Reflective wire grid polarizer with shaped ribs

Patent metadata

Field	Value
Publication number	US-11988859-B2
Application number	US-202217974318-A
Country	US
Kind code	B2
Filing date	Oct 26, 2022
Priority date	Jul 17, 2019
Publication date	May 21, 2024
Grant date	May 21, 2024

Abstract

A reflective wire grid polarizer (WGP) can include an array of wires 12 on a face of a substrate 11, with channels 15 between adjacent wires 12. The wires 12 can have certain characteristics for WGP performance, such as index of refraction, alternating high/low index continuous thin films, thickness of layer(s), duty cycle, reflective rib shape, a curved side of transparent ribs 21 or 32, aspect ratio, or combinations thereof.

First claim

What is claimed is:

1. A reflective wire grid polarizer (WGP) comprising:
an array of wires on a face of a substrate, with channels between adjacent wires;
each wire consists essentially of a reflective rib; and
the reflective rib being wider at a distal end farthest from the substrate than at a proximal end closest to the substrate, a taper angle of sidewalls of the reflective rib, relative to a plane perpendicular to the face of a substrate and parallel with the array of wires, is within the following range: 2°≤taper angle≤4°.

2. The WGP of claim 1 , wherein:
the array of wires having an aspect ratio (AR) of ≥1.8, where AR=Th R /P, Th R is a thickness of the wires measured perpendicular to the face of the substrate, and P is a pitch of the array of wires.

3. The WGP of Tim 1 , wherein:
the channels are air-filled; and
the reflective rib having a proximal end facing the substrate and a distal end opposite of the proximal end and farthest from the substrate, the distal end being flat and parallel to the face of the substrate.

4. The WGP of claim 3 , wherein the channels are air-filled from the proximal end to the distal end of the wires.

5. A reflective wire grid polarizer (WGP) comprising:
an array of wires on a face of a substrate, with channels between adjacent wires;
each wire including a reflective rib;
the reflective rib having multiple widths, including two narrow sections and three wide sections, the two narrow sections separated from each other by one of the three wide sections;
a width (W 51w ) of a wider of the narrow sections divided by a width (W 52w ) of a widest of the wide sections is within the following range: 0.55≤W 51w /W 52w ≤0.75; and
a width (W 51n ) of a narrower of the narrow sections divided by the width (W 52w ) of the widest of the wide sections is within the following range: 0.48≤W 51n /W 52w ≤0.68.

6. The WGP of claim 5 , wherein two of the three wide sections, not between the two narrow sections, are located at outer ends of the reflective rib.

7. The WGP of claim 5 , wherein the WGP has the following performance characteristics: Tp≥91% and Ts≤0.04 at 450 nm wavelength, where Tp is a percent transmission of a primarily transmitted polarization and Ts is a percent transmission of an opposite polarization.

8. The WGP of claim 5 , wherein:
the array of wires having an aspect ratio (AR) of ≥1.8, where AR=Th R /P, Th R is a thickness of the wires measured perpendicular to the face of the substrate, and P is a pitch of the array of wires.

9. The WGP of claim 5 , wherein each wire consists essentially of the reflective rib.

10. The WGP of claim 5 , wherein:
the channels are air-filled; and
the reflective rib having a proximal end facing the substrate and a distal end opposite of the proximal end and farthest from the substrate, the distal end being flat and parallel to the face of the substrate.

11. The WGP of claim 10 , wherein the channels are air-filled from the proximal end to the distal end of the wires.

12. A reflective wire grid polarizer (WGP) comprising:
an array of wires on a face of a substrate, with channels between adjacent wires;
each wire including a reflective rib;
the reflective rib being wider at a distal end farthest from the substrate than at a proximal end closest to the substrate, a taper angle of sidewalls of the reflective rib, relative to a plane perpendicular to the face of a substrate and parallel with the array of wires, is within the following range: 2°≤taper angle≤4°; and
the array of wires having an aspect ratio (AR) of ≥1.8, where AR=Th R /P, Th R is a thickness of the wires measured perpendicular to the face of the substrate, and P is a pitch of the array of wires.

13. The WGP of claim 12 , wherein each wire consists essentially of the reflective rib.

14. The WGP of claim 12 , wherein:
the channels are air-filled; and
the reflective rib having a proximal end facing the substrate and a distal end opposite of the proximal end and farthest from the substrate, the distal end being flat and parallel to the face of the substrate.

15. The WGP of claim 14 , wherein the channels are air-filled from the proximal end to the distal end of the wires.

Assignees

• Moxtek Inc

Inventors

• Bacon-Brown Daniel
• Black Michael
• Nielson R Stewart
• Williams Bradley R
• Downard Benjamin
• Rice Jeffrey H
• Pierce Jim

Classifications

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• G02B5/3075

  for use in the UV (G02B5/3066 takes precedence) · CPC title