Wafer boat handling device, vertical batch furnace and method

Patent metadata

Field	Value
Publication number	US-11996309-B2
Application number	US-202016874452-A
Country	US
Kind code	B2
Filing date	May 14, 2020
Priority date	May 16, 2019
Publication date	May 28, 2024
Grant date	May 28, 2024

Abstract

A wafer boat handling device, configured to be positioned under a process chamber of a vertical batch furnace. The wafer boat handling device comprises a main housing having a wall defining and bounding a wafer boat handling space, and a boat transporter comprising a wafer boat support for supporting a wafer boat and configured to transport the wafer boat to a cooldown position within the wafer boat handling space. A part of the wall adjacent the cooldown position is a wall part with a heat radiation surface absorptance of at least 0.60 so as to withdraw heat from the wafer boat which is in the cooldown position by means of heat radiation absorption.

First claim

The invention claimed is:

1. A wafer boat handling device, configured to be positioned under a process chamber of a vertical batch furnace, wherein the wafer boat handling device comprises:
a main housing having a wall defining and bounding a wafer boat handling space;
a boat transporter comprising at least one wafer boat support for supporting a wafer boat and configured to transport the wafer boat to a cooldown position within the wafer boat handling space;
wherein a part of the wall adjacent the cooldown position is a wall part having a heat radiation surface absorptance of at least 0.6 at room temperature when the wafer boat having one or more wafers loaded therein is in a temperature range between 70 to 200 degrees Celsius and during a cooling of the wafer boat, so as to withdraw heat from the wafer boat which is in the cooldown position by means of heat radiation absorption,
wherein the wall part comprises at least one of an anodized aluminum wall part or a painted metal wall part;
wherein the wall part operates as heat sink due to one of the following features:
the thickness of the wall part; and
an outer surface of the wall part which is directed away from the wafer boat handling space having a heat exchange surface enlarging shape, wherein the heat exchange surface enlarging shape includes at least one of fins, pins, holes and a surface roughness.

2. The wafer boat handling device according to claim 1 , wherein the wall part comprises a cooling channel constructed and arranged to have, in use, a liquid coolant running there through to cool said wall part.

3. The wafer boat handling device according to claim 1 , wherein the boat transporter comprises:
a rotatable table comprising at least two wafer boat supports, wherein the rotatable table is rotatable within the main housing around a central vertical axis to be positionable in a number of rotational positions;
a vertically extending wall structure mounted on the rotatable table and at least partially bounding, at each wafer boat support, a corresponding vertically extending wafer boat chamber,
wherein the rotatable table comprises for each wafer boat chamber a rotational position in which the wafer boat chamber and the wafer boat accommodated therein is in the cooldown position.

4. The wafer boat handling device according to claim 1 , further comprising:
a gas circulation system for supplying a gas to and withdrawing the gas from the wafer boat handling space to create a mini-environment within the main housing of the wafer boat handling device,
wherein the gas circulation system includes a gas circulation system heat exchanger for cooling down the gas which is supplied to the wafer boat handling space so as to withdraw heat from the wafer boat which is in the cooldown position by means of convection.

5. The wafer boat handing device according to claim 3 , further comprising:
a gas circulation system for supplying a gas to and withdrawing the gas from the wafer boat handling space to create a mini-environment within the main housing of the wafer boat handling device,
wherein the gas circulation system includes a gas circulation system heat exchanger for cooling down the gas which is supplied to the wafer boat handling space so as to withdraw heat from the wafer boat which is in the cooldown position by means of convection
wherein the gas circulation system is configured to supply the gas at least to the wafer boat chamber which is in the cooldown position.

6. The wafer boat handling device according to claim 5 , wherein the gas circulation system comprises:
a gas supply area in each wafer boat chamber comprising a plurality of gas supply openings distributed in the vertically extending wall structure;
a gas discharge area in each wafer boat chamber, at least when the wafer boat chamber is in the cooldown position, wherein the gas discharge area comprises a plurality of gas discharge openings;
an inlet duct which is in fluid communication with the gas supply openings;
an outlet duct which is in fluid communication with the gas discharge openings; and
a recirculation channel extending from the outlet duct to the inlet duct and comprising at least one gas blower.

7. The wafer boat handling device according to claim 6 , wherein at least a part of the gas discharge area comprising the plurality of gas discharge openings is provided in the wall part having the heat radiation surface absorptance of at least 0.6.

8. The wafer boat handling device according to claim 2 , wherein the boat transporter comprises:
a rotatable table comprising at least two wafer boat supports, wherein the rotatable table is rotatable within the main housing around a central vertical axis to be positionable in a number of rotational positions;
a vertically extending wall structure mounted on the rotatable table and at least partially bounding, at each wafer boat support, a corresponding vertically extending wafer boat chamber,
wherein the rotatable table comprises for each wafer boat chamber a rotational position in which the wafer boat chamber and the wafer boat accommodated therein is in the cooldown position;
the wafer boat handling device further comprising:
a gas circulation system for supplying a gas to and withdrawing the gas from the wafer boat handling space to create a mini-environment within the main housing of the wafer boat handling device,

wherein the gas circulation system comprises a gas circulation system heat exchanger for cooling down the gas which is supplied to the wafer boat handling space so as to withdraw heat from the wafer boat which is in the cooldown position by means of convection;
wherein the gas circulation system is configured to supply the gas at least to the wafer boat chamber which is in the cooldown position,
wherein the gas circulation system comprises:
a gas supply area in each wafer boat chamber comprising a plurality of gas supply openings distributed in the vertically extending wall structure;
a gas discharge area in each wafer boat chamber, at least when the wafer boat chamber is in the cooldown position, wherein the gas discharge area comprises a plurality of gas discharge openings;
an inlet duct which is in fluid communication with the gas supply openings;
an outlet duct which is in fluid communication with the gas discharge openings; and
a recirculation channel extending from the outlet duct to the inlet duct and comprising at least one gas blower;

wherein at least a part of the gas discharge area comprising the plurality of gas discharge openings is provided in the wall part having the heat radiation surface absorptance of at least 0.6, and
wherein the cooling channel comprises a plurality of cooling channels which are part of the gas circulation system heat exchanger, wherein the cooling capacity of the cooling channels is configured such that the heat radiation absorbed by the wall part as well as the heat absorbed by the gas through convection is drained by the liquid coolant in the cooling channels.

9. The wafer boat handling device according to claim 3 , wherein the vertically extending wall structure includes reflection surfaces which are configured such as to reflect heat radiated by the wafer boat in the direction of the wall part.

10. A vertical batch furnace assembly comprising:
a process chamber for processing wafers accommodated in a wafer boat;
a wafer boat handling device according to claim 1 , wherein the wafer boat handling device is positioned under the process chamber; and
a vertical wafer boat lift assembly configured to transfer a wafer boat from the wafer boat handling device to the process chamber and vice versa.

11. A method for cooling a wafer boat

Assignees

• Asm Ip Holding Bv

Inventors

• De Ridder Christianus G M

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/127 Primary

  characterised by the substrate support · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title