Device and system for testing flatness

Patent metadata

Field	Value
Publication number	US-11948845-B2
Application number	US-202117483613-A
Country	US
Kind code	B2
Filing date	Sep 23, 2021
Priority date	Jan 27, 2021
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

The present disclosure relates to a device and a system for testing flatness. The device for testing flatness includes a base, a testing platform, and a ranging sensor. The testing platform is assembled on the base. The testing platform includes a supporting structure. The supporting structure is disposed on the side of the testing platform away from the base and is used to support a to-be-tested board. The structure matches the structure of the to-be-tested board. The ranging sensor is disposed on the side of the testing platform away from the base. After the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2. According to the embodiments of the present disclosure, the flatness of the glass substrate can be tested to improve the manufacturing process to reduce the flatness of the glass substrate, and avoid the problem that the glass substrate is easily broken when entering the subsequent process equipment and the process equipment is down.

First claim

What is claimed is:

1. A device for testing flatness, comprising:
a base;
a testing platform assembled on the base, wherein the testing platform comprises a supporting structure, the supporting structure is disposed on a side of the testing platform away from the base, and is used to support the to-be-tested board, and the supporting structure matches with a structure of the to-be-tested board;
a ranging sensor disposed on a side of the testing platform away from the base, wherein after the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2.

2. The device for testing flatness according to claim 1 , further comprising a rotating shaft, a number M of said bases and M of said testing platforms, wherein the M bases are arranged around the rotating shaft, and the M bases are fixedly connected to the rotating shaft respectively, the M testing platforms are assembled on the M bases in a one-to-one correspondence, and the supporting structures of the M testing platforms are different; M is an integer greater than 1; and
the to-be-tested board is placed on one of the M testing platforms which is facing the ranging sensor.

3. The device for testing flatness according to claim 1 , further comprising a driving mechanism, wherein the driving mechanism is disposed on a side of the testing platform away from the base, the ranging sensor is disposed on the driving mechanism, and the driving mechanism is used to drive the ranging sensor to move to the N to-be-tested positions respectively.

4. The device for testing flatness according to claim 3 , wherein the driving mechanism comprises a first linear driving mechanism, a second linear driving mechanism, and a third linear driving mechanism, wherein the first linear driving mechanism extends in a first direction, the second linear driving mechanism extends in a second direction, the third linear driving mechanism extends in a third direction, the first direction intersects the second direction, and the third direction is perpendicular to the first direction and the second direction;
the first linear driving mechanism is disposed on the second linear driving mechanism, and the second linear driving mechanism is used to drive the first linear driving mechanism to move along the second linear driving mechanism;
the third linear driving mechanism is disposed on the first linear driving mechanism, and the first linear driving mechanism is used to drive the third linear driving mechanism to move along the first linear driving mechanism;
the ranging sensor is disposed on the third linear driving mechanism, and the third linear driving mechanism is used to drive the ranging sensor to move along the third linear driving mechanism.

5. The device for testing flatness according to claim 1 , wherein the testing platform is detachably assembled on the base, and the device for testing flatness further comprises a platform storage and a platform transmission mechanism;
the platform storage comprises a first storage space and a second storage space, the first storage space is used to store a standby testing platform, and the second storage space is an empty storage space; the supporting structure of the standby testing platform is different from the supporting structure of the testing platform assembled on the base;
the platform transmission mechanism is used to transport the testing platform assembled on the base to the second storage space, and transport the standby testing platform stored in the first storage space to the base.

6. The device for testing flatness according to claim 5 , wherein the platform transmission mechanism comprises a plurality of first rollers, a plurality of second rollers, a plurality of third rollers, a plurality of fourth rollers, a first transmission belt, a second transmission belt, a third transmission belt, a fourth transmission belt, a fifth transmission belt, a sixth transmission belt, a first motor and a second motor;
the base is disposed between the first transmission belt and the second transmission belt, and the platform storage is disposed between the third transmission belt and the fourth transmission belt;
the first motor is used to drive the first transmission belt to rotate, and the second motor is used to drive the second transmission belt to rotate;
the first transmission belt is used to drive the plurality of first rollers to roll, and the second transmission belt is used to drive the plurality of second rollers to roll;
the fifth transmission belt is sleeved on one of the first rollers and one of the third rollers, and when the plurality of first rollers roll, the fifth transmission belt drives the plurality of third rollers to roll;
the sixth transmission belt is sleeved on one of the second rollers and one of the fourth rollers, and when the plurality of second rollers roll, the sixth transmission belt drives the plurality of fourth rollers to roll;
when the platform transmission mechanism transports the testing platform assembled on the base to the second storage space, the plurality of first rollers are disposed below the testing platform assembled on the base and in contact with the testing platform assembled on the base; the plurality of second rollers are disposed below the testing platform assembled on the base and in contact with the testing platform assembled on the base; and the plurality of third rollers and the plurality of fourth rollers are disposed below the second storage space; the first motor drives the first transmission belt to rotate; and the second motor drives the second transmission belt to rotate to drive the plurality of first rollers, the plurality of second rollers, the plurality of first rollers, and the plurality of fourth rollers rotate and transport the testing platform assembled on the base to the second storage space;
when the platform transmission mechanism transports the standby testing platform stored in the first storage space to the base, the plurality of third rollers are disposed below the standby testing platform stored in the first storage space, and in contact with the standby testing platform stored in the first storage space; the plurality of fourth rollers are disposed below the standby testing platform stored in the first storage space, and in contact with the standby testing platform stored in the first storage space; the plurality of first rollers are aligned with the plurality of third rollers; the plurality of second rollers are aligned with the plurality of fourth rollers; the first motor drives the first transmission belt to rotate, and the second motor drive the second transmission belt to rotate to drive the plurality of first rollers, the plurality of second rollers, the plurality of third rollers, and the plurality of fourth rollers to rotate and transport the standby testing platform stored in the first storage space to the base.

7. The device for testing flatness according to claim 6 , further comprising a first lifting apparatus disposed below the base;
wherein before the platform transmission mechanism transports the testing platform assembled on the base to the second storage space, the first lifting apparatus is used to drive the base to move in a third direction, so that the plurality of first rollers are disposed below the testing platform assembled on the base and in contact with the testing platform assembled on the base, and the plurality of second rollers are disposed below the testing platform assembled on the base and

Assignees

• Boe Technology Group Co Ltd

Inventors

• Sun Shaodong
• Gao Haoran
• Yuan Guangcai
• Zhang Lilei
• Fu Wenyue
• Li Li
• Zheng Hanbo
• Liu Shuqi
• Qi Qi
• Yan Junwei
• Gu Pingkuan
• Jing Lina
• Chen Yan
• Chen Yimin

Classifications

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10P74/203 Primary

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H01L22/12 Primary

  Electricity · mapped topic

• G01B11/306

  for measuring evenness · CPC title

• H01L21/02422

  Electricity · mapped topic