Semiconductor device manufacturing method
US-2020294960-A1 · Sep 17, 2020 · US
US11855038B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11855038-B2 |
| Application number | US-202017432354-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 20, 2020 |
| Priority date | Feb 20, 2019 |
| Publication date | Dec 26, 2023 |
| Grant date | Dec 26, 2023 |
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A method for assembling components includes assembling a first component including solder bumps with a second component including connectors. The assembly of the components is preceded by pre-treating the first and second components wherein the solder bumps are contacted with a pre-treatment liquid configured to at least partially remove an oxide layer initially present on the solder. The pre-treatment liquid is an aqueous solution containing carboxylic acids or polycarboxylic acids. The assembly of the components is carried out after the pre-treatment in the absence of liquid or gas flux.
Opening claim text (preview).
The invention claimed is: 1. A solder bump assembly method, comprising: assembling a first component including solder bumps with a second component including connectors, the assembly of the first and second components being preceded by pre-treating the first and second components wherein the solder bumps are contacted with a pre-treatment liquid configured to at least partially remove an oxide layer initially present on the solder, and carrying out the assembly of the components after the pre-treatment in the absence of liquid or gas flux, wherein the pre-treatment liquid is an aqueous solution containing carboxylic acids or polycarboxylic acids. 2. The method according to claim 1 , wherein the contacting with the pre-treatment liquid is configured to leave a thin film on a surface of the first and second components, with a thickness less than 100 nm, the thin film having a property of promoting effective soldering without leaving residues after assembly, the method comprising prolonging action of the pre-treatment so that soldering can be done more than one hour after the pre-treatment without reducing the assembly efficiency. 3. The method according to claim 1 , the aqueous solution containing amines or polyamines. 4. The method according to claim 1 , the aqueous solution containing amino acids or poly amino acids. 5. The method according to claim 1 , wherein the pre-treatment liquid is an aqueous solution containing glutamic acid hydrochloride, in a concentration comprised between 10 and 20% by mass. 6. The method according to claim 1 , wherein the pre-treatment liquid contains a strong acid in an amount sufficient for the pre-treatment liquid to reach a pH of less than 2. 7. The method according to claim 1 , wherein the pre-treatment liquid contains an acid detergent. 8. The method according to claim 1 , further comprising rinsing the first and second components immediately after contact with the pre-treatment liquid with a solvent allowing the solubilisation of the solutes present in the pre-treatment liquid at an amount of at least 10%, so that only an adsorbed molecular film remains on the solder. 9. The method according to claim 1 , further comprising rinsing the first and second components immediately after contact with the pre-treatment liquid with a solvent allowing dissolution of not more than 0.1% of the solutes present in the pre-treatment liquid, so that a thin film of nanometric thickness comprised between 1 and 100 nm remains on the treated components. 10. The method according to claim 1 , further comprising drying the first and second components immediately after contact with the pre-treatment liquid, then washing with a poor solvent from the solutes present in the pre-treatment liquid. 11. The method according to claim 1 , wherein the contact with the pre-treatment liquid is made by immersion, and a contact time with the pre-treatment liquid is between 1 and 5 minutes, the assembly by soldering then being carried out less than four hours after the pre-treatment, in a presence of air or under neutral gas. 12. The method according to claim 3 , wherein the pre-treatment liquid is a solution containing a basic detergent, the pH of said solution being between 11 and 13. 13. The method according to claim 1 , wherein the pre-treatment liquid is a solution containing an acid detergent, the pH of said solution being between 1 and 3. 14. The method according to claim 12 wherein the detergent is non-foaming, the contact with the pre-treatment liquid can be made by immersion, the contact time with the pre-treatment liquid is between 1 and 5 minutes, and the contact with the pre-treatment liquid is followed by rinsing, then by drying, the assembly by soldering then being carried out less one hour after the pre-treatment. 15. The method according to claim 14 , wherein the rinsing is carried out with one of water and isopropanol, and the drying is carried out under a neutral gas atmosphere. 16. The method according to claim 6 , wherein the strong acid is hydrochloric acid, with a concentration comprised between 0.1% and 1% by mass. 17. The method according to claim 8 , wherein the solvent is water. 18. The method according to claim 9 , wherein the solvent is isopropanol. 19. The method according to claim 10 , wherein the solvent is isopropanol. 20. The method according to claim 11 , wherein the immersion comprises immersing in an ultrasonic bath.
between stacked chips · CPC title
Soldering or alloying · CPC title
Treating the bond pad before connecting, e.g. by applying flux or cleaning · CPC title
Cleaning, e.g. oxide removal or de-smearing · CPC title
of outermost layers of multilayered bumps, e.g. material of a coating · CPC title
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