Substrate processing apparatus and substrate processing method

Patent metadata

Field	Value
Publication number	US-10796891-B2
Application number	US-201816161180-A
Country	US
Kind code	B2
Filing date	Oct 16, 2018
Priority date	Oct 17, 2017
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

Disclosed is a substrate processing apparatus including a chamber having a processing space inside, a support unit that supports a substrate in the processing space, a gas supply unit that supplies gas into the processing space, a plasma source that generates plasma from the gas supplied into the processing space, and a detection unit that is provided in a sidewall of the chamber and that measures an impedance change to detect a degree of adsorption of particles on an inner wall of the chamber or a surface of a part that is exposed to the processing space.

First claim

What is claimed is:

1. An apparatus for processing a substrate, the apparatus comprising:
a chamber having a processing space inside;
a support unit configured to support the substrate in the processing space;
a gas supply unit configured to supply gas into the processing space;
a plasma source configured to generate plasma from the gas supplied into the processing space; and
a detection unit provided in a hole formed in a sidewall of the chamber, the detection unit being configured to measure an impedance change varying with a degree of deposition of particles introduced through the hole in the sidewall and detect a degree of adsorption of particles on an inner wall of the chamber or a surface of a part that is exposed to the processing space,
wherein the detection unit includes:
a diaphragm installed in an inspection space in the sidewall of the chamber and deformed by deposition of particles, the inspection space being in communication with the processing space.

2. The apparatus of claim 1 , wherein the detection unit further includes:
a voltage source configured to apply current to the diaphragm; and
a controller configured to measure the impedance change by using the current flowing through the diaphragm and detect the degree of adsorption of particles based on the impedance change.

3. The apparatus of claim 2 , wherein the detection unit further includes a plate spaced apart from the diaphragm and disposed farther away from the sidewall of the chamber than the diaphragm, and
wherein one end of the voltage source is connected to the diaphragm and an opposite end of the voltage source is connected to the plate.

4. The apparatus of claim 3 , wherein capacitance of the diaphragm is changed by deposition of the particles, and
wherein the controller measures the capacitance change of the diaphragm and determines that the degree of adsorption of particles is beyond an allowable range, when the capacitance change of the diaphragm exceeds a preset range.

5. The apparatus of claim 3 , wherein the detection unit further includes a measuring instrument configured to measure a frequency of vibration of the plate, and
wherein the controller predicts a degree of adsorption of particles based on a change in the frequency of vibration of the plate and verifies accuracy by comparing the predicted degree of adsorption of particles with the degree of adsorption of particles detected based on the impedance change.

6. The apparatus of claim 2 , wherein the diaphragm is implemented with a thin plate of 100 μm or less.

7. The apparatus of claim 4 , wherein the controller outputs notification to inform of a replacement cycle of the chamber when it is determined that the degree of adsorption of particles is beyond the allowable range.

8. The apparatus of claim 1 , further comprising a liner provided inside the inner wall of the chamber configured to protect the sidewall of the chamber,
wherein the detection unit is provided in the hole formed in the sidewall of the chamber and the liner.

Assignees

• Semes Co Ltd

Inventors

• Kim Seon Do
• Kim Hyung Joon

Classifications

• H10P72/0408

  for drying · CPC title

• H10P70/12

  by dry cleaning only (H10P70/52 takes precedence) · CPC title

• H10P72/06 Primary

  Apparatus for monitoring, sorting, marking, testing or measuring · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/32715

  Workpiece holder · CPC title