Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner

Patent metadata

Field	Value
Publication number	US-12000041-B2
Application number	US-202318203853-A
Country	US
Kind code	B2
Filing date	May 31, 2023
Priority date	Jun 12, 2020
Publication date	Jun 4, 2024
Grant date	Jun 4, 2024

Abstract

A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber. The method further includes detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector. The method further includes aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.

First claim

What is claimed is:

1. A method comprising:
transmitting, by a light coupling device, light emitted from a light source through a window of a processing chamber directed at a reflector mounted on a liner of the processing chamber across from the window;
focusing, by the light coupling device into a fiber optic cable, light received reflected back from the reflector along an optical path through the processing chamber and the window;
receiving, by a spectrometer, the focused light from the fiber optic cable;
detecting, by the spectrometer within the focused light, a first spectrum representative of a deposited film layer on the reflector; and
aligning, by a first alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.

2. The method of claim 1 , further comprising:
calibrating, by a controller, the alignment device in order to increase a signal-to-noise ratio (SNR) of the focused light above a threshold SNR; and
wherein the aligning further comprises aligning, by a second alignment device, the reflector in the two dimensions in concert with aligning the light coupling device.

3. The method of claim 1 , further comprising:
receiving, by a processing device, the first spectrum from the spectrometer;
receiving, by the processing device, from the spectrometer, a second spectrum when the light source is off;
calculating, by the processing device, a reflectometry data by subtracting the second spectrum from the first spectrum;
calculating, by the processing device, a reflectometry signal by dividing the reflectometry data by a reference spectrum; and
fitting, by the processing device, the reflectometry signal to a thin film optical model to determine information comprising one or more optical film property of the deposited film layer.

4. The method of claim 3 , wherein the one or more optical film property comprises thickness, the method further comprising, after processing a substrate within the processing chamber:
detecting, by the processing device, that the thickness of the deposited film layer on the reflector has reached an accumulation limit; and
in response to the detection, triggering the processing chamber to initiate a cleaning process in the processing chamber.

5. The method of claim 3 , wherein the one or more optical film property comprises thickness, the method further comprising, while processing substrates within the processing chamber:
detecting a moment in time when the deposited film layer has reached a threshold level of thickness; and
triggering an end of a deposition process that is depositing the deposited film layer.

6. A method comprising:
receiving light, by a light coupling device and along an optical path, reflected from a reflector mounted on a liner of a processing chamber;
detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector; and
aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.

7. The method of claim 6 , further comprising:
transmitting, by the light coupling device, light emitted from a light source through a window of the processing chamber directed at the reflector mounted on the liner of the processing chamber across from the window; and
focusing, by the light coupling device into a fiber optic cable, the received light reflected from the reflector along the optical path through the processing chamber and the window; and
receiving, by the spectrometer, the focused received light from the fiber optic cable.

8. The method of claim 6 , further comprising:
calibrating, by a controller, the alignment device in order to increase a signal-to-noise ratio (SNR) of the received light above a threshold SNR; and
wherein the aligning further comprises aligning, using a second alignment device, the reflector in concert with aligning the light coupling device.

9. The method of claim 6 , further comprising:
receiving, by a processing device, the first spectrum from the spectrometer;
receiving, from the spectrometer, a second spectrum when a light source for the received light is off;
calculating a reflectometry data by subtracting the second spectrum from the first spectrum;
calculating a reflectometry signal by dividing the reflectometry data by a reference spectrum; and
fitting, by the processing device, the reflectometry signal to a thin film optical model to determine information comprising one or more optical film property of the deposited film layer.

10. The method of claim 9 , wherein the one or more optical film property comprises thickness, the method further comprising, after processing a substrate within the processing chamber:
detecting, by the processing device, that the thickness of the deposited film layer on the reflector has reached an accumulation limit; and
in response to the detection, triggering the processing chamber to initiate a cleaning process in the processing chamber.

11. The method of claim 9 , wherein the one or more optical film property comprises thickness, the method further comprising, while processing substrates within the processing chamber:
detecting a moment in time when the deposited film layer has reached a threshold level of thickness; and
triggering an end of a deposition process that is depositing the deposited film layer.

12. A method comprising:
collimating and directing, using a first collimator, light from a first light source onto a reflector attached to a liner of a processing chamber;
collimating and directing, using a second collimator, light received reflected from the reflector into a spectrometer;
detecting, within the received light, a first spectrum representative of a deposited film layer on the reflector; and
aligning, in two dimensions, the first collimator with the reflector until maximization of the light received by the second collimator.

13. The method of claim 12 , wherein the collimating and directing of the light from the first collimator is through a first window of the processing chamber and at an oblique angle onto the reflector, and wherein the collimating and directing of the received light is through a second window of the processing chamber, the method further comprising positioning the reflector within the processing chamber at a location partway between the first window and the second window.

14. The method of claim 12 , further comprising focusing the received light, using the second collimator, into a fiber optic cable coupled to the spectrometer, the method further comprising receiving, by the spectrometer, the focused received light from the fiber optic cable.

15. The method of claim 12 , further comprising:
aligning, in two dimensions, the second collimator with reference to the reflector until maximization of the light received by the second collimator; and
aligning the reflector in concert with aligning the first collimator with the reflector and aligning the second collimator with the reflector.

16. The method of claim 12 , further comprising:
receiving, by a processing device, the first spectrum from the spectrometer;
receiving, from the spectrometer, a second spectrum when a light source is off;
calculating a ellipsometry data via subtraction of the second spectrum from the first spectrum;
calculating an ellipsometry signal via division of the ellipsometry data by a reference

Assignees

• Applied Materials Inc

Inventors

• Tae Patrick

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/53

  using optical controlling means · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• C23C16/4405 Primary

  Cleaning of reactor or parts inside the reactor by using reactive gases · CPC title

• C23C16/45536

  Use of plasma, radiation or electromagnetic fields · CPC title