Organometallic solution based high resolution patterning compositions

Patent metadata

Field	Value
Publication number	US-11966159-B2
Application number	US-202217903605-A
Country	US
Kind code	B2
Filing date	Sep 6, 2022
Priority date	Aug 22, 2013
Publication date	Apr 23, 2024
Grant date	Apr 23, 2024

Abstract

Organometallic solutions have been found to provide high resolution radiation based patterning using thin coatings. The patterning can involve irradiation of the coated surface with a selected pattern and developing the pattern with a developing agent to form the developed image. The patternable coatings may be susceptible to positive-tone patterning or negative-tone patterning based on the use of an organic developing agent or an aqueous acid or base developing agent. The radiation sensitive coatings can comprise a metal oxo/hydroxo network with organic ligands. A precursor solution can comprise an organic liquid and metal polynuclear oxo-hydroxo cations with organic ligands having metal carbon bonds and/or metal carboxylate bonds.

First claim

What is claimed is:

1. An article comprising:
a substrate; and
a layer of a radiation sensitive material supported by the substrate, the radiation sensitive material comprising a metal oxo-hydroxo network with organo-stabilized metal cations having organic ligands with metal carbon bonds and/or with metal carboxylate bonds, wherein the metal oxo-hydroxo network comprises both M—O—H linkages and M—O-M linkages, wherein M represents the organo-stabilized metal cations, wherein the organo-stabilized metal cations comprise tin in a total amount of at least about 55 mole % of total metal content.

2. The article of claim 1 wherein the layer has an average thickness from about 1 nm to about 200 nm.

3. The article of claim 2 wherein the layer has a thickness variation of no more than about 50% from the average thickness.

4. The article of claim 3 wherein the layer has an average thickness from about 1 nm to about 40 nm.

5. The article of claim 1 wherein the radiation sensitive material is free of peroxide ligands.

6. The article of claim 1 wherein the metal oxo-hydroxo network is stable against ligand cleavage to provide a controlled response to irradiation.

7. The article of claim 1 wherein the organic ligands form a radiation sensitive metal carbon bond and wherein the ligand forming the metal carbon bond comprises an alkyl ligand, alkenyl ligand, aryl ligand, or a combination thereof, each ligand having 1 to 16 carbon atoms and/or wherein the organic ligands form a radiation sensitive metal carboxylate bond and wherein the ligand forming the metal carboxylate bond comprises an alkyl carboxylate ligand, alkenyl carboxylate ligand, aryl carboxylate ligand or a combination thereof, each ligand having 1 to 16 carbon atoms.

8. The article of claim 7 wherein the alkenyl ligands comprise vinyl ligands or allyl ligands.

9. The article of claim 1 wherein a combination of different alkyl ligands are bound to the metal.

10. The article of claim 1 wherein the layer comprises one or more compositions with tin and non-tin metals in a blend.

11. The article of claim 1 wherein the organic ligands comprise methyl, ethyl, propyl, butyl, t-butyl, phenyl, benzyl, vinyl, allyl, acetate, propanoate, butanoate, benzoate, or combinations thereof.

12. The article of claim 1 wherein the organic ligands with metal carbon bonds comprise branched alkyl ligands.

13. The article of claim 1 wherein the organic ligands with metal carbon bonds comprise t-butyl ligands.

14. The article of claim 1 wherein the material has a mole ratio between the organic ligands and the metal cations from about 0.5 to about 3.

15. The article of claim 1 wherein the tin is in a total amount of at least about 75 mol % of total metal content.

16. The article of claim 1 wherein the substrate comprises a semiconductor wafer.

17. The article of claim 1 wherein the layer is sensitive to EUV, UV, or e-beam radiation exposure.

18. The article of claim 1 wherein exposure to radiation causes a reaction in the exposed regions of the layer, the reaction comprising breaking of at least some of the metal carbon bonds and/or metal carboxylate bonds.

19. The article of claim 18 wherein the irradiated material comprises an enhanced metal oxo-hydroxo network, wherein the enhanced metal oxo-hydroxo network has a lower carbon to metal ratio than the metal oxo-hydroxo network, and wherein the irradiated material can be alternatively subjected to positive tone imaging or negative tone imaging.

20. The article of claim 1 wherein the layer is formed by depositing a precursor solution having hydrolysable ligands and the organic ligands onto the substrate and optionally, after depositing, heating to temperatures from about 45° C. to about 250° C. for from about 0.1 minutes to about 30 minutes to form the article.

21. The article of claim 20 wherein the depositing is by spin-coating, spray coating, dip coating, knife edge coating, or printing process or combinations thereof.

22. The article of claim 20 wherein the precursor solution comprises a solvent and a tin composition having hydrolysable ligands and the organic ligands, wherein the solvent comprises an alcohol, an ester, an aromatic compound, a ketone, or a combination thereof.

23. The article of claim 1 wherein the radiation sensitive material further comprises antimony and/or indium.

24. The article of claim 1 wherein the material has a mole ratio between the organic ligands and the metal cations from about 0.75 to about 3.

25. The article of claim 1 wherein the material has a mole ratio between the organic ligands and the metal cations of about 1.

26. The article of claim 1 wherein the layer has an average thickness from about 2 nm to about 40 nm.

27. The article of claim 1 wherein the layer has an average thickness from about 3 nm to about 25 nm.

Assignees

• Inpria Corp

Inventors

• Meyers Stephen T
• Keszler Douglas A
• Jiang Kai
• Anderson Jeremy T
• Grenville Andrew

Classifications

• H10W74/01

  Manufacture or treatment · CPC title

• G03F1/56

  Organic absorbers, e.g. of photo-resists · CPC title

• G03F1/48

  Protective coatings · CPC title

• G03F7/30

  Imagewise removal using liquid means · CPC title

• G03F7/09

  characterised by structural details, e.g. supports, auxiliary layers (supports for printing plates in general B41N) · CPC title