Low Ts wire grid polarizer

Patent metadata

Field	Value
Publication number	US-10649121-B2
Application number	US-201816054147-A
Country	US
Kind code	B2
Filing date	Aug 3, 2018
Priority date	Oct 5, 2017
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A wire grid polarizer (WGP) can have low transmission of a primarily reflected/absorbed polarization (e.g. low Ts). The WGP can comprise an array of wires on a substrate and a stack of thin films between the substrate and the array of wires. The stack of thin films can include a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires. An index of refraction of the first layer can be greater than an index of refraction of the substrate, an index of refraction of the second layer can be greater than the index of refraction of the first layer, and an index of refraction of the third layer can be less than the index of refraction of the first layer.

First claim

What is claimed is:

1. A wire grid polarizer (WGP) comprising:
a substrate having a first face, and a second face opposite of the first face;
an array of wires on the second face of the substrate with channels between adjacent wires;
a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires, the second layer being sandwiched between the first layer and the third layer;
a thin film filling the channels and extending over a distal end of the array of wires farther from the substrate, defining a fourth layer;
a thin film over the fourth layer and located farther from the substrate than the fourth layer, defining a fifth layer; and
the first layer including aluminum oxide;
the second layer including silicon nitride, hafnium oxide, or combinations thereof;
the third layer including silicon oxide;
the fourth layer including silicon oxide; and
the fifth layer including titanium oxide.

2. The WGP of claim 1 , wherein for incident light, at an azimuth angle with a value of 45° and a polar angle with a value of 15°, incident on a first side of the WGP, the first side of the WGP being a side of the WGP on which the substrate is located, transmission of a minimally-transmitted polarization is ≤0.0008 across a light wavelength range from 450 nm through 700 nm, where:
the azimuth angle is an angle between a z-axis and a y-axis, the z-axis being perpendicular to the first face of the substrate, the y-axis being parallel to the first face of the substrate and perpendicular to a length of the wires; and
the polar angle is an angle between an x-axis and a y-axis, the x-axis is parallel to the first face of the substrate and parallel to the length of the wires.

3. The WGP of claim 2 , wherein the incident light, at the azimuth angle of 45° and at the polar angle with the value of 15°, transmission of the minimally-transmitted polarization is ≤0.00025 across the light wavelength range from 450 nm through 700 nm.

4. The WGP of claim 1 , wherein:
for incident light, at an azimuth angle of 45° and at a polar angle with a value of 0°, incident on the first side of the WGP, a percent reflection of a minimally-transmitted polarization is ≥0.85 across the light wavelength range from 450 nm through 700 nm;
the incident light, at the azimuth angle of 45° and at the polar angle with a value of 0°, incident on a second side of the WGP, the second side of the WGP being opposite of the first side of the WGP and being a side of the WGP on which the array of wires is located, a percent reflection of the minimally-transmitted polarization is ≥0.93 across a light wavelength range from 450 nm through 700 nm.

5. The WGP of claim 1 , wherein the first layer comprises ≥95% aluminum oxide, the second layer comprises ≥95% silicon nitride or ≥95% hafnium oxide, the third layer comprises ≥95% silicon oxide, the fourth layer comprises ≥95% silicon oxide, and the fifth layer comprises ≥95% titanium oxide.

6. A wire grid polarizer (WGP) comprising:
a substrate having a first face, and a second face opposite of the first face;
an array of wires on the second face of the substrate with channels between adjacent wires;
a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires, the second layer being sandwiched between the first layer and the third layer;
an index of refraction of the first layer is greater than an index of refraction of the substrate, an index of refraction of the second layer is greater than the index of refraction of the first layer, and an index of refraction of the third layer is less than the index of refraction of the first layer; and
a thickness of the first layer is between 100 nm and 140 nm, a thickness of the second layer is between 35 nm and 75 nm, and a thickness of the third layer is between 25 nm and 65 nm.

7. The WGP of claim 6 , wherein the second layer comprises silicon nitride.

8. The WGP of claim 6 , wherein the first layer comprises 90% aluminum oxide, the second layer comprises >90% silicon nitride or 90% hafnium oxide, and the third layer comprises ≥90% silicon oxide.

9. The WGP of claim 6 , further comprising:
a thin film filling ≥50% of the channels and extending over a distal end of the array of wires farther from the substrate, defining a fourth layer, the fourth layer having an index of refraction less than the index of refraction of the first layer; and
a thin film over the fourth layer, located farther from the substrate than the fourth layer, defining a fifth layer, the fifth layer having an index of refraction greater than the index of refraction of the fourth layer.

10. The WGP of claim 9 , wherein the index of refraction of the fifth layer is greater than the index of refraction of the second layer.

11. The WGP of claim 9 , wherein the fourth layer comprises silicon oxide and the fifth layer comprises titanium oxide.

12. The WGP of claim 6 , wherein for incident light at an angle of 45° with respect to the first face of the substrate, incident on a first side of the WGP, the first side of the WGP being a side of the WGP on which the substrate is located, contrast is ≥40,000 across a light wavelength range from 450 nm through 700 nm, where the contrast is a percent transmission of a predominantly-transmitted polarization divided by a percent transmission of a minimally-transmitted polarization.

13. The WGP of claim 6 , wherein for incident light at an angle of 45° with respect to the first face of the substrate, incident on a first side of the WGP, the first side of the WGP being a side of the WGP on which the substrate is located, transmission of a minimally-transmitted polarization is ≤0.00005 across a light wavelength range from 450 nm through 700 nm.

14. The WGP of claim 6 , further comprising a pair of prisms, the WGP being sandwiched between the pair of prisms, forming a cube polarizing beam splitter.

15. A wire grid polarizer (WGP) comprising:
a substrate having a first face, and a second face opposite of the first face;
an array of wires on the second face of the substrate with channels between adjacent wires;
a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires; and
the first layer comprises aluminum oxide, the second layer comprises silicon nitride, and the third layer comprises silicon oxide.

16. The WGP of claim 15 , wherein for incident light, at an azimuth angle of 45° and at a polar angle with the value of 15°, transmission of a minimally-transmitted polarization is ≤0.00025 across a light wavelength range from 450 nm through 700 nm.

17. The WGP of claim 15 , wherein:
for incident light, at an azimuth angle of 45° and at a polar angle with a value of 0°, incident on the first side of the WGP, a percent reflection of a minimally-transmitted polarization is ≥0.85 across a light wavelength range from 450 nm through 700 nm;
for incident light, at the azimuth angle of 45° and at the polar angle with a value of 0°, incident on a second side of the WGP, the second side of the WGP being opposite of the first side of the WGP and being a side of the WGP on which the a

Assignees

• Moxtek Inc

Inventors

• Li Hua
• Wang Bin
• Bowers Brian

Classifications

• G02B5/3058 Primary

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• G02B27/283

  used for beam splitting or combining · CPC title