, wherein the cassette handling mechanism is configured to additionally transfer wafer cassettes to and from the at least one cassette in-out port, and wherein the at least one cassette in-out port comprises a rotatable tables to rotate the cassettes into correct alignment with either the first cassette handler or the second cassette handler.

14. The vertical batch furnace assembly according to claim 1 , wherein the sensor is an acoustic wave sensor constructed and arranged to transmit an acoustic wave in the direction and to receive a reflection of the acoustic wave returned from the wafer cassette when positioned in said one cassette storage position.

15. The vertical batch furnace assembly according to claim 1 , wherein the assembly further comprises:
at least one cassette load/retrieve position associated with the wafer transfer position in front of at least one wafer transfer opening provided in a wall bounding the cassette handling space; and,
at least one cassette in-out port provided in the wall, and each of the cassette handlers is constructed and arranged to move a detection area of the detector towards the at least one cassette load/retrieve position and/or the at least one cassette in-out port to detect a cassette at the at least one cassette load/retrieve position and/or the at least one cassette in-out port.

16. The vertical batch furnace assembly according to claim 1 , wherein the wafer transfer position is positioned in front of a wafer transfer opening provided in a wall bounding the cassette handling space, wherein the cassette handling mechanism is

Assignees

• Asm Ip Holding Bv

Inventors

• De Ridder Christianus G M

Classifications

• H10P72/0431 Primary

  Apparatus for thermal treatment · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/3404 Primary

  Storage means · CPC title

• H10P72/0608

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title