Mutliple dielectrics for gate-all-around transistors
US-2020258786-A1 · Aug 13, 2020 · US
Robot
US11926039B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11926039-B2 |
| Application number | US-202017134221-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 25, 2020 |
| Priority date | Dec 25, 2020 |
| Publication date | Mar 12, 2024 |
| Grant date | Mar 12, 2024 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.
First claim
Opening claim text (preview).
The invention claimed is: 1. A robot for conveying a wafer comprising: an arm; and a hand which connects to the arm and supports to convey the wafer, wherein the hand includes a base end portion which is an end of a side connected to the arm and a distal end portion which is an end of an opposite side of the base end portion, a lightened part is formed in at least a part of a first region in the hand that is a region from a center in a longitudinal direction of the hand to the distal end portion, and the lightened part is formed so as to increase a natural frequency of the arm. 2. The robot according to claim 1 , wherein the first region includes a thick part whose thickness is a first thickness and a thin part whose thickness is smaller than the first thickness, and the lightened part is the thin part. 3. The aligner apparatus according to claim 2 , wherein the lightened part is formed in at least a part of the first region other than the distal end portion. 4. The aligner apparatus according to claim 2 , wherein when an upper side face of the hand in a vertical direction is referred to as an upper face and a lower side face of the hand in a vertical direction is referred to as a lower face, the upper face is flat and a step is formed as a boundary of the thick part and the thin part on the lower face. 5. The robot according to claim 2 , wherein the thin part is formed such that the thickness of the thin part is 60% or less of the first thickness. 6. The robot according to claim 5 , wherein the thickness of the thin part is 30% or more of the first thickness. 7. The robot according to claim 1 , wherein the lightened part is a part where a through hole is formed in the first region. 8. The aligner apparatus according to claim 1 , wherein the lightened part is a portion which is formed into hollow in the first region. 9. The robot according to claim 1 , wherein the lightened part is formed on a lower face of the hand in the first region. 10. The robot according to claim 9 , wherein the lower face of the hand comprises a surface of a side of the hand that does not contact the wafer.
Assignees
Inventors
Classifications
using vacuum or suction, e.g. Bernoulli chucks · CPC title
the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title
Mechanical parts of transfer devices · CPC title
Mechanical parts of transfer devices · CPC title
- B25J15/0014Primary
having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title
Patent family
Related publications grouped by family.
External sources
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US11926039B2 cover?
- A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which …
- Who is the assignee on this patent?
- Kawasaki Heavy Ind Ltd, Kawasaki Robotics Usa Inc
- What technology area does this patent fall under?
- Primary CPC classification B25J15/0014. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Mar 12 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).