Suction method

Patent metadata

Field	Value
Publication number	US-11865701-B2
Application number	US-201816763888-A
Country	US
Kind code	B2
Filing date	Nov 9, 2018
Priority date	Nov 17, 2017
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.

First claim

The invention claimed is:

1. A suction method of performing suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, by using a suction collet,
the method comprising:
a first step of arranging the suction collet so as to face the main surface;
a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and
a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step,
wherein the suction collet includes: a main body having a surface provided with an opening for air intake; and a contact portion that is provided on the surface so as to protrude from the surface and that includes a contact surface,
the laminated structure is provided with a membrane structure including a first mirror portion and a second mirror portion facing each other via a gap and in which a distance from each other is variable and including a portion of the main surface,
in the first step, the suction collet is arranged such that the contact surface faces a bottom surface of the thinned portion,
in the second step, the contact surface is brought into contact with the bottom surface while forming a space between the surface and the main surface, and
in the third step, an inside of the space is exhausted by the air intake through the opening.

2. The suction method according to claim 1 ,
wherein the contact portion extends so as to surround an area on the surface facing the space when viewed in a direction intersecting the surface,
the contact portion is provided with a communication portion that allows the space to communicate with an outside in a state where the contact surface is in contact with the bottom surface, and
in the third step, air is introduced into the space through the communication portion by the air intake through the opening.

3. The suction method according to claim 2 ,
wherein the contact portion includes a plurality of portions arranged to be spaced apart from each other so as to surround the area when viewed in the direction intersecting the surface, and
the communication portion is formed by a gap between the portions.

4. The suction method according to claim 2 ,
wherein the laminated structure includes an electrode terminal that is located outside the membrane structure when viewed in the direction intersecting the main surface and that protrudes from the main surface, and
in the first step, the suction collet is arranged such that the communication portion is located at a position corresponding to the electrode terminal outside the electrode terminal in the state where the contact surface is in contact with the bottom surface.

5. The suction method according to claim 2 ,
wherein the laminated structure has a rectangular shape when viewed in the direction intersecting the main surface, and
in the first step, the suction collet is arranged such that the communication portion is located at a position corresponding to each of four corner portions of the rectangular shape of the laminated structure in the state where the contact surface is in contact with the bottom surface.

6. The suction method according to claim 1 ,
wherein the contact portion is integrally formed so as to continuously surround an area on the surface facing the space when viewed in the direction intersecting the surface.

7. The suction method according to claim 1 ,
wherein a plurality of the openings is formed in the surface, and
in the first step, the suction collet is arranged such that the plurality of openings is symmetrically dispersed with respect to a center of the membrane structure when viewed in the direction intersecting the main surface.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Hirose Masaki
• Shibayama Katsumi
• Kasahara Takashi
• Kawai Toshimitsu
• Oyama Hiroki
• Kuramoto Yumi

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/3212 Primary

  the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames · CPC title

• B25J15/065 Primary

  provided with separating means for releasing the gripped object after suction · CPC title

• B25J15/0616

  with vacuum · CPC title

• B65G49/05

  for fragile or damageable materials or articles · CPC title