Mask and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11864453-B2
Application number	US-202117452279-A
Country	US
Kind code	B2
Filing date	Oct 26, 2021
Priority date	Feb 5, 2021
Publication date	Jan 2, 2024
Grant date	Jan 2, 2024

Abstract

Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.

First claim

What is claimed is:

1. A mask comprising:
a mask frame comprising a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and comprising a material composition that is different from that of the base part; and
unit masks on the mask frame, respectively corresponding to the cell openings, comprising a material composition that is different from that of the coating part, and in which openings are defined.

2. The mask of claim 1 , wherein an absorption rate of the coating part for a laser is lower than an absorption rate of the base part for the laser.

3. The mask of claim 2 , wherein the coating part comprises magnesium or aluminum.

4. The mask of claim 1 , wherein a thickness of the coating part is at most about 1/20 of a thickness of the base part.

5. The mask of claim 1 , wherein the coating part covers an entirety of the upper surface of the base part.

6. The mask of claim 1 , wherein the coating part comprises a plurality of coating parts spaced apart from each other, and respectively surrounding the cell openings.

7. The mask of claim 1 , wherein edges of each of the unit masks overlaps the coating part on a plane.

8. The mask of claim 1 , further comprising a joining part joining one of the unit masks and the mask frame.

9. The mask of claim 8 , wherein the joining part joins the one of the unit masks and the coating part.

10. The mask of claim 8 , wherein the joining part joins the one of the unit masks and the base part, and wherein the coating part is spaced apart from the joining part.

Assignees

• Samsung Display Co Ltd

Inventors

• Moon Youngmin
• Moon Minho
• Son Ji-Hee
• Song Seungyong
• Im Sungsoon
• Jo Junho

Classifications

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• B23K26/244 Primary

  Overlap seam welding · CPC title

• H10D86/0231

  using masks, e.g. half-tone masks · CPC title

• B23K26/364

  for making a groove or trench, e.g. for scribing a break initiation groove · CPC title

• C23C14/042 Primary

  using masks · CPC title